基于平面线圈的高分辨力时栅角位移传感器

发布时间：2018-06-08 18:27

本文选题：角位移测量 + 平面线圈　；参考：《光学精密工程》2017年01期

【摘要】：针对现有时栅角位移传感器采用漆包线绕制工艺加工线圈,导致线圈布线不均且容易随时间发生变化进而影响测量精度的问题,提出一种基于PCB技术的新型时栅角位移传感器。该传感器通过在PCB基板的不同层上布置特定形状的激励线圈和感应线圈,形成两个完全相同并沿圆周空间正交的传感单元;当在两传感单元的激励线圈中分别通入时间正交的两相激励电流后,通过导磁定子基体和具有特定齿、槽结构的导磁转子对传感单元内的磁场实施精确约束,使两传感单元的感应线圈串联输出初相角随转子转角变化的正弦感应信号;最后通过高频时钟脉冲插补初相角实现精密角位移测量。利用有限元分析软件对传感器进行了建模和仿真。根据仿真模型制作了传感器实物,开展了验证实验,并对实验中角位移测量误差的频次和来源进行了详细分析。经过标定和补偿,最终获得了整周范围内误差在-2.82″~2.02″的时栅角位移传感器。理论推导、仿真分析和实验验证均表明,该传感器不仅能实现精密角位移测量,还能在激励线圈和感应线圈空间极距和信号质量不变的情况下,将位移测量的分辨力从信号源头提高1倍,且结构简单稳定、极易实现,特别适用于环境恶劣的工业现场。
[Abstract]:In order to solve the problem that the current time-grid angular displacement sensor uses enamelled wire winding technology to process the coil, which leads to the uneven wiring of the coil and easy to change with time, thus affecting the measurement accuracy, a new type of time-grid angular displacement sensor based on PCB technology is proposed. The sensor forms two sensing units which are identical and orthogonal along the circumference space by arranging a specific shape excitation coil and induction coil on different layers of the PCB substrate. The magnetic field in the sensor unit is precisely constrained by the magnetic conduction stator matrix and the magnetic conduction rotor with a specific tooth and slot structure, when the excitation coil of the two sensing units is connected with a two-phase excitation current that is orthogonal to each other, and the magnetic field in the sensor unit is precisely constrained by the stator matrix and the rotor with a specific tooth and slot structure. The inductive coils of the two sensing units are used to output sinusoidal signals whose initial phase angle varies with the rotor rotation angle in series, and the precise angular displacement measurement is realized by interpolation of the initial phase angle with high frequency clock pulse. The finite element analysis software is used to model and simulate the sensor. According to the simulation model, the sensor is made, the verification experiment is carried out, and the frequency and source of the angular displacement measurement error in the experiment are analyzed in detail. After calibration and compensation, a time-grid angular displacement sensor with an error of -2.82 "2.02" is finally obtained. Theoretical derivation, simulation analysis and experimental verification show that the sensor can not only achieve precise angular displacement measurement, but also can be used in the case of constant spatial pole distance and signal quality of excitation coil and induction coil. The resolution of displacement measurement is doubled from the signal source head, and the structure is simple and stable, which is easy to be realized. It is especially suitable for the industrial field where the environment is bad.
【作者单位】：重庆理工大学机械工程学院;时栅传感及先进检测技术重庆市重点实验室;
【基金】：国家自然科学基金资助项目(No.51505052,No.51405049) 重庆市科技研发基地能力提升计划项目(No.cstc2014pt-sy40002)
【分类号】：TP212

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