基于GMA的二自由度精密微定位平台及控制系统研究

发布时间：2018-01-09 14:18

本文关键词：基于GMA的二自由度精密微定位平台及控制系统研究　出处：《安徽理工大学》2017年博士论文　论文类型：学位论文

【摘要】：精密定位技术是国家制造水平的重要标志,是国家先进制造技术的主要支柱,同时还是精密驱动、精密测量、精密加工中的关键技术之一。精密定位系统是精密定位技术得以实现的载体,研究提高精密定位系统性能的方式,为研发高性能精密加工装备,实现高档数控机床与基础制造装备的发展目标,实施《中国制造2025》战略均具有重大意义。针对压电陶瓷驱动的精密定位平台存有行程短、负载小、驱动电压高等问题,论文基于超磁致伸缩材料(Giant Magnetostrictive Material,简写为GMM)设计出一种精密定位平台的驱动系统,并结合设计的柔性铰链传动机构和开发的控制系统,研制出一种高性能的精密定位系统。采用理论建模、电磁场仿真、静、动力学有限元计算、数值分析和实验研究相结合的方法对所研制的精密定位系统进行深入研究。基于Stoner-Wohlfarth模型的自由能能量极小原理,建立了 GMM单磁畴自由能的极值数学模型,得出了外加应力和外加磁场作用下磁畴偏转角度的变化规律,揭示了 GMM的磁致伸缩机理。提出了基于GMM的大推力驱动器的新结构和基于柔性铰链的精密传动新机构,确定了具体的设计尺寸。建立了精密定位平台的输出模型,引入了一种粒子群和人工鱼群混合的模型参数辨识算法。构建了控制系统的软硬件平台,采用动态递归神经网络(Dynamic Recurrent Neural Network,简写为DRNN)前馈-模糊PID反馈控制策略。研究结果表明,采用双线圈磁场结构、碟簧螺钉组合的预压应力机构和水管密绕水冷降温系统进行驱动器结构设计,得出了偏置磁场、预压压力以及工作温度的最佳参数,并得到驱动器最大位移为80μm,最大输出力为292.3N;采用Jiles-Atherton模型描述系统的磁滞特性,引入粒子群和人工鱼群混合优化算法进行磁滞模型的参数辨识,采用DRNN获得系统的磁滞逆模型进行前馈控制,采用模糊PID对系统输出位移进行反馈控制,使系统的定位精度达到0.75μm,定位分辨力为10nm,X、Y方向的定位行程分别为30.8μm、40.5μm,最大重复性误差为0.6μm。论文各章内容如下:第一章介绍了课题来源、研究背景和研究意义,分析了精密定位系统的研究现状,得出可从提升驱动器性能、设计精密传动机构和提高控制系统可靠性三个方面提高精密定位系统的整体性能,并总结了这三个方面的国内外研究现状,确定了本论文的研究内容。第二章基于Stoner-Wohlfarth模型的自由能极小原理,建立了 GMM磁畴的自由能极值模型,研究了外加应力和外加磁场载荷作用下磁畴偏转角度的变化规律,揭示了 GMM的磁致伸缩机理,并以此为基础,从GMM棒材选型、磁场结构、预压应力机构以及温控系统设计等四个方面进行优化设计,提出一种基于GMM的大推力驱动器新结构,确保了精密定位平台的驱动器性能。第三章分别建立了超磁致伸缩驱动器(Giant Magnetostrictive Actuator,简写为GMA)的电磁场模型、磁滞模型和磁致伸缩模型,优化分析了电磁场的性能;数值仿真分析了磁滞模型,得到了偏置磁场和预压应力对磁致伸缩应变的影响规律;建立了GMA的机械应力场弱解控制方程和磁致伸缩本构方程,并采用有限元法仿真分析,得出了最佳的驱动参数,为后续改善驱动器的磁滞非线性和提高控制精度提供理论依据。第四章提出了一种二自由度柔性铰链平台的新结构,并基于柔性铰链设计理论,建立了输出位移与输入力之间的静、动力学模型;采用数值仿真分析方法,优化了柔性铰链的几何尺寸,得出了最优的设计参数;基于建立的动力学方程,分析了柔性铰链平台的振动特性,得到了平台的固有频率;最后采用ANSYS Workbench和MTALAB软件平台对平台进行静力学和动力学仿真分析,验证了建立的静、动力学模型,得出了柔性铰链平台的传动特性。第五章提出了一种粒子群和人工鱼群混合优化的参数辨识算法,同时引入了DRNN前馈-模糊PID反馈控制策略,并基于MATLAB/SIMULINK模块进行仿真验证,仿真结果表明:提出的参数辨识算法具有较高辨识精度,引入的控制策略是有效的。第六章搭建了 GMA实验平台,实验测试了 GMA的双线圈磁场强度、输出力以及不同偏置磁场和不同预压应力下的输出位移,验证了磁场强度模型,得出了最佳驱动参数;搭建了柔性铰链平台实验装置,实验验证了所建立的静、动力学模型;搭建了精密定位平台控制系统的硬件结构,开发了控制系统的软件平台,实验验证了所提出控制策略的有效性;最后,测试了精密定位平台的定位行程、重复性、定位精度、分辨力和响应时间。第七章总结了全文的研究内容和创新之处,展望了今后的研究工作。
[Abstract]:Precision positioning technology is an important symbol of the manufacturing level of a country, is the main pillar of the country's advanced manufacturing technology, and precision drive, precision measurement, one of the key technologies in precision machining. The precision positioning system is precision positioning technology to realize the carrier of high precision positioning system performance, for the development of high performance precision machining the equipment, realize the goal of development of high-end CNC machine tools and basic manufacturing equipment, implementation is of great significance Chinese manufacturing 2025> strategy. For the piezoelectric ceramic driving precision positioning platform being short stroke, small load, high voltage driver, based on giant magnetostrictive material (Giant Magnetostrictive Material, abbreviated as GMM) is designed to drive a system for precision positioning platform, combined with the control system of flexible hinge transmission mechanism and design, developed a kind of high performance The precision positioning system. By theoretical modeling, electromagnetic simulation, static and dynamic finite element method, numerical analysis and experimental study of a combination of in-depth study of the precision positioning system developed by Stoner-Wohlfarth model. Based on the principle of minimum free energy, established the extreme mathematical model of GMM single domain free energy, that should be applied with force and variation of magnetic field of magnetic domain deflection angle, the magnetostrictive mechanism of GMM was revealed. Based on the new structure of large thrust drive GMM and based on the new precision transmission mechanism with flexible hinges, to determine the specific size of the design. The output model of precision positioning platform, the introduction of a particle swarm and the artificial fish swarm hybrid model parameter identification algorithm. Construction of software and hardware platform of control system, the dynamic recurrent neural network (Dynamic Recurrent Neural Net Work, abbreviated as DRNN) feedforward and fuzzy PID feedback control strategy. The results show that the dual coil magnetic field structure, disc spring screws combined with compressive pre stress mechanism and pipe winding water cooling system for drive structure design, the bias magnetic field and pre pressure and optimum parameters of working temperature, and get the maximum displacement is 80 m, the maximum output power is 292.3N; the Jiles-Atherton