基于黏滑驱动的典型微纳操作机器人研究
发布时间：2018-11-03 12:46
【摘要】：微纳操作机器人是一种可以对微纳米级目标物进行夹取及搬运操作的机构,是当前微纳米研究的主要工具之一。随着微纳米领域研究的不断深入,对微纳操作机器人的控制性能及定位精度的要求也越来越高。当前常见的微纳米操作机器人多采用黏滑机理进行驱动,该种驱动方式可以使机构在实现毫米级大行程的前提下保持纳米级步距的高精度,但黏滑驱动是一种基于摩擦力差异性的惯性驱动方式,摩擦力的严重非线性特征以及黏滑驱动的固有缺点会导致机器人在工作时具有较明显的振动和回移现象。因此,对黏滑驱动的机理进行深入研究,利用合适的摩擦力模型对黏滑驱动过程进行合理描述,进而抑制甚至消除黏滑驱动机构所特有的振动及回移现象,提升微纳操作机器人的控制及定位性能,成为该领域当前的一个研究热点。本文在对国内外黏滑驱动机构的研究进行整理及总结的基础上,对黏滑驱动机理、接触面间弹塑性变形、摩擦力产生过程以及构建新型摩擦力模型等方面进行研究,主要内容如下:(1)对预滑动阶段接触面间弹塑性变形状态及该阶段摩擦力特性进行实验研究,发现接触面之间存在最大弹性变形区间,且在外力作用下,接触面间所有小于最大弹性变形量的相对位移在外力消失后均能够完全恢复,而大于最大弹性变形量的相对位移仅能恢复与最大弹性变形量相等的部分。通过测量并分析接触面间所受切向外力与相对位移的大小,发现在最大弹性变形区间内,摩擦力与相对位移大小近似呈线性关系。通过对不同接触面粗糙度及正压力下的接触面弹性变形进行实验研究,得出在相同粗糙度下接触面最大弹性变形量与接触面正压力呈线性关系,且接触面越光滑,线性特征越明显,接触面越粗糙,非线性特征越明显。(2)在对比研究现有摩擦力模型在描述预滑动阶段摩擦力特性上的异同及优缺点的基础上,对现有微凸体模型进行分类整理,并构建一种新型的微凸体模型,该微凸体模型可以合理描述接触面切向及法向变形状态以及二者之间的关系。通过将新型微凸体模型与Maxwell-Slip模型结合,构建一种基于微凸体的混合摩擦力模型,该模型既改善了单状态摩擦力模型在描述接触面弹性变形及非局部记忆磁滞方面的缺陷,又弥补了传统多状态模型在描述接触面法向磁滞力方面的不足。相对于GMS等传统摩擦力模型,新摩擦力模型结构较为简单,具有较高的运算效率及稳定性。(3)利用基于微凸体的混合摩擦力模型对黏滑驱动机构的运动过程进行描述,对锯齿波驱动下的滑动体回移阶段运动进行分析,得出滑动体在不同条件下的运动特征,并从摩擦力角度分析了滑动体发生振动的原因以及滑动体不产生回移的条件。随后,设计制作了黏滑驱动机构实验样机,并建立其机构动力学模型,搭建了基于混合摩擦力模型的黏滑驱动机构控制系统。(4)设计搭建了黏滑驱动机构实验系统,针对由柔顺机构组成的基座在锯齿波电压驱动下具有明显残余振动的问题,通过dSPACE在压电陶瓷控制信号中串联改进的点阻滤波器,抑制了基座的残余振动,减少了基座振动对于黏滑驱动机构运动的不利影响。针对滑柱在一个驱动周期内的残余振动对下一个驱动周期造成的影响,结合本实验机构自身特点,优化了机构的驱动信号波形,提高了机构的驱动稳定性。针对黏滑驱动机构输出端在驱动周期末尾的残余振动问题,依据混合摩擦力模型对于机构运动的描述,分析了残余振动产生的原因,并依据模型的计算对机构进行前馈输入整形控制,抑制了机构输出端的残余振动,减少了回移量,提高了机构的驱动效率及定位精度。最后,在总结本文工作的基础上,对今后黏滑驱动机构的设计及摩擦力模型的研究提出相应建议。
[Abstract]:Micro-nano-manipulator is a mechanism capable of clamping and carrying micro-nano-scale targets, which is one of the main tools in the research of micro-nano-scale. With the development of micro-nano-field research, the requirement of control performance and positioning accuracy of micro-nano-manipulator is higher and higher. At present, the micro-nano-operation robot is driven by a viscous sliding mechanism, and the driving method can keep the mechanism high-precision of the nanometer step distance under the premise of realizing the large stroke of the millimeter scale, but the viscoelastic driving is an inertia driving mode based on the difference of friction, The serious non-linear characteristics of friction and the inherent disadvantages of viscous-slip drive can cause the robot to have obvious vibration and return movement during operation. Therefore, the mechanism of the viscoelastic driving is researched deeply, and the viscous sliding driving process is reasonably described by using a suitable friction model, so that the vibration and the return phenomenon peculiar to the viscoelastic driving mechanism can be suppressed and even eliminated, the control and positioning performance of the micro-nano operation robot is improved, Become a research hotspot in this field. On the basis of finishing and summarizing the research of the viscoelastic driving mechanism at home and abroad, the paper studies the mechanism of slip driving, the elastic-plastic deformation of the contact surface, the process of friction and the construction of a new friction model, and the main contents are as follows: (1) carrying out experimental research on the elastic-plastic deformation state between the contact surfaces of the pre-sliding phase and the friction property of the stage, the relative displacement between the contact surfaces which is less than the maximum elastic deformation amount can be fully recovered after the external force disappears, and the relative displacement which is larger than the maximum elastic deformation amount can only recover the part equivalent to the maximum elastic deformation amount. By measuring and analyzing the magnitude of the tangential external force and relative displacement between the contact surfaces, it is found that the friction force is linear with the relative displacement in the maximum