基于Al掺杂ZnO的丙酮气敏传感器以及紫外光激发对其气敏性能的影响

发布时间：2018-05-18 16:17

  本文选题：氧化锌 + 金属氧化物　； 参考：《传感技术学报》2016年06期

【摘要】：采用溶胶凝胶法制备的Al掺杂ZnO纳米粉末(AZO)。利用X射线衍射(XRD)和扫描电子显微镜(SEM)表征样品的晶体结构和表面形貌。采用浸渍提拉法将该样品制成旁热式气体传感器,检测其对不同气体的响应恢复特性。结果表明:Al掺杂ZnO表面粗糙,Al的掺杂能够抑制ZnO晶粒增长。当工作温度为70℃、湿度为27%RH时,4.98wt.%Al掺杂ZnO对丙酮气体具有很好的选择性,电阻灵敏度达到了14 075,响应和恢复时间分别为1 s和3 s。紫外光照射可明显提高传感器的气敏特性,并降低工作温度。
[Abstract]:Al doped ZnO nano-powders were prepared by sol-gel method. The crystal structure and surface morphology of the samples were characterized by X-ray diffraction (XRD) and scanning electron microscopy (SEM). The para-thermal gas sensor was made by dipping Czochralski method, and its response and recovery characteristics to different gases were tested. The results show that the doping of coarse Al on the surface of ZnO can inhibit the growth of ZnO grains. When the working temperature is 70 鈩，

本文编号：1906530