高性能石墨烯霍尔传感器

发布时间：2018-04-30 07:06

  本文选题：石墨烯 + 霍尔传感器　； 参考：《物理学报》2017年21期

【摘要】：本文回顾了石墨烯霍尔传感器的相关研究工作.通过改善石墨烯生长转移和霍尔元件的微加工工艺,石墨烯霍尔元件和霍尔集成电路都展示出超越传统霍尔传感器的优异性能.石墨烯霍尔元件的灵敏度、分辨率、线性度和温度稳定性等重要指标都优于传统商用霍尔元件.通过开发一套钝化工艺,霍尔元件的稳定性有了明显提升.结合石墨烯材料的特点,展示了石墨烯在柔性磁传感和多功能传感领域的新颖应用.此外,成功实现了石墨烯/硅互补型金属-氧化物-半导体(CMOS)混合霍尔集成电路,并进行了应用展示.通过发展一套低温加工工艺(不超过180℃),将石墨烯霍尔元件制备在硅基CMOS芯片的钝化层上,从而与硅基CMOS电路实现了单片集成.本文的研究结果表明石墨烯在霍尔磁探测方向拥有重大的性能优势,在产业化应用中有巨大发展潜力.
[Abstract]:In this paper, the research work of graphene Hall sensor is reviewed. By improving the growth and transfer of graphene and the micro-fabrication process of Hall elements, both graphene Hall elements and Hall integrated circuits show excellent performance over traditional Hall sensors. The sensitivity, resolution, linearity and temperature stability of graphene Hall elements are superior to those of conventional commercial ones. By developing a passivation process, the stability of Hall element has been improved obviously. Combined with the characteristics of graphene materials, the novel applications of graphene in the field of flexible magnetic sensing and multifunctional sensing are demonstrated. In addition, the graphene / silicon complementary metal-oxide-semiconductor CMOS hybrid Hall integrated circuit has been successfully realized, and its application has been demonstrated. By developing a set of low temperature processing technology (no more than 180 鈩，

本文编号：1823570