elastic deformation interval. By experimental research on the elastic deformation of the contact surface under different contact surface roughness and positive pressure, it is concluded that the maximum elastic deformation amount of the contact surface is linear with the positive pressure of the contact surface under the same roughness, and the smoother the contact surface, the more obvious the linear characteristic, the more rough the contact surface, the more significant the non-linear features. (2) on the basis of comparing the similarities and differences of the friction characteristics of the pre-sliding phase and the advantages and disadvantages of the existing friction model, the existing micro-convex body model is classified and arranged, and a novel micro-convex body model is constructed, The micro-convex model can describe the relationship between the tangential direction and the deformation state of the contact surface and the relationship between them. A hybrid friction model based on a micro-convex body is constructed by combining the novel micro-convex body model and the Gauss-slip model, and the model not only improves the defect of the single-state friction model in describing the elastic deformation of the contact surface and the non-local memory hysteresis, In addition, the deficiency of the traditional multi-state model in describing the contact surface method to the hysteresis force is made up. Compared with GMS and other conventional friction models, the new friction model has simpler structure and higher operational efficiency and stability. (3) using the mixed friction model based on the micro convex body to describe the motion process of the viscoelastic driving mechanism, analyzing the movement of the sliding body under the driving of the sawtooth wave to obtain the motion characteristics of the sliding body under different conditions, The reason of the vibration of the sliding body and the condition that the sliding body does not move back are analyzed from the angle of friction. Then, the experimental prototype of the viscoelastic driving mechanism was designed, and the mechanism dynamics model was established, and a viscous sliding drive mechanism control system based on the hybrid friction model was constructed. (4) designing the experimental system of the viscoelastic driving mechanism, aiming at the problem that the base composed of the compliant mechanism has obvious residual vibration under the driving of the sawtooth wave voltage, the point resistance filter which is improved in series in the piezoelectric ceramic control signal by the dSPACE, suppresses the residual vibration of the base, the adverse effect of the vibration of the base on the movement of the viscoelastic driving mechanism is reduced. Aiming at the influence of the residual vibration of the sliding column on the next driving cycle during a driving period, the driving signal waveform of the mechanism is optimized according to the characteristics of the experimental mechanism, and the driving stability of the mechanism is improved. aiming at the residual vibration problem at the end of the driving cycle of the output end of the viscoelastic driving mechanism, the reason of the residual vibration generation is analyzed according to the description of the motion of the mechanism according to the mixed friction model, and the feed forward input shaping control is carried out on the mechanism according to the calculation of the model, the residual vibration at the output end of the mechanism is suppressed, the amount of return movement is reduced, and the driving efficiency and the positioning accuracy of the mechanism are improved. Finally, on the basis of summarizing the work of this paper, the paper puts forward some suggestions on the design and friction model of the sliding drive mechanism in the future.
