高性能MEMS惯性器件工程化关键技术研究

发布时间：2018-01-02 05:30

本文关键词：高性能MEMS惯性器件工程化关键技术研究　出处：《中国航天科技集团公司第一研究院》2017年博士论文　论文类型：学位论文

【摘要】：MEMS惯性技术的发展把基于旋转和非旋转的惯性器件从宏观概念向微观世界推进了一大步。近年来,特别是微纳加工技术与振动惯性技术的有机结合使惯性仪表技术发生了重大的变革,因而大大拓展了惯性技术在军用和民用领域中的应用[1]。高性能MEMS惯性器件将对国民经济和军事装备起到越来越大的作用。论文针对工程应用需求,对两种典型的MEMS惯性器件——MEMS陀螺仪和MEMS加速度计的设计、工艺、电路、测试及应用方法等工程化关键技术进行了研究。论文的主要研究内容和研究成果如下:开展了双质量线振动MEMS陀螺仪和“三明治”式MEMS加速度计的结构机理与方案研究。解决了MEMS陀螺仪大角速率输入下的频率漂移及由此引起的线性度问题,提出了一种机械及热应力隔离结构,改善了MEMS敏感结构的力学特性和温度特性。开展了高精度体硅MEMS干法和湿法工艺加工技术研究,提出MEMS敏感结构工艺参数晶圆级在线控制方法,建立了微精密结构与工艺参数的影响关系模型,实现MEMS陀螺敏感结构谐振频率关键参数的在线控制,提高了加工精度和成品率。解决了三层MEMS结构键合、腔体结构划切、高Q值真空封装、低应力粘接等工艺关键技术,开展了键合质量在线检测技术研究。开展了MEMS惯性仪表系统级仿真研究,加快了MEMS惯性仪表设计验证进程。开展了陀螺仪检测轴闭环、模态匹配等闭环工作,提高仪表精度。开展了MEMS加速度计静电力负刚度研究,实现了非最小相位系统闭环控制。开展了MEMS惯性仪表的温度误差建模与补偿工作研究。开展了MEMS惯性仪表的力学环境适应性和空间环境适应性研究,通过复合力学环境试验确定各类力学环境对MEMS惯性仪表的影响,开展了仪表减振设计;开展了MEMS惯性仪表敏感结构测试及整表测试技术研究,为提高测试效率开展了自动化测试研究。成功研制了多种MEMS惯性仪表的工程样机和应用产品,开展了MEMS惯性器件应用研究工作。大量程MEMS陀螺仪在高速旋转导弹型号取得批量应用。解决了偏航MEMS角速度传感器交叉耦合、力学环境适应性、波形畸变等问题,偏航角速度传感器成功应用于旋转导弹阻尼回路。突破宇航应用可靠性和空间环境适应性技术,MEMS加速度计在“玉兔号”月球车上取得应用,实现了国产MEMS惯性仪表唯一深空探测应用。实现MEMS陀螺仪和MEMS加速度计产品在XY-2卫星平台测振应用。
[Abstract]:The development of MEMS inertial technology has advanced the inertial devices based on rotation and non-rotation from the macro concept to the micro world. Especially, the organic combination of micro and nano machining technology and vibration inertial technology has greatly changed the inertial instrument technology, thus greatly expanding the application of inertial technology in military and civil fields. [1. High performance MEMS inertial devices will play a more and more important role in national economy and military equipment. The design, process and circuit of two typical MEMS inertial devices, MEMS gyroscopes and MEMS accelerometers are presented. The main contents and results of this paper are as follows: the dual mass line vibration MEMS gyroscope and "sandwich" are carried out. The structure mechanism and scheme of MEMS accelerometer are studied. The frequency drift and the linearity caused by the input of MEMS gyroscope at large angular rate are solved. A mechanical and thermal stress isolation structure is proposed to improve the mechanical and temperature characteristics of MEMS sensitive structures. The dry and wet processing techniques for bulk silicon MEMS with high accuracy are studied. An on-line control method for wafer level of MEMS sensitive structure process parameters is presented, and a model of the relationship between microprecision structure and process parameters is established. The key parameters of resonant frequency of MEMS gyroscope are controlled on line, and the machining precision and yield are improved. The bonding of three-layer MEMS structure, the cutting of cavity structure and the vacuum packaging of high Q value are solved. The key technology of low stress bonding, such as bonding quality on-line detection, and MEMS inertial instrument system-level simulation are studied. The design and verification process of MEMS inertial instrument is accelerated. The closed-loop work of gyroscope testing shaft and mode matching is carried out to improve the precision of the instrument. The research on the negative static power stiffness of MEMS accelerometer is carried out. The closed-loop control of non-minimum phase system is realized. The temperature error modeling and compensation of MEMS inertial instrument are studied. The adaptability of mechanical environment and space environment of MEMS inertial instrument is studied. . The influence of all kinds of mechanical environment on MEMS inertial instrument is determined by the test of compound mechanical environment, and the design of instrument vibration reduction is carried out. The research on sensitive structure test and integral meter testing technology of MEMS inertial instrument is carried out. In order to improve the test efficiency, the automatic test research has been carried out, and various engineering prototypes and application products of MEMS inertial instruments have been successfully developed. The research work of MEMS inertial device application is carried out. A large number of MEMS gyroscopes are applied in batch in high-speed rotating missile model. The cross-coupling of yaw MEMS angular velocity sensor is solved. The yaw angular velocity sensor has been successfully applied to the damping loop of rotating missile, and the reliability of aerospace application and the adaptability of space environment have been broken through. MEMS accelerometer has been applied to the lunar rover Yutu. The unique deep space detection application of domestic MEMS inertial instrument is realized, and the application of MEMS gyroscope and MEMS accelerometer in the XY-2 satellite platform is realized.
【学位授予单位】：中国航天科技集团公司第一研究院
【学位级别】：博士
【学位授予年份】：2017
【分类号】：TH824.4;TN96

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