基于实时测量与运动调整的空间虚拟直线运动基准技术

发布时间：2018-04-22 23:34

本文选题：空间直线运动基准 + 六自由度实时测量　；参考：《哈尔滨工业大学》2017年博士论文

【摘要】：空间直线运动基准是保证尖端光刻机运动精度的最基本且最关键的运动单元。掩模台作为步进扫描光刻机的关键子系统,需要实现以标记参考点为运动中心、保持特定姿态且沿设计轴线的高精度匀速空间直线运动。该运动是实现后续更高精度对准和套刻的前提和关键。但现有的六自由度测量手段精度不高且测量参考与设计轴线相分离的问题,以及振动干扰和多自由度间耦合制约运动精度的问题,成为掩模台实现高精度空间直线运动的主要技术瓶颈。本论文旨在针对上述问题,通过分析掩模台空间直线运动的单自由度大范围和六自由度高精度的特殊测量和运动需求,提出一种基于实时测量和运动调整的空间直线运动基准实现方法。通过构建六自由度测量空间,直接获得与设计轴线统一的、数学意义上的、虚拟的空间直线,并以此作为参考点位置测量和运动参考;通过建立六自由度测量系统的全局模型,消除多自由度间位置解算误差和结构类测量误差的影响,从而实时高精度地获取参考点的空间位置及其与设计轴线的相对位置;结合准零刚度和准零阻尼悬浮的六自由度运动方法,有效隔离振动干扰并消除六自由度运动间耦合作用,从而实现闭环控制下掩模台参考点实时跟踪设计轴线的高精度空间直线运动。针对现有的空间直线运动中六自由度测量精度不高且测量参考与设计轴线相分离的问题,本论文提出了一种基于非封闭测量环全局模型的六自由度测量方法。该方法采用多位移传感器构建六自由度测量空间,基于坐标测量的概念,同时获取参考点的空间位置和设计轴线对应的空间直线。根据坐标变换原理,实时描述测量环中不断变换的非封闭部分,并引入实际测量系统中结构类误差,建立了测量环非封闭全局模型。该模型同时消除了测量环非封闭部分导致的多自由度间位置解算耦合误差,以及封闭部分中位置解算误差和诸多系统误差的影响,从而实现了在同一测量空间内实时获取掩模台参考点的空间位置及其与设计轴线的相对位置,同时兼顾了参考点空间位置测量的高精度和与设计轴线的统一。针对宏/微驱动系统中振动干扰和多自由度间运动耦合制约微动系统六自由度运动精度的问题,本论文提出了一种基于准零刚度准零阻尼悬浮的六自由度微动方法。该方法采用回转对称式磁悬浮重力补偿器平衡微动系统重力,建立了该重力补偿器基于永磁体等效电流理论的静态磁悬浮力和悬浮刚度理论模型,通过仿真和实验验证了该模型的有效性,从而初步实现微动系统在运动空间内低刚度悬浮。并通过建立六自由度位置相关运动学解耦和力相关动力学解耦模型,实现了微动系统相对于参考点的六自由度运动解耦。在此基础上,通过分析实际系统中寄生刚度和阻尼的产生机理,分别以位置和速度相关干扰力的形式在时域和频域内辨识,并通过力前馈方法补偿,最终实现了微动系统准零刚度准零阻尼悬浮。该方法有效隔离了宏动系统振动干扰并消除了运动解耦模型误差的影响,提高了微动系统在闭环控制下的六自由度运动精度。本论文研究了宏动跟随微动的宏/微驱动技术,并提出了多柔性铰链组合的单自由度宏动系统的结构设计方法。在此基础上,结合上述六自由度实时测量方法和运动调整技术研发了掩模台空间直线运动系统,并设计了相应的实验,测试了该系统的时域和频域伺服特性、各自由度位移分辨力、不同自由度间运动解耦性能、六自由度测量和运动解耦模型精度、宏/微驱动系统大范围内整体运动性能等关键性能参数,实验结果验证了上述方法的有效性。基于该空间直线运动基准,对平晶直线度误差分布实施测量,并通过与菲索尔干涉仪测量结果进行比较,间接测试了该空间直线运动基准的精度和重复性,最后分析了其不确定度。结果表明,该空间直线运动基准在220mm范围内空间直线度的合成标准不确定度为21nm,空间直线运动的速度均匀性小于2.4%。
[Abstract]:The spatial linear motion datum is the most basic and most critical motion unit to ensure the motion precision of the cutting edge photolithography. As the key subsystem of the step scanning photolithography, the mask table needs to be used to mark the reference point as the center of motion, to maintain a particular attitude and to move straight along the high precision and uniform space along the design axis. It is the precondition and key of higher precision alignment and engraving. However, the existing six degrees of freedom measurement method is not accurate, the problem of measuring the separation of reference and design axis, and the problem of vibration interference and the coupling of multiple degrees of freedom to restrict motion accuracy are the main technical bottlenecks for the high precision space linear motion of the mask. This paper is aimed at this paper. In view of the above problems, by analyzing the special measurement and movement requirements of high precision and high precision of the single degree of freedom and six degrees of freedom of the space straight motion of the mask table, a method of spatial linear motion datum based on real time measurement and motion adjustment is proposed. By constructing the six degree of freedom measurement space, the number of the design axis is directly obtained. In the sense, the virtual space line is used as the reference point position measurement and motion reference. By establishing the global model of the six degree of freedom measurement system, the influence of the position calculation error and the structural class measurement error between the multiple degrees of freedom is eliminated, thus the space position of the reference point and its relative to the designed axis are obtained in real time and high precision. In combination with the six degree of freedom motion method of quasi zero stiffness and quasi zero damping suspension, the vibration interference is effectively isolated and the coupling action between the six degrees of freedom motion is eliminated. Thus the high precision space linear motion of the axis is designed by the reference point of the mask table in real time under closed loop control. The measurement precision of six degrees of freedom in the existing space linear motion is achieved. In this paper, a six degree of freedom measurement method based on the global model of a non closed measuring ring is proposed. This method uses a multi displacement