基于MEMS的小型化圆时栅传感器研究

发布时间：2019-03-25 20:22

【摘要】：随着微电子产业的大力发展,传感器逐渐朝着小型化、高精度方向发展,正是基于此,本文着重研究一种新型的小型化电场式圆时栅传感器。电场式圆时栅传感器利用正交变化的电场构建运动参考系,直接用电场耦合的方式感应电信号,与传统的时栅相比,减少了感应信号产生的中间环节,抗干扰能力更强;采用MEMS微纳加工工艺进行极片加工,保证了传感器的加工精度。电场式圆时栅是一种新型的电容式位移传感器,结构简单,功耗低,信号的采集和处理过程简单,利于传感器的小型化和高度集成化。在传感器小型化的同时,也要提高传感器的测量精度,因此,要采用理论分析、模型仿真和实验验证三者相结合的方式,逐步形成一套具有指导意义的电场式圆时栅传感器理论。本文主要围绕电场式圆时栅位移传感器的结构进行优化。主要的工作如下:1.阐述了时空坐标转换理论、机械式时栅原理和磁场式时栅原理,深入研究了电场式圆时栅传感器双列式结构和单列式结构,并对它们各自的工作原理进行了详细阐述。2.以COMSOL Multiphysics多物理场仿真软件为基础,首先对传感器双列式结构进行了仿真,明确了双列式结构内外两圈存在差异的原因,结合理论分析了这种差异会带来二次误差;为了消除这种差异,将传感器的结构优化成单列式结构,并对单列式结构进行仿真分析,确定了小型化传感器的结构尺寸和对极数,采用MEMS微纳加工工艺对优化后的传感器进行加工制造。3.根据实验要求,搭建实验平台,采用理论分析和仿真结果相结合的方式进行了大量的实验验证,首先对传感器由双列结构变单列结构的优化进行了实验验证,然后根据单列结构中实验误差数据结合理论分析,找到误差来源,并进行了结构优化,分析了两路驻波幅值不等、安装倾斜、极片制造误差等问题会带来二次误差;激励信号幅值不等、两路驻波相位非严格正交会产生一次或二次误差;传感器三次和五次谐波会带来四次误差。通过大量的实验验证和误差分析,不断的对传感器的结构进行优化,实验结果表明,直径为57mm的圆时栅传感器最终的实验精度为±10″,分辨力为0.2″。
[Abstract]:With the development of microelectronics industry, the sensor is gradually developing towards miniaturization and high precision. Based on this, this paper focuses on the study of a new type of miniaturized electric field-type circular time-gate sensor. The electric field circular time gate sensor uses the orthogonal electric field to construct the moving reference frame and directly uses the electric field coupling way to induce the electric signal. Compared with the traditional time gate, the electric field circular time gate sensor reduces the intermediate link of the induction signal and has stronger anti-jamming ability. The MEMS micro / nano machining technology is used to process the electrode plate, which ensures the precision of the sensor. Electric field circular time gate is a new type capacitive displacement sensor with simple structure, low power consumption, simple signal acquisition and processing process, which is conducive to the miniaturization and high integration of the sensor. In addition to the miniaturization of the sensor, it is necessary to improve the measurement accuracy of the sensor. Therefore, the combination of theoretical analysis, model simulation and experimental verification should be adopted. Gradually form a set of guiding electric field type circular time gate sensor theory. In this paper, the structure of grid displacement sensor based on electric field circle is optimized. The main work is as follows: 1. The space-time coordinate transformation theory, mechanical time-gate principle and magnetic field-type time-gate principle are described. The double-row structure and single-row structure of electric field-type circular time-gate sensor are deeply studied, and their working principles are described in detail. 2. Based on the COMSOL Multiphysics multi-physical field simulation software, the double-row structure of the sensor is simulated firstly, and the reason of the difference between the inner and outer two cycles of the double-row structure is clarified, and the secondary error is analyzed in combination with the theory. In order to eliminate this difference, the structure of the sensor is optimized into a single-row structure, and the single-row structure is simulated and analyzed, and the structure size and the number of antipods of the miniaturized sensor are determined. Fabrication of optimized sensors by MEMS micro / nano process. 3. According to the experimental requirements, the experimental platform is set up, and a lot of experiments are carried out by combining theoretical analysis and simulation results. Firstly, the optimization of the sensor from double-row structure to single-row structure is verified by experiments. Then, according to the experimental error data and theoretical analysis in the single-row structure, the error source is found, and the structure optimization is carried out. The secondary error will be brought about by the two standing wave amplitude difference, installation tilt, pole manufacturing error and so on. When the amplitude of the excitation signal is different, the two standing wave phases are not strictly orthogonal to produce one or two errors, and the third and fifth harmonics of the sensor will bring about four times errors. Through a lot of experimental verification and error analysis, the structure of the sensor is continuously optimized. The experimental results show that the final experimental accuracy of the circular time gate sensor with diameter of 57mm is 卤10 "and the resolution is 0.2".
【学位授予单位】：重庆理工大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TP212

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