model was adopted to describe the hysteresis characteristic of the system, the introduction of particle swarm optimization and hybrid artificial fish swarm optimization algorithm of hysteresis model parameter identification, the system hysteresis inverse model feed-forward control using DRNN, using fuzzy PID on system output displacement feedback control, the accuracy of positioning the system can reach to 0.75 m, the positioning resolution of 10nm, X, Y direction positioning travel were 30.8 m, 40.5 m, the maximum repeatability error is 0.6 M. the content of each chapter is as follows: The first chapter introduces the origin, research background and research significance, analyzes the research status of the precision positioning system, it can enhance the design precision from the driver performance, transmission mechanism and improve the control of the three aspects of system reliability, improve the overall performance of the precision positioning system, and summarizes the research status of these three aspects at home and abroad, the the research content of this thesis. The second chapter of the Stoner-Wohlfarth model based on the principle of minimum free energy, established the GMM domain of the free energy minimization model, studied the applied stress and electric field variation rule of load deflection angle domain, the magnetostrictive mechanism of GMM was revealed, and on this basis, from the GMM bar selection. The magnetic field structure, prestressing force and temperature control mechanism four aspects of system design and optimization design, puts forward a new thrust drive structure based on GMM, to ensure the precision The drive performance of positioning platform. The third chapter established a giant magnetostrictive actuator (Giant Magnetostrictive Actuator, abbreviated as GMA) of the electromagnetic model, hysteresis model and magnetostriction model, optimization analysis of the electromagnetic properties; numerical simulation analysis of the hysteresis model, the bias magnetic field and pre compression stress on magnetostrictive strain GMA; mechanical stress field of weak solutions of control equations and magnetostrictive constitutive equation was established, and the finite element method simulation analysis, the optimal parameters of the drive, for the subsequent improvement drive hysteresis nonlinearity and improve control accuracy and provide a theoretical basis. The fourth chapter puts forward a new structure of two degree of freedom flexible the hinge platform, and based on flexible hinge design theory, is established between the output displacement and input force of the static, dynamic model; analysis method by numerical simulation, optimization of the soft The geometric size of the hinge, the optimal design parameters; dynamic equation is established based on the analysis of the vibration characteristics of the flexible hinge platform, gets the natural frequency of the platform; finally, using ANSYS Workbench and MTALAB software platform on the platform for the analysis of statics and dynamics simulation, to verify the establishment of static, dynamic model, the characteristics of flexible transmission the hinge platform is obtained. The fifth chapter presents a hybrid artificial fish swarm optimization particle swarm optimization and parameter identification algorithm, and introduces the DRNN PID fuzzy feedforward feedback control strategy, and the MATLAB /SIMULINK module based on the simulation, the simulation results show that the parameter identification algorithm proposed has high identification accuracy, control strategy is introduced effective. In the sixth chapter, the GMA experimental platform is established, tested the strength of the magnetic field coils of GMA, the output power and different bias magnetic field and not With the pre pressure output displacement under stress, verify the magnetic field strength model, the optimal driving parameters; build a flexible hinge platform experimental device, experimental results prove that the static and dynamic model; the hardware structure to build a precise positioning control system, and design the control system software platform, was proved by the experiment effectiveness of the proposed control strategy; finally, to test the positioning precision positioning platform stroke, repeatability, accuracy, resolution and response time. The seventh chapter summarizes the research content and innovation, the prospect of future research work.

【学位授予单位】：安徽理工大学
【学位级别】：博士
【学位授予年份】：2017
【分类号】：TH703;TP273

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