基于LTCC的无线无源双参数传感器

发布时间：2018-06-02 18:39

  本文选题：无线无源 + 双参数　； 参考：《传感技术学报》2017年04期

【摘要】：设计了一个基于低温共烧陶瓷(LTCC)技术的无线无源双参数传感器,传感器基于LC(inductor-Capacitor)谐振原理,询问天线通过无线遥测的方式获取传感器的压力和温度信号。在传感器基板上集成了两个LC谐振回路,谐振回路中两个电容分别对压力和温度参数敏感,同时两电感采用特殊结构来减少双参数在测试时的互感串扰。搭建了温度-压力复合测试平台,对传感器进行了相关测试。传感器最高测试温度为300℃,温度灵敏度为-14.27 k Hz/℃,压力灵敏-13.75 k Hz/k Pa,实验结果表明,这种设计能明显减少两参数之间的互感影响。
[Abstract]:A wireless passive two-parameter sensor based on low temperature co-fired ceramic LTCC technology is designed. The sensor is based on the LC inductor-Capacitor resonance principle. The sensor can obtain the pressure and temperature signals of the sensor by wireless telemetry. Two LC resonant circuits are integrated on the sensor substrate, in which the two capacitors are sensitive to the pressure and temperature parameters, and the two inductors adopt a special structure to reduce the mutual inductance crosstalk between the two parameters in the test. The temperature-pressure compound test platform was built and the sensor was tested. The maximum temperature of the sensor is 300C, the temperature sensitivity is -14.27k Hz/ 鈩，

本文编号：1969783