基于摩擦电原理的自供能电阻式气体传感器研究

发布时间：2018-08-18 11:09

【摘要】：生活生产中废气的排放造成了大气的污染,严重威胁了人们的身体健康,同时人类也一直面临能源问题的困扰,所以研发一种低成本、低功耗、高灵敏度的气体传感器是一件十分有意义的事情。摩擦电荷在生活中到无处不在,在很多情况下,摩擦起电被认为是一种负面的物理现象,然而摩擦发电机的发明,为摩擦电荷应用打开了广阔的空间。叉指电极是一种性能优良的电极结构,在其上沉积气体敏感薄膜,可以制备电阻式气体传感器。将摩擦发电机与电阻式气体传感器相结合,可以制备一种新型的气体传感器—自供能气体传感器,其中摩擦发电机是自供能气体传感器的能量收集部件。该类型的气体传感器具有诸多优点,比如成本低、功耗低、鲁棒性强等。本文基于二氧化氮(NO_2)气体的检测,制备了基于摩擦电原理的分离式电阻式自供能气体传感器,主要内容有以下几个方面:首先,制备了不同尺寸、不同接触材料的接触分离模式的摩擦发电机,并研究了摩擦发电机开路电压,短路电流,电压阻抗效应和电流阻抗效应的机理,同时研究了摩擦发电机的面积大小和接触材料对发电机性能的影响。实验结果表明,增大摩擦发电机接触面的面积以及间距、采用得失电子能力相差大的接触面材料、加快极板运动速度有利于提高摩擦发电机峰峰值电压或电流的输出性能。其次,用PTFE和Cu材料制备了接触面积为100cm2的摩擦发电机和在紫外光辅助条件下,制备了基于氧化锌(ZnO)材料的NO_2气体传感器。研究了敏感薄膜厚度对NO_2的响应性能,发现存在一个最佳的响应薄膜厚度,结果表明,喷涂量为2mL的的ZnO酒精悬浮液(3mg/mL)响应最佳:其灵敏度为0.167ppm-1,在100ppm的NO_2的浓度下,其响应达到14.8。最后,在最佳喷涂量的条件下,研究了基于氧化锌(ZnO)和还原石墨烯(RGO)材料制备的单层、分层、混合五种类型的器件,并对五种类型的器件进行了响应测试、重复性测试和选择性进行测试。测试结果表明,RGO和ZnO混合器件其响应灵敏度最高,达到0.196ppm-1。该器件在100ppm NO_2浓度下,响应为16.7,同时具有较好的选择性,但相对于纯的ZnO器件,RGO和ZnO混合器件重复性能略微降低。
[Abstract]:The emission of waste gas in daily production has caused air pollution and seriously threatened the health of people. At the same time, human beings have been confronted with energy problems, so we have developed a kind of low cost and low power consumption. A highly sensitive gas sensor is a very meaningful thing. Friction charge is ubiquitous in daily life. In many cases, friction charging is regarded as a negative physical phenomenon. However, the invention of friction generator opens a wide space for the application of friction charge. InterDigital electrode is a kind of excellent electrode structure on which gas sensitive film can be deposited and resistive gas sensor can be prepared. By combining friction generator with resistive gas sensor, a new type of gas sensor, self-supply gas sensor, is developed, in which friction generator is the energy collecting component of self-supply gas sensor. This type of gas sensor has many advantages, such as low cost, low power consumption, strong robustness and so on. In this paper, based on the detection of nitrogen dioxide (NO_2) gas, a separate resistive self-energy gas sensor based on triboelectric principle is prepared. The main contents are as follows: firstly, different sizes are prepared. The mechanism of open circuit voltage, short circuit current, voltage impedance effect and current impedance effect of friction generator is studied. At the same time, the effect of the area size and contact material of friction generator on the performance of the generator is studied. The experimental results show that increasing the area and spacing of the contact surface of friction generator, using contact surface materials with large difference in gain and loss electronic capacity, and accelerating the speed of plate motion are conducive to improving the output performance of peak and peak voltage or current of friction generator. Secondly, friction generator with contact area of 100cm2 and NO_2 gas sensor based on ZnO (ZnO) material were fabricated by using PTFE and Cu materials. The response performance of the sensitive film thickness to NO_2 was studied. It was found that there was an optimal response film thickness. The results showed that the ZnO alcohol suspension (3mg/mL) with the spraying amount of 2mL had the best response: its sensitivity was 0.167 ppm-1, under the concentration of NO_2 of 100ppm. The response reached 14.8. Finally, under the condition of optimum spraying amount, the monolayer, delamination and mixing of five kinds of devices based on zinc oxide (ZnO) and reduced graphene (RGO) are studied, and the responses of five kinds of devices are tested. Repeatability test and selective test. The test results show that the RGO / ZnO hybrid device has the highest response sensitivity, reaching 0.196 ppm-1. The response of the device at 100ppm NO_2 concentration is 16.7, and it has good selectivity, but compared with pure ZnO device, the repeatability of RGO and ZnO hybrid device is slightly reduced.
【学位授予单位】：电子科技大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TP212

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