基于流体分配的微加工方法及其应用研究

发布时间：2018-03-03 20:07

  本文选题：微加工　切入点：流体分配　出处：《哈尔滨工业大学》2017年博士论文　论文类型：学位论文

【摘要】：微米级结构越来越多的应用于微机电系统、微流控装置以及微光学器件等领域。但是,现有的微加工技术难以同时兼顾在设备成本、执行过程复杂程度、设计制造灵活性和加工分辨率等,例如光刻技术虽然能够制造出极小尺寸的结构,但是需要经历繁琐步骤且缺乏设计灵活性。因此严重的制约了微米级结构的进一步广泛应用。针对目前微加工方法的不足,本文将在构建机器人化流体分配微加工系统和理论分析加工过程的基础上,利用不同性质的功能性流体和制造策略,进行不同机器人化流体分配微加工方法及其应用的研究。首先通过使用自制微米级微管和显微视觉反馈系统,构建具有单次分配百飞升(10-15 L)数量级流体能力的机器人化流体分配微加工系统。提出机器人化流体分配微加工的基本策略。然后对微加工过程进行理论分析,根据流体流变性质的不同,分别建立牛顿型流体在微管中流动模型和非牛顿型流体在微管中流动模型。建立基于考虑接触角滞后Young-Laplace方程的微管尖端到基底流体传输模型,并通过仿真研究得到各工作参数与微管尖端和基底表面之间液桥毛细力的关系。利用牛顿型流体,实现基于牛顿型流体的流体分配微加工方法。提出基于机器人化分配氢氟化钾水溶液的二氧化硅直写式刻蚀方法。该方法具有间隔和连续两种工作模式,可分别制造出点和线型刻蚀特征。理论分析二氧化硅直写式刻蚀的终极分辨率和边界粗糙度,实验研究微管运动速度和应用压强对点和线型刻蚀特征形状和大小的影响。验证直写式刻蚀的二氧化硅薄膜作为硬掩膜选择性各向异刻蚀单晶硅的有效性。提出基于机器人分配紫外固化透明聚合物的球面型和圆柱面型微透镜制造方法。分析影响微透镜制造方法成败的工作参数,实验研究停留时间和应用压强对球面型微透镜直径的影响规律,实验研究微管运动速度和应用压强对圆柱面型微透镜宽度的影响规律。并分别展示所能实现的最小球面型微透镜直径和最小圆柱面型微透镜宽度。对所制造的微透镜及其阵列的表面形貌,大小稳定性和聚光能力进行表征,验证基于机器人化分配紫外固化透明聚合物的球面型和圆柱面型平凸微透镜阵列制造方法的有效性和可靠性。实现机器人化分配紫外固化透明聚合物的球面型和圆柱面型平凸微透镜阵列制造方法。通过控制液桥液滴添加的位置,该方法可分别在“点融合”模式下获得“点”型三维微结构,在“点连点”模式下获得“线”型三维微结构。通过改变基底表面的疏水性、调节液桥液滴体积的大小和设计预先固定特征的形状和相对大小等,方便地获得各种各样形貌的三维微结构,例如直线、三角形、四边形、五边形和六边形限制特征。最后展示该方法在微流控领域中制造圆形横截面微流控沟道铸造模具,在微光学领域中制造类半椭圆型和圆柱面型平凸微透镜及其阵列。利用粘弹性流体,实现基于粘弹性流体的流体分配微加工方法。提出基于机器人化分配粘弹性流体的快速成型圆型横截面微流控沟道的方法。研究各工作参数(微管运动速度、应用压强、微管与基底之间距离和沉积层数)对微流控沟道横截面形状和大小的影响,研究基底表面疏水性对铸造模具边缘处弧度缺陷的影响,得到该快速成型方法的极限分辨率,并利用“液体绳绕”效应直接构造出曲线型的微流控沟道模具。通过制造各种复杂的微流控结构展示该方法的可行性。提出基于机器人化分配粘弹性流体的薄膜微图案直写式加工方法。研究各工作参数(微管运动速度、应用压强、微管与基底之间距离)对被沉积特征宽度的影响,研究硅酮流体由微管尖端到基底表面的传输模式,并应用于分别制造玻璃基底上的铜微电极、二氧化硅硬掩膜和金属铬透明玻璃光掩膜。
[Abstract]:Micron structure more and more applications in microelectromechanical systems, microfluidic device and micro optics and other fields. However, the existing micro processing technology is difficult to balance the cost of equipment, process complexity, design flexibility and manufacturing processing resolution, such as lithography technology although can produce a very small size of the structure, but the need to through the tedious steps and the lack of design flexibility. It restricts the further application of micron structure. Aiming at the shortcomings of micro machining method, this paper will be based on designing robotic fluid distribution micro machining system and the theoretical analysis of the machining process, the use of different functional fluids and manufacturing strategies of different robots the distribution of fluid micro processing method and its application. Firstly, by using self-made micron microtubules and micro vision feedback system, build out There is a single distribution soaring 100 (10-15 L) robotic fluid distribution order fluid capacity of the micro machining system. Put forward the basic strategy of robot of fluid distribution. Then the micro machining and micro machining process were analyzed, according to the rheological properties of fluid, established Newton fluid in the microchannel flow model and non Newton type the fluid flow model in the microchannel is established considering the contact angle hysteresis. The Young-Laplace equation of microtubule tip to the basal fluid transmission based on the model, and the relationship between the working parameters and microtubule tip and substrate surface of liquid bridge capillary force through simulation. Using Newton fluid, the fluid distribution Newton fluid based on micro