时栅传感器直驱式误差自动标定与修正系统

发布时间：2018-06-20 00:04

本文选题：时栅角位移传感器 + 激光干涉仪　；参考：《仪器仪表学报》2016年05期

【摘要】：针对研制时栅位移传感器过程中的误差标定环节,常规光栅传感器精度不满足要求的问题,采用激光干涉仪作为误差标定基准,自主研制了基于激光干涉仪的直驱式时栅角位移传感器误差自动标定与修正系统。利用时栅角位移传感器的多测头结构与误差曲线等间距周期性分布的特性,以一个对极的误差曲线重构传感器整周的误差曲线,采用多项式拟合算法构建了时栅角位移传感器的误差修正模型。实验结果表明,误差自动标定与修正系统可以快速、准确地对时栅角位移传感器进行自动误差标定与修正,修正后的时栅角位移传感器的整周误差达到±0.43″。
[Abstract]:In order to solve the problem that the accuracy of conventional grating sensor can not meet the requirement of error calibration during the development of grating displacement sensor, the laser interferometer is used as the standard of error calibration. An automatic error calibration and correction system for direct-drive time grating angular displacement sensor based on laser interferometer is developed. Based on the characteristics of the periodic distribution of the structure of multi-probe and the equal spacing of error curve of the time grating angular displacement sensor, the whole cycle error curve of the sensor is reconstructed with an error curve of the opposite pole. The error correction model of time grating angular displacement sensor is constructed by polynomial fitting algorithm. The experimental results show that the automatic error calibration and correction system can be used to calibrate and correct the error of the time grating angular displacement sensor quickly and accurately, and the whole cycle error of the modified time grating angular displacement sensor is 卤0.43 ".
【作者单位】：重庆理工大学机械检测技术与装备教育部工程研究中心;
【基金】：国家自然科学基金(51205434,51305478) 重庆市教委科学技术研究项目(KJ1400904) 重庆市科技计划项目(cstc2014jeyj A70003)资助
【分类号】：TP212

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