薄膜谐振Lamb波传感器测量液体流速矢量的方法

发布时间：2018-05-01 19:32

本文选题：薄膜谐振型Lamb波传感器 + 消逝波　；参考：《光学精密工程》2017年01期

【摘要】：针对液体流速测量领域中微型流量传感器高品质因数、高灵敏度的性能要求。本文设计一种双端增强型薄膜谐振结构实现Lamb波传感器的高品质因数,利用传感器反对称模式(A01模式)在薄膜-液体界面处的消逝波实现液体流速矢量测量。所制作的双端增强型薄膜谐振Lamb传感器A01模式的主峰品质因数为703,A01模式的频率移动量与液体流速大小存在线性关系,频率移动方向与液体流动方向存在对应关系。流速实测灵敏度约为270 Hz/mm/s,传感器稳定性噪声小于0.2Hz,流速最低检测极限值(LOD)为2.2μm/s,流量最低检测极限值(LOD)为18.3nL/min。结果表明,双端增强型薄膜谐振Lamb波传感器可以实现液体流速高灵敏度矢量测量。
[Abstract]:The performance requirements of micro flow sensors in liquid flow measurement field are high quality factor and high sensitivity. In this paper, a two-terminal enhanced thin film resonant structure is designed to realize the high quality factor of Lamb wave sensor. The disappearing wave at the thin-liquid interface is used to realize the measurement of liquid velocity vector by using the anti-symmetric mode A01 mode of the sensor. The main peak quality factor of the two-terminal enhanced thin film resonant Lamb sensor A01 is the linear relationship between the frequency movement and the liquid flow velocity, and the relationship between the frequency movement direction and the liquid flow direction. The measured sensitivity of flow velocity is about 270 Hz / mm / s, the stability noise of the sensor is less than 0.2 Hz, the lowest detection limit of velocity is 2.2 渭 m / s, and the lowest detection limit of flow rate is 18.3nL / min. The results show that the dual end enhanced thin film resonant Lamb wave sensor can realize the high sensitivity vector measurement of liquid velocity.
【作者单位】：上海大学机电工程与自动化学院;中国科学院苏州生物医学工程技术研究所;
【基金】：国家863高技术研究发展计划资助项目(No.2015AA042603)
【分类号】：TP212

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