sensor to construct a six degree of freedom measurement space, based on the concept of coordinate measurement, and at the same time obtains the space position of the reference point and the corresponding axis of the design. According to the principle of coordinate transformation, the non closed part of the measuring ring is described in real time, and the structure class error in the actual measurement system is introduced. The non closed global model of the measurement ring is established. The model also eliminates the coupling error between the multiple degrees of freedom and the closed part in the closed part of the measuring ring, and the closed part. In the same measurement space, the spatial position of the reference point of the mask table and its relative position with the designed axis are realized in the same measurement space. At the same time, the high precision of the reference point space position measurement and the unity with the designed axis are taken into account. The motion coupling between degrees of freedom restricts the motion precision of the six degree of freedom of the micro motion system. In this paper, a six degree of freedom fretting method based on quasi zero stiffness quasi zero damping suspension is proposed. This method uses a rotary symmetric magnetic levitation gravity compensator to balance the gravity of the fretting system, and establishes the equivalent current of the gravity compensator based on the permanent magnet. The theoretical model of static magnetic suspension force and suspension stiffness is proved by simulation and experiment. The validity of the model is verified by the simulation and experiment. Thus the microdynamic system is suspended in low stiffness in the motion space. The relative kinematic decoupling of six degrees of freedom position and the coupling model of force correlation dynamics are established to realize the relative point of the microdynamic system relative to the reference point. The six degree of freedom motion decoupling. On this basis, by analyzing the generation mechanism of the parasitic stiffness and damping in the actual system, the method is identified in the time domain and frequency domain in the form of the position and velocity related interference respectively, and the quasi zero stiffness quasi zero damping suspension is realized by the force feedforward method. The method is effectively isolated. The vibration interference of the macro dynamic system and the effect of the motion decoupling model error are eliminated, and the motion accuracy of the six degree of freedom motion of the microdynamic system under closed loop control is improved. The macro / micro drive technology of the macro dynamic following micro motion is studied in this paper, and the structure design method of the single degree of freedom macro dynamic system with multiple flexure hinges is proposed. According to the above six degrees of freedom real-time measurement method and motion adjustment technology, the space linear motion system of the mask table is developed, and the corresponding experiments are designed. The time domain and frequency domain servo characteristics of the system are tested, the displacement resolution of each degree of freedom, the motion decoupling performance of different degrees of freedom, the precision of the six degree of freedom measurement and motion decoupling model, macro / micro The experimental results verify the effectiveness of the proposed method. Based on the spatial linear motion datum, the error distribution of the flat crystal straightness is measured, and the accuracy and weight of the spatial linear motion datum is tested by comparison with the results of the field interferometer. In the end, the uncertainty is analyzed. The results show that the standard uncertainty of the spatial straightness of the spatial linear motion datum in the range of 220mm is 21nm, and the velocity uniformity of the space linear motion is less than 2.4%.

【学位授予单位】：哈尔滨工业大学
【学位级别】：博士
【学位授予年份】：2017
【分类号】：TG806

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