基于铌酸锂的高温压电加速度传感器设计
发布时间：2018-08-20 09:59
【摘要】：设计一种耐高温、高稳定性、高可靠性的加速度传感器,针对航空发动机高温恶劣的振动测试环境,传感器选用高居里温度的铌酸锂晶体作为压电元件,整体采用剪切式结构,利用特征系数最大的压电晶体切型,确定特征系数最大的压电晶体切向,以获得铌酸锂晶体较强的压电效应。研制双层铠装高温低噪声电缆,采用高温合金及矿物绝缘等耐高温材料,可在高温环境下长期使用,有效解决传感器小信号高温传输可靠性问题。优化设计传感器结构、封装工艺和测量系统,传感器频响、动态协议性能大为改善。通过对传感器的频率和温度响应、电容损耗等试验表明该传感器在550℃高温环境下能够保持高的可靠性和稳定性,提升航空发动机振动测试的技术能力。
[Abstract]:An acceleration sensor with high temperature resistance, high stability and high reliability is designed. In view of the harsh vibration test environment of aero-engine at high temperature, the high Curie temperature lithium niobate crystal is selected as the piezoelectric element and the shear structure is adopted as a whole. The tangent direction of the piezoelectric crystal with the largest characteristic coefficient is determined by using the tangent form of the piezoelectric crystal with the largest characteristic coefficient, and the strong piezoelectric effect of the lithium niobate crystal is obtained. A double-layer sheathed high-temperature and low-noise cable with high temperature resistance such as superalloy and mineral insulation is developed. It can be used for a long time in high temperature environment and can effectively solve the problem of reliability of small signal high temperature transmission of sensor. The sensor structure, encapsulation process and measurement system are optimized. The sensor frequency response and dynamic protocol performance are greatly improved. The experiments of frequency and temperature response, capacitance loss and so on show that the sensor can maintain high reliability and stability at 550 鈩，
本文编号：2193214
[Abstract]:An acceleration sensor with high temperature resistance, high stability and high reliability is designed. In view of the harsh vibration test environment of aero-engine at high temperature, the high Curie temperature lithium niobate crystal is selected as the piezoelectric element and the shear structure is adopted as a whole. The tangent direction of the piezoelectric crystal with the largest characteristic coefficient is determined by using the tangent form of the piezoelectric crystal with the largest characteristic coefficient, and the strong piezoelectric effect of the lithium niobate crystal is obtained. A double-layer sheathed high-temperature and low-noise cable with high temperature resistance such as superalloy and mineral insulation is developed. It can be used for a long time in high temperature environment and can effectively solve the problem of reliability of small signal high temperature transmission of sensor. The sensor structure, encapsulation process and measurement system are optimized. The sensor frequency response and dynamic protocol performance are greatly improved. The experiments of frequency and temperature response, capacitance loss and so on show that the sensor can maintain high reliability and stability at 550 鈩，
本文编号：2193214
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