激光传感器光轴垂直度误差标定方法

发布时间：2018-06-24 02:44

本文选题：传感器 + 垂直度误差标定　；参考：《中国激光》2017年04期

【摘要】：针对高精度复合式测量机中的激光传感器进行了高精度的标定,提出了利用已知底角的双斜面标定块和正弦定理标定光轴垂直度误差偏角的方法,分析了影响标定精度的因素。该方法避免了传感器光轴与工作台不垂直引入的各个方向的误差,可有效地提高该传感器的测量精度,为更高精度的多传感器复合测量提供了基础。
[Abstract]:In this paper, the laser sensor in high precision compound measuring machine is calibrated with high precision. The method of calibrating optical axis verticality error deviation angle by using double inclined surface calibration block with known base angle and sinusoidal theorem is put forward, and the factors influencing the calibration accuracy are analyzed. This method avoids the errors in every direction caused by the non-perpendicular direction between the optical axis and the worktable of the sensor, and can effectively improve the measuring accuracy of the sensor, and provides the basis for the multisensor composite measurement with higher accuracy.
【作者单位】：天津大学精密测试技术及仪器国家重点实验室;中国计量科学研究院;
【基金】：国家重大科学仪器设备开发专项(2013YQ17053903)
【分类号】：TP212

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