超环面全息光栅的优化设计与制作技术研究

发布时间：2018-09-05 17:47

【摘要】：超环面全息光栅作为分光器件同时兼具色散、聚焦成像、校正像差、无鬼线、低杂散光等特性,自发明以来一直在极紫外和软X射线波段高分辨率光谱仪等领域中发挥重要作用。超环面全息光栅的面型特征和刻槽分布规律使其具备了优秀的消像差能力,但同样使其研制难度大增,正是在这种情况下,本论文对超环面全息光栅的优化方法和制作技术展开了一系列深入的研究。第一,本文根据费马原理推导了超环面全息光栅的光程函数几何像差理论和光线追迹点列图理论;改进了传统的光程函数理论优化函数,引入权重思想建立了新的超环面全息光栅光程函数优化函数;根据超环面全息光栅光线追迹点列图建立了点列图均方根优化函数;结合超环面全息光栅几何像差理论和光线追迹点列图理论设计了一种新的优化设计方法,即平衡像差优化设计方法,使用遗传算法与局部优化算法相结合的方式对光栅进行优化设计,提高了优化效率、进一步提升了光栅的光谱性能;对平衡像差优化方法进行了验证并为三种不同用途的超环面光栅进行了优化设计。结果证明平衡像差优化设计方法更适合对球面波曝光系统制作超环面全息光栅的参数进行优化,为高分辨率超环面全息光栅的设计提供了理论基础。第二,为了对超环面全息光栅制作工艺中至关重要的匀胶工艺进行理论指导,从流体力学和热力学角度分析了超环面全息光栅旋转涂覆法匀胶的工艺过程;建立了超环面全息光栅匀胶过程中光栅表面近似曲率半径函数;建立了超环面全息光栅在非润滑状态下的匀胶模型;通过结合实验归纳和多项式拟合给出了建立完整匀胶模型所需的实验室系数;对建立的匀胶模型进行了实验验证,并且对不同工艺参数下的匀胶模型分别进行了对比和分析;讨论推导了适用于润滑与非润滑状态下的凹球面与平面光栅匀胶模型。实验证明本文建立的一系列模型与实验数据相吻合,能够在一定程度上指导光栅制作中的匀胶工艺。第三,为了分析超环面全息光栅制作和使用过程中多种参数误差对光谱性能的影响,本文首先建立了超环面全息光栅光谱性能评价函数,该函数可以对超环面全息光栅光线追迹点列图的像高、像宽和光谱综合性能进行评价;深入分析光栅制作和使用过程中不同阶段使用参数误差、记录参数误差、基底面型误差、匀胶参数误差对光栅光谱性能的影响;模拟了各个参数之间的误差补偿作用,分析了通过其他参数补偿某一阶段单一误差的方法;确定了光栅研制和使用过程中对光谱性能影响较大的参数和补偿方法;理论指导了光栅研制和使用过程中对各种参数误差的处理办法。第四,对超环面全息光栅制作工艺进行了介绍;分析了旋转涂覆法匀胶工艺中容易出现的瑕疵缺陷,并对各个瑕疵出现的原因和解决办法进行了研究。结合超环面全息光栅的制作工艺、球面波曝光光路的设计和非对称曝光显影实时监测技术介绍了宽波段单色仪中使用的超环面全息光栅具体制作方法。为超环面全息光栅的制作提供了理论指导和实验依据。
[Abstract]:The toroidal holographic grating has been playing an important role in the fields of ultra-ultraviolet and soft X-ray band high resolution spectrometer since it was invented. The toroidal holographic grating has many advantages, such as dispersion, focusing imaging, aberration correction, ghost-free, low stray light and so on. In this paper, a series of in-depth studies on the optimization method and fabrication technology of toroidal holographic gratings have been carried out. Firstly, the geometric aberration theory of the optical path function and the ray-tracing point diagram theory of toroidal holographic gratings have been deduced based on Fermat's principle. The traditional optical path function theory optimization function is improved, and a new optical path function optimization function of toroidal holographic grating is established by introducing the weight idea; the root-mean-square optimization function of the point sequence diagram is established according to the ray-tracing point sequence diagram of toroidal holographic grating; the geometric aberration theory of toroidal holographic grating and the theoretical design of ray-tracing point sequence diagram are combined A new optimum design method, balanced aberration optimum design method, is proposed, which combines genetic algorithm with local optimum design method to optimize the grating. The optimization efficiency is improved and the spectral performance of the grating is further improved. The results show that the balanced aberration optimization method is more suitable to optimize the parameters of the toroidal holographic grating fabricated by the spherical wave exposure system, which provides a theoretical basis for the design of high resolution toroidal holographic grating. Secondly, it is necessary to carry out the leveling process in the manufacturing process of toroidal holographic grating. Under the guidance of theory, the process of rotary coating method of toroidal holographic grating is analyzed from the point of view of hydrodynamics and thermodynamics; the approximate curvature radius function of the grating surface in the process of homogenizing is established; the homogenizing model of toroidal holographic grating in the non-lubricating state is established; and the homogenizing model is induced and polynomial by combining experiments. Fitting gives the laboratory coefficients needed to establish a complete homogenizing model; validating the established homogenizing model by experiment, and comparing and analyzing the homogenizing model under different process parameters; discussing and deducing the homogenizing model of concave sphere and plane grating suitable for lubricating and non-lubricating conditions. A series of models are in agreement with the experimental data, which can guide the leveling process to a certain extent. Thirdly, in order to analyze the influence of various parameter errors on the spectral performance of toroidal holographic gratings during fabrication and use, the spectral performance evaluation function of toroidal holographic gratings is established, which can be used to evaluate the spectral performance of toroidal holographic gratings. The image height, image width and spectral comprehensive performance of the ray-tracing dot-map of toroidal holographic grating are evaluated; the effects of parameters errors, recording parameters errors, substrate surface errors and leveling parameters errors in different stages of fabrication and use of the grating on the spectral performance of the grating are analyzed in depth; and the error compensation between the parameters is simulated. The method of compensating a single error at a certain stage by other parameters is analyzed, and the parameters and compensation methods which have great influence on the spectral performance in the process of developing and using the grating are determined. The defects easily appeared in the rotary coating leveling process were analyzed, and the causes and solutions of the defects were studied. Combined with the fabrication process of toroidal holographic grating, the design of spherical wave exposure light path and the real-time monitoring technology of asymmetric exposure development, the toroidal surface used in wide-band monochromator was introduced. The fabrication method of holographic grating provides theoretical guidance and experimental basis for the fabrication of toroidal holographic grating.
【学位授予单位】：中国科学院研究生院(长春光学精密机械与物理研究所)
【学位级别】：博士
【学位授予年份】：2016
【分类号】：O438.1

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