machining method is put forward. The robot silica distribution of hydrogen fluoride potassium aqueous etching method based on direct write. This method has two consecutive intervals and work modes can be divided into Don't make a point and linear etching characteristics. Theoretical analysis of direct write silica etching and the ultimate resolution of the boundary roughness, experimental study on the effect of microtubule movement speed and pressure on the application point and the linear characteristics of the shape and size of the etched silicon dioxide film. Verify the direct write as effective etching hard mask anisotropic silicon etching selectivity the distribution of UV curing robot. Transparent polymer spherical and cylindrical micro lens manufacturing method. Based on the working parameters of the micro lens manufacturing method or analysis of influence, experimental study on residence time and pressure on the application of spherical micro lens effect of the diameter of the influence of the research of microtubule movement velocity and pressure on the cylindrical micro lens application the width of the display. And can realize the minimum spherical micro lens diameter and minimum cylindrical lensed width of. Manufacture of micro lens and lens array, the surface morphology, size stability and focusing ability were characterized to validate the robot distribution of UV curable transparent polymer spherical and cylindrical surface convex microlens array fabrication method and reliability. Based on the robot distribution of UV curable transparent polymer spherical and cylindrical convex surface manufacturing method of micro lens array. By controlling the position of liquid bridge drop added, the method can respectively in the "fusion" mode to get the "point" type three-dimensional micro structure, in the "connect the dots" mode to get the "line" type three-dimensional micro structure. By changing the hydrophobic surface of the substrate, and adjust the size of the design of liquid bridge and the droplet size of the pre fixed characteristics of the shape and relative size, easy access to a variety of three-dimensional topography of micro structures, such as linear, triangular, quadrilateral, five sides and six Edge shape features. Finally the limit display method in the field of microfluidic fabrication of circular cross-section microfluidic channel casting mold manufacturing, semi elliptical and cylindrical convex surface micro lens and lens array in the field of micro optics. Using the viscoelastic fluid flow, realize the body distribution of viscoelastic fluid based on micro machining method is proposed. Rapid prototyping of circular cross-section robot distribution of viscoelastic fluid in microfluidic channel. Based on the study of the operating parameters (microtubule movement speed, applied pressure, and substrate distance between microtubules and sedimentary layers) of the microfluidic channel cross-section shape and size, the effect of surface hydrophobic substrate for casting mold at the edge of the radian of defects, ultimate resolution of the rapid prototyping method, and directly constructed curve type microfluidic channel mold using liquid rope through a variety of complex manufacturing "effect. 鐨勫井娴佹帶缁撴瀯灞曠ず璇ユ柟娉曠殑鍙�琛屾�，

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