10-40GHz集成电路在片测试平台设计

发布时间：2018-01-15 06:20

本文关键词：10-40GHz集成电路在片测试平台设计　出处：《东南大学》2017年硕士论文　论文类型：学位论文

【摘要】：半导体工艺技术的进步促进了集成电路在小型化、低功耗、高输出功率和高集成度等方面的进步,对集成电路的测试技术和要求也不断提高。根据新的测试需求需要设计10-40GHz集成电路在片测试平台以迎合工程化应用,平台采用在片的方式全面测试芯片的电性能参数,可以保障装配的成品率、完善集成电路的批生产技术,实现产品的生产过程控制。论文首先对10-40GHz IC性能参数进行了分析和归纳,设计了基于半自动探针台和网络分析仪等测试仪器的10-40GHz集成电路在片测试平台,该平台由多功能多参数在片测试子平台和脉冲功率在片测试子平台组成。通过分析相关仪器的测试校准技术,对部分校准方法进行优化,以适用于在片测试工程化应用。在多功能多参数在片测试子平台方面,设计了多功能驱动器,以提供满足集成电路测试所需要的不同驱动信号。在脉冲功率在片测试子平台方面,对直流探针卡偏置电路进行优化设计解决功率放大器在片测试稳定性问题,通过嵌入前置放大器的方法提升脉冲功率在片测试子平台的驱动能力,并且能够快速测试放大器的附加效率,实现功率放大器的快速在片测试。测试平台验证结果表明设计达到指标要求。论文通过部分技术的优化,实现了简易、便捷的校准、测试,同时实现了在片测试的自动化,使得测试平台具备高重复性、稳定性和易操作性,适用于在片测试的工程化应用,可以应用于10-40GHz单片集成电路的电参数测试。
[Abstract]:The progress of semiconductor technology has promoted the progress of integrated circuits in miniaturization, low power consumption, high output power and high integration. According to the new test requirements, 10-40GHz integrated circuit in chip test platform is designed to meet the needs of engineering applications. The platform adopts on-chip mode to test the electrical performance parameters of the chip, which can guarantee the finished product rate of assembly and improve the batch production technology of integrated circuit. Firstly, the performance parameters of 10-40GHz IC are analyzed and summarized. A testing platform of 10-40GHz integrated circuit is designed based on semi-automatic probe table and network analyzer. The platform is composed of multi-function multi-parameter in-chip test sub-platform and pulse power in-chip test sub-platform. By analyzing the testing and calibration technology of related instruments, the partial calibration method is optimized. In order to be suitable for the engineering application of in-chip test, the multi-function driver is designed in the multi-function multi-parameter test sub-platform. In order to provide different driving signals to meet the needs of IC testing, the DC probe card bias circuit is optimized to solve the stability problem of the power amplifier in chip test in the pulse power in chip test sub-platform. By embedding the preamplifier, the driving capability of the pulse power in chip test subplatform is enhanced, and the additional efficiency of the amplifier can be measured quickly. The test platform verification results show that the design meets the requirements. Through the optimization of some technologies, the paper realizes simple and convenient calibration and testing. At the same time, the automation of in-chip test is realized, which makes the test platform has high repeatability, stability and easy operation, which is suitable for the engineering application of in-chip testing. It can be used to test the electrical parameters of 10-40 GHz monolithic integrated circuit.
【学位授予单位】：东南大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TN407

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