自由曲面在成像光学系统中的研究

发布时间：2019-03-16 12:23

【摘要】：传统光学系统通常由球面或者简单非球面光学元件组成。随着光学系统应用场景不断扩展和使用要求的不断提高,传统的光学系统已经无法满足智能化、小型化、低成本的使用要求。光学自由曲面的出现,为解决这一难题提供了思路。光学自由曲面的非旋转对称性和强大的面型表征能力为光学设计者提供了更多的设计自由度。应用自由曲面能够设计出更加优秀、满足特定应用场景的光学系统。随着光学加工、检测、装调技术的提高,自由曲面逐渐成为了未来光学系统设计的发展方向。本文主要在以下几个方面对自由曲面在成像光学系统中的应用进行研究:自由曲面的表征形式;矢量像差理论(节点理论)在含有自由曲面光学系统中应用;含有自由曲面的非旋转对称光学系统像质评价;自由曲面在反射式光学系统设计中的应用;自由曲面在NA1.35投影光刻物镜的设计,以及折射率均匀性补偿中的应用。以下是本文的主要工作:(1)阐述了自由曲面的不同表征形式,以及不同表征形式下的自由曲面之间的转换方法,为自由曲面光学系统初始结构的获取提供了思路;对不同表征形式下的自由曲面的性质进行总结和对比,为自由曲面的选取提供依据。(2)详细阐述了矢量像差理论在非旋转对称光学系统中的三阶表达式,并分析了像差的节点行为;详细阐述了矢量像差理论在含有自由曲面光学系统中的表达式,并以像散为研究对象,研究了自由曲面对像散节点行为的影响。对矢量像差的研究为自由曲面光学系统设计提供了有力的理论指导。(3)针对主流光学设计软件对含有自由曲面的非旋转对称光学系统像质评价的缺陷,提出了最佳参考网格的概念,并建立相应的数学模型。通过光学设计软件与数学软件的结合使用,求解最佳参考网格。应用最佳参考网格可以对光学系统的有效焦距和畸变进行准确的计算,并对畸变进行优化。(4)自由曲面在反射式光学系统中的应用研究。应用Zernike自由曲面成功的设计了一款焦距1200mm,F#4,视场20°×4°,用于空间光学遥感的离轴三反射镜光学系统,并应用最佳参考网格对其进行像质评价;应用XY自由曲面和Zernike自由曲面成功设计了一款焦距50mm,出瞳直径8mm,视场50°×25°的离轴双反射镜头盔显示器,该设计结构紧凑,无色差,具有小型、轻量的特点。(5)自由曲面在NA1.35投影光刻物镜中的应用研究。第一,应用Q-type自由曲面成功的将光刻物镜波像差RMS和畸变优化到1nm以内,同时满足NA1.35投影光刻物镜对光学总长、成像视场、NA一致性、像方远心等方面的要求;第二,应用径向基函数描述的自由曲面对NA1.35光刻物镜折射率均匀性进行了补偿,详细推导了自由曲面对折射率均匀性补偿的基本原理,并取得了良好的补偿效果。
[Abstract]:Traditional optical systems are usually composed of spherical or simple aspheric optical elements. With the development of the application scene of optical system, the traditional optical system has been unable to meet the requirements of intelligence, miniaturization and low cost. The appearance of optical freeform surface provides a way to solve this problem. The non-rotational symmetry of optical freeform surfaces and strong surface representation provide more degrees of freedom for optical designers. The application of freeform surface can be used to design a better optical system which can satisfy the specific application scenario. With the improvement of optical processing, detection and assembly technology, the free-form surface has gradually become the development direction of optical system design in the future. In this paper, the application of free-form surface in imaging optical system is studied in the following aspects: the representation of free-form surface, the application of vector aberration theory (node theory) in the optical system containing free-form surface, and the application of vector aberration theory in optical system with free-form surface. Image quality evaluation of non-rotationally symmetric optical system with free-form surface; application of free-form surface in the design of reflective optical system; application of free-form surface in the design of NA1.35 projection lithography lens and compensation of refractive index uniformity. The following is the main work of this paper: (1) the different representation forms of free-form surfaces and the transformation methods between free-form surfaces under different representation forms are described, which provides a way to obtain the initial structure of the optical system of free-form surfaces; The properties of free-form surfaces under different representations are summarized and compared, which provides the basis for the selection of free-form surfaces. (2) the third-order expression of vector aberration theory in non-rotationally symmetric optical systems is described in detail. The node behavior of aberrations is analyzed. The expression of vector aberration theory in optical systems with free-form surfaces is described in detail, and the effect of free surface on the behavior of astigmatic nodes is studied with astigmatism as the research object. The research on vector aberration provides a powerful theoretical guidance for the design of free-form surface optical system. (3) aiming at the defect of the mainstream optical design software to evaluate the image quality of non-rotational symmetric optical system with free-form surface. The concept of the best reference grid is proposed, and the corresponding mathematical model is established. Through the combination of optical design software and mathematical software, the best reference grid can be solved. The effective focal length and distortion of the optical system can be calculated accurately by using the best reference mesh, and the distortion can be optimized. (4) the application of the free-form surface in the reflective optical system is studied. An off-axis three-mirror optical system for space optical remote sensing is designed by using Zernike free-form surface, and the image quality is evaluated by using the best reference mesh for off-axis three-mirror optical system with a focal length of 1200 mm, F ~ (* 4) and field of view (20 掳脳 4 掳). An off-axis dual reflective lens helmet display with focal length of 50mm, pupil diameter of 8mm and field of view of 50 掳脳 25 掳has been successfully designed by using XY freeform surface and Zernike freeform surface. The design is compact, colorless and small. The characteristics of light weight. (5) the application of free-form surface in NA1.35 projection lithography lens. Firstly, Q-type free-form surface is used to optimize the aberration RMS and distortion within 1nm. At the same time, it can meet the requirements of the total optical length, imaging field of view, NA consistency, such as telecentric and so on for the NA1.35 projection lithography lens. Secondly, the refractive index uniformity of the free surface NA1.35 lithography lens described by the radial basis function is compensated, and the basic principle of the free surface refractive index uniformity compensation is deduced in detail, and a good compensation effect is obtained.
【学位授予单位】：中国科学院研究生院(长春光学精密机械与物理研究所)
【学位级别】：博士
【学位授予年份】：2016
【分类号】：O439

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