面向海洋应用的光纤法布里-珀罗高压传感器

发布时间：2018-05-26 03:08

本文选题：光纤光学 + 光纤传感器　；参考：《光学学报》2017年02期

【摘要】：研究了面向海洋应用的光纤法布里-珀罗高压传感器,通过建立有限元数值模型对传感器满量程腔长变化量进行分析。数值仿真显示,有限元模型的满量程腔长变化量处于固支模型和简支模型之间,且随着法布里-珀罗腔半径的减小和硅膜片厚度的增加而偏离固支模型。引入固支边界条件偏离度β对偏离程度进行量化分析。制作了三种不同规格的传感器进行压力实验研究。实验结果显示,实际测量得到的传感器芯片满量程腔长变化量与有限元数值计算的结果基本吻合,使用该有限元模型设计传感器芯片可将满量程腔长变化量误差降低到13.4%以下。传感器最大量程达到105 MPa,满量程测量精度均优于0.100%。
[Abstract]:An optical fiber Fabry-Perot high voltage sensor for ocean applications is studied. The finite element numerical model is established to analyze the full range cavity length of the sensor. Numerical simulation shows that the variation of the full range cavity length of the finite element model is between the clamped model and the simply supported model, and deviates from the clamping model with the decrease of Fabry-Perot cavity radius and the increase of the thickness of silicon diaphragm. The deviation degree 尾 of fixed boundary condition is introduced to quantitatively analyze the deviation degree. Three kinds of sensors with different specifications were made to study the pressure. The experimental results show that the actual measurement of the full range cavity length of the sensor chip is basically consistent with the finite element numerical results. Using the finite element model to design the sensor chip, the error of the full range cavity length variation can be reduced to less than 13.4%. The maximum range of the sensor is 105 MPA, and the full range measurement accuracy is better than 0.100.
【作者单位】：天津大学精密仪器与光电子工程学院光纤传感研究所光电信息技术教育部重点实验室;
【基金】：国家973计划(2010CB327802) 国家自然科学基金(61227011,61378043,61475114,61505139) 国家重大科学仪器设备开发专项(2013YQ030915) 教育部科学技术研究重大项目(313038) 天津市自然科学基金(13JCYBJC16200,16JCQNJC02000) 深圳市科技创新委员会项目(JCYJ20120831153904083) 海洋经济创新发展区域示范项目(CXSF2014-38) 中国空间技术研究院CAST创新基金
【分类号】：TP212

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