光学加工机器人运动特性分析

发布时间：2018-11-09 15:09

【摘要】：随着光学系统应用日益广泛,对于光学元件的需求也逐渐增加。为满足光学元件大批量、低成本生产要求,光学制造业必须寻求高效率、高精度、经济实用的加工手段。经过多年的发展,光学制造业中产生了如离子束、磁流变、气囊等许多新兴技术与一系列加工设备,其加工精度和加工效率也有了一定的提高。但这些加工设备往往受到空间尺寸的限制,无法加工大口径或特殊工件。基于工业机器人的高灵活度光学加工系统能够满足加工特殊工件的要求。本文以光学加工机器人为研究对象,针对现有机器人手臂刚性较低,在光学加工中存在定位误差较大的缺点,从其运动特性出发开展研究工作,包括以下几个方面的内容:1.以普林斯顿假设和线性移不变假设为基础,建立磨头材料去除模型。分析了磨盘三种常用运动方式,以及所对应的去除函数模型。讨论了机器人加工控制模型的驻留时间算法。2.基于Denavit-Hartenberg(DH)机器人描述方法,建立了光学加工机器人连杆坐标系以及运动学计算模型,并在Matlab中仿真验证了所建立的运动学模型与控制器中的运动学模型一致。提出了标定磨头工具坐标系的方法以及标定工件坐标系的方法。在此基础上分析了机器人加工系统的坐标转换关系与面型定位原理。3.提出并使用激光跟踪仪测量光学加工机器人重复定位误差、绝对定位误差、驻留点定位误差以及运动精度。在此基础上分析了光学加工机器人的驻留点定位误差对驻留时间和加工轨迹的影响。通过加工仿真计算出机器人驻留点定位误差对驻留时间及对去除量的影响。4.为验证光学加工机器人的定位误差对光学加工的影响:使用SIAI机器人均匀抛光Φ130mm平面镜,并使用补偿的方法使得去除量误差由53.38nm减小至26.64nm。将以上研究成果应用到正式件的光学加工中:使用SIAI、Staubli等型号机器人加工Φ500mm离轴抛物面,从粗磨到抛光过度阶段总共历时26个加工周期,面型误差从51.2832um收敛到3.7151um,并在在加工期间,使用误差补偿的方式提高了5~10%的加工效率。
[Abstract]:With the increasing application of optical systems, the demand for optical components is increasing. In order to meet the requirements of mass production and low cost of optical components, the optical manufacturing industry must seek high efficiency, high precision and economical and practical processing methods. After years of development, many new technologies such as ion beam, magnetorheology, airbag and a series of processing equipment have been produced in the optical manufacturing industry. The machining accuracy and efficiency have also been improved. However, these processing equipment are often limited by space size, unable to process large caliber or special workpiece. The high flexibility optical machining system based on industrial robot can meet the requirements of machining special workpieces. In this paper, optical machining robot is taken as the research object. Aiming at the disadvantage of low rigidity of robot arm and large positioning error in optical machining, the research work is carried out from its motion characteristics, including the following aspects: 1. Based on Princeton hypothesis and linear shift invariant hypothesis, the material removal model of grinding head is established. This paper analyzes three kinds of common motion modes of grinding disc and the corresponding removal function model. The resident time algorithm of robot machining control model is discussed. 2. Based on the description method of Denavit-Hartenberg (DH) robot, the coordinate system and kinematics calculation model of optical machining robot are established. The simulation results in Matlab show that the kinematics model is consistent with the kinematics model in the controller. The calibration method of grinding tool coordinate system and the method of calibrating workpiece coordinate system are put forward. On this basis, the coordinate transformation relation and surface positioning principle of robot machining system are analyzed. 3. This paper presents and uses laser tracker to measure the error of repeated position, absolute position, resident point and motion of optical machining robot. On this basis, the effect of the location error of the dwell point on the dwell time and the machining path of the optical machining robot is analyzed. The effect of the location error of the robot's resident point on the dwell time and the removal amount is calculated by machining simulation. 4. In order to verify the effect of the positioning error of the optical machining robot on the optical processing, the 桅 130mm plane mirror is uniformly polished with the SIAI robot, and the removal error is reduced from 53.38nm to 26.64 nm by using the compensation method. The above research results are applied to the optical processing of official parts: the 桅 500mm off-axis parabola is processed by using SIAI,Staubli and other types of robots. It takes a total of 26 processing cycles from rough grinding to polishing transition, and the surface error converges from 51.2832um to 3.7151um. And in the processing period, the use of error compensation method improved the processing efficiency of 5% 10%.
【学位授予单位】：中国科学院大学(中国科学院光电技术研究所)
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TP242

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