【学位授予单位】：华南理工大学
【学位级别】：博士
【学位授予年份】：2016
【分类号】：TP242
本文编号：2307835
[Abstract]:Micro-nano-manipulator is a mechanism capable of clamping and carrying micro-nano-scale targets, which is one of the main tools in the research of micro-nano-scale. With the development of micro-nano-field research, the requirement of control performance and positioning accuracy of micro-nano-manipulator is higher and higher. At present, the micro-nano-operation robot is driven by a viscous sliding mechanism, and the driving method can keep the mechanism high-precision of the nanometer step distance under the premise of realizing the large stroke of the millimeter scale, but the viscoelastic driving is an inertia driving mode based on the difference of friction, The serious non-linear characteristics of friction and the inherent disadvantages of viscous-slip drive can cause the robot to have obvious vibration and return movement during operation. Therefore, the mechanism of the viscoelastic driving is researched deeply, and the viscous sliding driving process is reasonably described by using a suitable friction model, so that the vibration and the return phenomenon peculiar to the viscoelastic driving mechanism can be suppressed and even eliminated, the control and positioning performance of the micro-nano operation robot is improved, Become a research hotspot in this field. On the basis of finishing and summarizing the research of the viscoelastic driving mechanism at home and abroad, the paper studies the mechanism of slip driving, the elastic-plastic deformation of the contact surface, the process of friction and the construction of a new friction model, and the main contents are as follows: (1) carrying out experimental research on the elastic-plastic deformation state between the contact surfaces of the pre-sliding phase and the friction property of the stage, the relative displacement between the contact surfaces which is less than the maximum elastic deformation amount can be fully recovered after the external force disappears, and the relative displacement which is larger than the maximum elastic deformation amount can only recover the part equivalent to the maximum elastic deformation amount. By measuring and analyzing the magnitude of the tangential external force and relative displacement between the contact surfaces, it is found that the friction force is linear with the relative displacement in the maximum elastic deformation interval. By experimental research on the elastic deformation of the contact surface under different contact surface roughness and positive pressure, it is concluded that the maximum elastic deformation amount of the contact surface is linear with the positive pressure of the contact surface under the same roughness, and the smoother the contact surface, the more obvious the linear characteristic, the more rough the contact surface, the more significant the non-linear features. (2) on the basis of comparing the similarities and differences of the friction characteristics of the pre-sliding phase and the advantages and disadvantages of the existing friction model, the existing micro-convex body model is classified and arranged, and a novel micro-convex body model is constructed, The micro-convex model can describe the relationship between the tangential direction and the deformation state of the contact surface and the relationship between them. A hybrid friction model based on a micro-convex body is constructed by combining the novel micro-convex body model and the Gauss-slip model, and the model not only improves the defect of the single-state friction model in describing the elastic deformation of the contact surface and the non-local memory hysteresis, In addition, the deficiency of the traditional multi-state model in describing the contact surface method to the hysteresis force is made up. Compared with GMS and other conventional friction models, the new friction model has simpler structure and higher operational efficiency and stability. (3) using the mixed friction model based on the micro convex body to describe the motion process of the viscoelastic driving mechanism, analyzing the movement of the sliding body under the driving of the sawtooth wave to obtain the motion characteristics of the sliding body under different conditions, The reason of the vibration of the sliding body and the condition that the sliding body does not move back are analyzed from the angle of friction. Then, the experimental prototype of the viscoelastic driving mechanism was designed, and the mechanism dynamics model was established, and a viscous sliding drive mechanism control system based on the hybrid friction model was constructed. (4) designing the experimental system of the viscoelastic driving mechanism, aiming at the problem that the base composed of the compliant mechanism has obvious residual vibration under the driving of the sawtooth wave voltage, the point resistance filter which is improved in series in the piezoelectric ceramic control signal by the dSPACE, suppresses the residual vibration of the base, the adverse effect of the vibration of the base on the movement of the viscoelastic driving mechanism is reduced. Aiming at the influence of the residual vibration of the sliding column on the next driving cycle during a driving period, the driving signal waveform of the mechanism is optimized according to the characteristics of the experimental mechanism, and the driving stability of the mechanism is improved. aiming at the residual vibration problem at the end of the driving cycle of the output end of the viscoelastic driving mechanism, the reason of the residual vibration generation is analyzed according to the description of the motion of the mechanism according to the mixed friction model, and the feed forward input shaping control is carried out on the mechanism according to the calculation of the model, the residual vibration at the output end of the mechanism is suppressed, the amount of return movement is reduced, and the driving efficiency and the positioning accuracy of the mechanism are improved. Finally, on the basis of summarizing the work of this paper, the paper puts forward some suggestions on the design and friction model of the sliding drive mechanism in the future.
【学位授予单位】：华南理工大学
【学位级别】：博士
【学位授予年份】：2016
【分类号】：TP242
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1 秦磊;基于双质量摩擦振子的黏滑驱动机理及实验研究[D];哈尔滨工业大学;2007年
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