不同基体上类石墨膜干摩擦磨损性能研究

发布时间：2018-06-02 04:46

本文选题：非平衡磁控溅射离子镀 + GLC膜　；参考：《太原理工大学》2017年硕士论文

【摘要】：类石墨膜(GLC)因其高硬度、低摩擦系数、低磨损率和高的承载能力等良好的性能而备受关注,在刀具、减摩耐磨材料等领域得到广泛应用。然而,目前几乎所有的GLC膜都是在高速钢等一类硬度较高的基体上制备,很少有铜合金等软基体上制备GLC膜,并考察其摩擦学性能。国内铜上制备类金刚石膜(DLC)的文献比较多,但铜上制备GLC膜的文献报道较少。而且在软基体上制备的GLC膜,是否仍可采用压坑法或划痕法作为膜基结合强度检测方法也值得探讨。本文利用非平衡磁控溅射离子镀技术,在高速钢、铜合金上采用施加过渡层+梯度层+掺杂相结合的方法,制备GLC膜。通过调节Ti靶沉积工作层时的电流,完成不同金属含量的掺杂。采用扫描电子显微镜、原子力显微镜、能谱仪观察、测量、分析薄膜的表面和截面形貌、成分,采用拉曼光谱仪、X射线光电子能谱仪分析薄膜的价键结构,用面电阻仪测量导电性,用纳米压痕仪测量薄膜的硬度和弹性模量,摩擦磨损试验机、白光干涉仪、光学显微镜等手段研究不同基体上薄膜干摩擦磨损性能。结果表明:1.不同Ti靶电流下,碳膜表面呈现出岛状生长模式,表面粗糙度先增加后减少;薄膜断面未见明显的缝隙等缺陷;随Ti靶电流增加,Ti元素质量百分比增加,沉积速率也增加,使得薄膜截面变为柱状生长。2.随着Ti靶电流增加,Raman和XPS测得sp2键含量先增加后减小,0.8 A含量最高;四探针测试表明薄膜具有良好的导电性能。3.随Ti靶电流增大,sp3键含量先减少后增加,硬度和弹性模量先减少后增加,H/E和H3/E2值都减小,薄膜弹性形变能力和耐磨性降低。4.压痕法测得高速钢上制备的碳膜结合力先增加后降低,0.8 A时达到HF3级;当干摩擦载荷为20 N时,与高速钢原样对比,制备的碳膜能大幅度降低摩擦系数,在0.8 A有最小摩擦系数0.10,0.2 A最小磨损率5.21×10~(-16)m~3/N·m;对磨球在转移膜的保护下,磨损率极低;GLC膜将高速钢原样的粘着、氧化磨损转变为碳膜的磨粒磨损。5.维氏压坑法适合测试软基硬膜结合力,测得铜合金基体上结合强度由于碳向基体铜扩散而降低。6.磨损载荷10 N时,Cu上制备的碳膜降低了与对磨钢球的摩擦系数,0.2 A可达到最小摩擦系数0.14,最小磨损率2.89×10~(-16) m~3/N·m;对磨球在转移膜的保护下,磨损率极低;GLC膜将Cu原样的粘着、氧化磨损转变为碳膜的磨粒磨损。7.Cu基体上,Ti靶电流为0.2 A时,当磨损载荷增加,摩擦系数先减小后增大,在20 N时达到最小值0.12;薄膜磨损率依次增加;磨球磨损率先减少后增加。
[Abstract]:Because of its good properties such as high hardness, low friction coefficient, low wear rate and high bearing capacity, graphite-like film GLC has been widely used in cutting tools, friction reducing and wear resistant materials and so on. However, almost all GLC films are prepared on a class of high hardness substrates such as high speed steel. There are few GLC films on soft substrates such as copper alloys, and their tribological properties are investigated. There are many literatures about the preparation of diamond-like carbon (DLC) films on copper in China, but there are few reports on the preparation of GLC films on copper. Whether the indentation method or scratch method can be used to detect the binding strength of GLC films on soft substrates is also worth discussing. In this paper, GLC films were prepared on high speed steel (HSS) and copper alloy by doping with gradient layer of transition layer by using unbalanced magnetron sputtering ion plating technique. By adjusting the current of Ti target to deposit the working layer, the doping of different metal content is completed. Scanning electron microscope (SEM), atomic force microscope (AFM), energy spectrometer (EDS) were used to observe, measure and analyze the surface and cross section morphology and composition of the films. The valence bond structures of the films were analyzed by Raman spectrometer and X-ray photoelectron spectroscopy. The electrical conductivity was measured by surface resistance instrument, the hardness and elastic modulus of films were measured by nano-indentation instrument, the friction and wear test machine, white light interferometer and optical microscope were used to study the dry friction and wear properties of thin films on different substrates. The results show that: 1. At different Ti target currents, the carbon film surface showed an island growth pattern, the surface roughness first increased and then decreased, there were no obvious gaps in the section of the film, and with the increase of Ti target current, the mass percentage of Ti element increased, and the deposition rate also increased. Make the film section become columnar growth. 2. With the increase of Ti target current, Raman and XPS measurements show that the content of sp2 bond increases first, then decreases the content of 0.8A, and the four-point probe test shows that the film has good conductivity. 3. With the increase of Ti target current, the content of sp3 bond decreases first and then increases, the hardness and modulus of elasticity decrease first, then the values of H / P E and H3/E2 decrease, and the elastic deformation ability and wear resistance of the films decrease by .4. The results of indentation test showed that the adhesion of carbon film prepared on high speed steel first increased and then decreased to 0. 8A, and when dry friction load was 20 N, the friction coefficient of carbon film prepared on high speed steel was significantly reduced compared with that of high speed steel. Under the protection of the transfer film, the wear rate of the grinding ball is very low and the wear rate of the high speed steel is very low. The wear of the high speed steel is changed to the abrasive wear of the carbon film by the oxidizing wear of the high speed steel film, which has a minimum friction coefficient of 0.100.2A and a minimum wear rate of 5.21 脳 10~(-16)m~3/N / m.The wear rate of the grinding ball is very low under the protection of the transfer film. The Vickers indentation method is suitable for testing the adhesion of hard film on soft ground. The bonding strength of copper alloy matrix is decreased by the diffusion of carbon to copper matrix. When the wear load is 10 N, the carbon film prepared on Cu can reduce the friction coefficient (0.2A) to 0.14, and the minimum wear rate is 2.89 脳 10 ~ (-16) mm ~ (-1) N ~ (m). Under the protection of the transfer film, the wear rate of the ball is very low and the GLC film adheres to the original Cu. When the current of Ti target on Cu substrate is 0.2 A, when the wear load increases, the friction coefficient decreases first, then increases, and reaches the minimum value of 0.12 at 20 N, and the wear rate of the film increases in turn. Grinding ball wear first reduced and then increased.
【学位授予单位】：太原理工大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TG174.4

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