基于激光干涉的电容位移传感器非线性误差标定方法

发布时间：2018-04-21 21:15

本文选题：测量 + 标定　；参考：《激光与光电子学进展》2017年10期

【摘要】：针对微推力测量中电容位移传感器需要频繁标定非线性误差的问题,提出了一种基于激光干涉的现场标定方法。标定原理为:在直线位移台上同时调节可动角隅棱镜与测量目标的位置,进而改变干涉光路光程差及电容位移传感器极板间距,以激光干涉测量结果为基准,采用线性拟合方法,对传感器非线性误差进行标定。搭建了基于常用光学元件的干涉光路,对应用于微推力测量中不同量程的传感器进行标定。在分析干涉光强变化特点的基础上,确定了干涉条纹数计算方法,得到干涉光路的位移测量精度为66.5nm。实验验证了该校准装置的实用性和准确性,最后对标定结果、传感器输出非线性误差以及影响激光干涉测量精度的主要因素进行了分析,得到激光干涉测量总误差为67.2nm。
[Abstract]:Aiming at the problem that the capacitance displacement sensor needs frequent calibration nonlinear error in micro thrust measurement, a field calibration method based on laser interference is proposed. The calibration principle is that the position of the movable corner prism and the measuring object is adjusted simultaneously on the linear displacement table, and then the optical path difference of the interference path and the distance between the electrodes of the capacitive displacement sensor are changed, and the results of laser interferometry are taken as the reference. The nonlinear error of sensor is calibrated by linear fitting method. The interferometric light path based on common optical elements is built to calibrate the sensors which are used in micro thrust measurement with different measuring ranges. On the basis of analyzing the characteristics of interference intensity, the calculating method of interference fringe number is determined. The displacement measurement precision of interference light path is 66.5 nm. The practicability and accuracy of the calibration device are verified by experiments. Finally, the calibration results, the nonlinear error of sensor output and the main factors affecting the accuracy of laser interference measurement are analyzed. The total error of laser interferometry measurement is 67.2 nm.
【作者单位】：装备学院激光推进及其应用国家重点实验室;
【基金】：国家自然科学基金(11602304)
【分类号】：TP212;V43

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