氧化锌纳米结构声表面波传感器的制备及气敏性能的研究

发布时间：2018-06-07 18:28

本文选题：氧化锌 + 纳米结构　；参考：《电子科技大学》2017年硕士论文

【摘要】：纳米结构的敏感吸附膜是声表面波传感器的研究中的热点。氧化锌具有良好压电特性、紫外吸收以及荧光特性,在气敏检测与UV测试中都具有良好的应用;氧化锌纳米结构在当前众多氧化物纳米结构中,是极具研究价值的。本论文制备并研究纯ZnO纳米结构,主要依靠AFM、SEM、XRD以及光透过率对ZnO纳米结构进行表征;并制备ZnO纳米结构声表面波传感器用于检测气敏特性与UV特性。实验的主要工作包括:1.制备ZnO纳米薄膜,对ZnO纳米薄膜进行AFM、XRD、SEM以及光透过率表征;制备了该材料的声表面波传感器,利用传感器进行气敏检测和UV特性检测,在实验中该传感器检测到浓度为10 ppm的氨气以及探测到辐照仅为6μw/cm~2的波长为365 nm的紫外线。研究在溶胶凝胶法制备ZnO纳米薄膜时,溶胶的溶剂、乙酸锌浓度以及烧结时间对纳米薄膜的影响。发现了响应变化为正值的ZnO纳米薄膜声表面波传感器。2.利用聚酰亚胺胶带通过遮盖的方法,保护ST切石英声表面波器件的叉指换能器、反射栅以及敏感区域的一部分,制备仅覆盖敏感区域一部分的ZnO纳米棒阵列,对该阵列进行SEM、XRD以及透过率表征;制备该结构相应的声表面波传感器,进行UV紫外特性检测和气敏检测。制备无种子层的ZnO纳米棒阵列,对该结构进行SEM、XRD、透过率表征;制备该结构的声表面波传感器,进行气敏检测。两种传感器在气敏测试中都取得了十分理想的结果,对浓度为10 ppm的氨气相应都超过100 Hz,部分覆盖生长的纳米棒阵列传感器在紫外检测中探测到6μw/cm~2并取得了200 Hz的响应。3.制备ZnS纳米片结构,对该材料进行SEM、XRD表征;制备基于ZnS纳米片的声表面波传感器并测试其气敏特性,对氨气表现出良好的选择性,在氨气检测中检测浓度为1 ppm的氨气响应为170 Hz。
[Abstract]:The sensitive adsorption film of nanostructure is a hot spot in the research of saw sensor. Zinc oxide has good piezoelectric properties, UV absorption and fluorescence characteristics, and has good applications in gas sensing and UV testing. Zinc oxide nanostructures are of great value in many oxide nanostructures. In this thesis, pure ZnO nanostructures were prepared and studied, which were characterized by AFM Sem XRD and optical transmittance, and the surface acoustic wave (saw) sensors were fabricated for gas sensing and UV detection. The main work of the experiment included: 1. ZnO nanocrystalline films were prepared and characterized by AFMXRDX SEM and optical transmittance. Surface acoustic wave sensors were used to detect gas sensitivity and UV characteristics of ZnO nanocrystalline films. In the experiment, the sensor detects ammonia gas with concentration of 10 ppm and UV radiation of only 6 渭 w/cm~2 at 365nm. The effects of sol-solvent, zinc acetate concentration and sintering time on ZnO nanocrystalline films prepared by sol-gel method were studied. The surface acoustic wave sensor of ZnO nanocrystalline film with positive response was found. By using polyimide tape to protect the cross finger transducer, reflecting gate and part of sensitive region of St cut quartz saw device, ZnO nanorods arrays covering only one part of sensitive area were prepared. The array was characterized by SEM XRD and transmittance, and the corresponding surface acoustic wave sensor was prepared for UV UV and gas sensitive detection. ZnO nanorod arrays without seed layer were prepared and the structure was characterized by SEMX RD.The surface acoustic wave sensor of the structure was prepared for gas sensing. The two kinds of sensors have obtained very ideal results in the gas sensitivity test. The ammonia concentration of 10 ppm is higher than 100Hz. the partially covered nanorod array sensor detects 6 渭 w/cm~2 in UV detection and obtains 200Hz response. 3. ZnS nanostructures were prepared and characterized by means of SEM XRD. Surface acoustic wave sensors based on ZnS nanoplates were prepared and their gas sensing properties were tested. In the detection of ammonia gas, the response of ammonia gas with a concentration of 1 ppm was 170Hz.
【学位授予单位】：电子科技大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TB383.1;TP212

【参考文献】