硅谐振式压力传感器敏感结构设计与仿真

发布时间：2018-06-21 23:02

  本文选题：谐振式压力传感器 + 敏感结构　； 参考：《仪表技术与传感器》2017年03期

【摘要】：根据双端固支梁的谐振频率求解,以及方形膜片在压力下形变和应力的理论分析,设计了一个基于梁-膜结构硅谐振式压力传感器敏感结构的模型。对该模型进行ANSYS仿真,得到它在1个大气压下的总形变和应力分布,以及前六阶的振动模态。比较方形膜片和长方形膜片下敏感结构的仿真结果,得出相同面积下长方形膜片的灵敏度更高,检测时非线性误差更小。通过对不同厚度硅梁与硅膜下敏感结构的仿真,最终设定硅膜与硅梁的厚度分别为50μm和10μm。该传感器主要用于航空仪器仪表中对大气压的高精度检测。
[Abstract]:According to the solution of the resonant frequency of the double-end clamped beam and the theoretical analysis of the deformation and stress of the square diaphragm under the pressure, a sensitive structure model of silicon resonant pressure sensor based on the beam-membrane structure is designed. The total deformation and stress distribution of the model at 1 atmospheric pressure and the first six vibration modes are obtained by ANSYS simulation. By comparing the simulation results of the sensitive structure under the square diaphragm and the rectangular diaphragm, it is concluded that the sensitivity of the rectangular diaphragm is higher and the nonlinear error of the detection is less. Through the simulation of silicon beam with different thickness and sensitive structure under silicon film, the thickness of silicon film and silicon beam is set to be 50 渭 m and 10 渭 m respectively. The sensor is mainly used for high precision measurement of atmospheric pressure in aeronautical instruments and instruments.
【作者单位】： 合肥工业大学电子科学与应用物理学院;中国科学院合肥智能机械研究所传感技术国家重点实验室;安徽工业大学机械工程学院;
【基金】：2014年国家青年自科基金项目(51405001) 2014年安徽省青年自科基金项目(1408085QE98) 中国科学院合肥物质科学研究院院长基金项目(YZJJ201504)
【分类号】：TP212
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本文编号：2050407