压电式MEMS压力传感器的设计与工艺研究

发布时间：2018-01-19 15:36

本文关键词： 压力传感器压电薄膜纳米纤维静电纺丝　出处：《北方工业大学》2017年硕士论文　论文类型：学位论文

【摘要】：压电式MEMS压力传感器是微器件中应用较广泛的一种,而敏感材料则是传感器技术的关键。所以本文主要的研究内容是微机电系统中的压电式MEMS压力传感器,以具有压电性能的PZT和BiFeO_3为敏感材料,分别利用溶胶-凝胶法和旋涂工艺相结合制备PZT压电薄膜,利用静电纺丝技术制备BiFeO_3纳米纤维,并与通过光刻、磁控溅射、干法刻蚀等微加工工艺制备的硅基底片相结合,制作出基于PZT压电薄膜和BiFeO_3纳米纤维的压电式MEMS压力传感器。最后设计并搭建一套压力传感器的测试平台,对其进行初步的性能测试实验,为多铁材料在微器件上的应用提供理论依据和实验基础。首先,基于平行叉指电极结构,设计三种不同结构类型的压力传感器,即基于PZT压电薄膜的MEMS压力传感器、有弹性薄膜腔且基于BiFeO_3纳米纤维的MEMS压力传感器、无弹性薄膜腔且基于BiFeO_3纳米纤维的MEMS压力传感器,对于无弹性薄膜腔的结构,需要使用PDMS膜来代替受力的弹性薄膜,然后分析和对比三种不同类型传感器的特性。其次,研究微加工工艺和静电纺丝技术。对于微加工工艺,重新拟定本课题三种压力传感器的加工流程,改良工艺参数和加工方式,其中利用溶胶-凝胶法和旋涂法制备PZT压电薄膜,利用干法刻蚀得到弹性薄膜腔,利用旋涂工艺制备PDMS膜等。对于静电纺丝技术,优化推进速度、电场强度、极板间距、接收距离等实验参数,在电极上制备出趋于平行的BiFeO_3纳米纤维,并对退火后的纳米纤维进行XRD和SEM表征分析。最后,设计测试系统并搭建压力传感器测试平台,测试系统主要包括真空装置、数字压差计、测试电路等,对制备成功的压力传感器实行初步性能测验,分析实验数据,得到压力输入和电压输出的关系。
[Abstract]:Piezoelectric MEMS pressure sensor is widely used in microdevices. The sensitive material is the key of sensor technology, so the main research content of this paper is piezoelectric MEMS pressure sensor in MEMS. Using PZT and BiFeO_3 with piezoelectric properties as sensitive materials, PZT piezoelectric thin films were prepared by sol-gel method and spin-coating process, respectively. BiFeO_3 nanofibers were prepared by electrospinning and combined with silicon substrate prepared by photolithography, magnetron sputtering and dry etching. A piezoelectric MEMS pressure sensor based on PZT piezoelectric film and BiFeO_3 nanofiber was fabricated. Finally, a testing platform for the pressure sensor was designed and built. The preliminary performance test experiments provide theoretical basis and experimental basis for the application of multi-iron materials in microdevices. Firstly, three kinds of pressure sensors with different structure are designed based on parallel interDigital electrode structure. That is, MEMS pressure sensor based on PZT piezoelectric film, MEMS pressure sensor with elastic film cavity and BiFeO_3 nanofiber. The MEMS pressure sensor based on BiFeO_3 nanofiber is an inelastic thin film cavity. For the structure of the inelastic thin film cavity, PDMS film is needed to replace the elastic film. Then the characteristics of three different types of sensors are analyzed and compared. Secondly, the micromachining technology and electrostatic spinning technology are studied. For the micro-machining process, the processing process of the three kinds of pressure sensors is reformulated. The PZT piezoelectric film was prepared by sol-gel method and spin-coating method, and the elastic film cavity was obtained by dry etching. PDMS films were prepared by spin-coating process. For the electrostatic spinning technology, the experimental parameters such as speed of propulsion, electric field strength, plate spacing and receiving distance were optimized. The parallel BiFeO_3 nanofibers were prepared on the electrode, and the annealed nanofibers were characterized by XRD and SEM. Finally, the test system was designed and the pressure sensor test platform was built. The test system mainly includes vacuum device, digital pressure differential meter, test circuit and so on. The primary performance test of the successfully fabricated pressure sensor is carried out, the experimental data are analyzed, and the relationship between pressure input and voltage output is obtained.
【学位授予单位】：北方工业大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TP212

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