聚合物线石英音叉复合温度传感器研究

发布时间：2018-11-17 18:03

【摘要】：石英音叉谐振器的谐振频率对音叉臂的质量和刚度的变化极其敏感,基于石英音叉谐振器结构,将敏感聚合物薄膜覆盖在石英音叉臂上或将敏感聚合物线横跨音叉臂两端,可以通过检测石英音叉谐振器的谐振频率变化来反映聚合物薄膜质量的变化或聚合物线刚度的变化,设计出质量敏感型或力敏感型石英音叉传感器,该传感器具有结构紧凑、体积小,分辨力高和稳定性好等特点。聚合物线石英音叉复合温度传感器是将热敏感的聚合物线作为热敏元件附着在石英音叉谐振器的两个音叉臂上,将温度的变化通过聚合物线转变为力的变化施加到音叉臂上,导致石英音叉谐振器谐振频率的变化,属于热/力敏感型压电谐振式传感器。在保持压电谐振式传感器固有的输出信号信噪比高和抗干扰能力强等优点的同时,通过热敏聚合物线提高传感器的灵敏度和响应速度,该传感器可以应用于快速精密测温领域,亦可作为热探测器应用到非接触红外测温领域。本论文以热敏聚合物线与石英音叉复合结构的温度传感器为研究目标,研究了聚合物线石英音叉温度传感器热敏机理;提出了聚合物线与石英音叉复合结构的温度传感器设计方法和制备工艺;完成了传感器特性测试试验,并设计制作出相应的传感器阵列测温系统。论文主要完成以下工作:1.提出了聚合物线石英音叉复合温度传感器的结构,确定了传感器研究的总体方案。2.阐述了聚合物线石英音叉复合温度传感器的工作原理,设计了热敏聚合物线与石英音叉谐振器复合的传感器结构,分析了石英音叉谐振器频率温度特性对传感器性能的影响因素,确定了石英音叉谐振器石英晶体的新切型,通过实验比对方法筛选出高温度灵敏度的聚合物材料,设计了聚合物线石英音叉复合温度传感器的制作工艺流程。3.结合弹性压电理论和有限元仿真分析方法,利用ANSYS有限元软件对聚合物线石英音叉复合谐振器的振动模态、谐响应和结构进行仿真分析。研究了聚合物线与石英音叉复合位置对传感器灵敏度的影响,确定了聚合物线与石英音叉理想的复合位置。4.建立了聚合物线石英音叉复合温度传感器特性测试平台,在-10°C~80°C的温度范围内,对聚合物线石英音叉复合温度传感器的特性进行测试,量化了石英音叉谐振频率偏移与温度变化的对应关系。测试结果表明:聚合物线石英音叉复合温度传感器可以实现对环境温度变化的检测,其灵敏度为8.2Hz/°C,非线性误差为0.005%,分辨力为0.003°C,响应时间为1.5s,,置信概率为95%时的重复性为0.006%,同时具有很好的稳定性。5.设计制作出测温传感器阵列,研究了多传感器数据融合技术,研制了阵列传感器信号处理电路,开发了基于LabView平台的上位机应用软件,提高了温度测量的精确性。
[Abstract]:The resonant frequency of the quartz tuning fork resonator is very sensitive to the change of the quality and stiffness of the tuning fork arm. Based on the structure of the quartz tuning fork resonator, the sensitive polymer film is covered on the quartz tuning fork arm or the sensitive polymer wire is crossed across the two ends of the tuning fork arm. The quartz tuning fork sensor with a compact structure can be designed by detecting the change of resonant frequency of the quartz tuning fork resonator to reflect the change of the mass of polymer film or the change of the linear stiffness of the polymer. Small size, high resolution and good stability. The composite temperature sensor of polymer wire quartz tuning fork is a thermo-sensitive polymer wire attached to two tuning fork arms of quartz tuning fork resonator. The change of temperature is applied to the tuning fork arm through the change of polymer wire to force. The change of resonant frequency of quartz tuning fork resonator belongs to a thermal / force sensitive piezoelectric resonant sensor. While maintaining the advantages of high signal-to-noise ratio (SNR) and strong anti-interference ability of the piezoelectric resonant sensor, the sensor can be used in the field of rapid and precise temperature measurement by improving the sensitivity and response speed of the sensor by means of the thermosensitive polymer wire. It can also be used as a thermal detector in the field of non-contact infrared temperature measurement. In this paper, the thermosensitive mechanism of polymer wire quartz tuning fork temperature sensor is studied. The design method and fabrication process of temperature sensor with composite structure of polymer wire and quartz tuning fork are presented, and the testing test of sensor characteristics is completed, and the corresponding sensor array temperature measuring system is designed and manufactured. The main work of this paper is as follows: 1. The structure of polymer linear quartz tuning fork composite temperature sensor is presented, and the overall scheme of sensor research is determined. 2. The working principle of polymer wire quartz tuning fork composite temperature sensor is described. The sensor structure of thermal sensitive polymer wire and quartz tuning fork resonator is designed. The influence factors of the frequency and temperature characteristics of quartz tuning fork resonator on the performance of the sensor are analyzed. The new cut form of quartz crystal of quartz tuning fork resonator is determined. The polymer materials with high temperature sensitivity are screened by the method of experimental comparison. The fabrication process of polymer wire quartz tuning fork composite temperature sensor is designed. 3. Combined with elastic piezoelectric theory and finite element simulation method, the vibration mode, harmonic response and structure of polymer linear quartz tuning fork composite resonator are simulated and analyzed by ANSYS finite element software. The influence of the compound position of polymer wire and quartz tuning fork on the sensitivity of the sensor is studied, and the ideal compound position of polymer line and quartz tuning fork is determined. The testing platform of polymer linear quartz tuning fork composite temperature sensor is established. The characteristics of polymer linear quartz tuning fork composite temperature sensor are tested in the temperature range of -10 掳C ~ (80 掳C). The relationship between quartz tuning fork resonance frequency offset and temperature change is quantified. The test results show that the temperature change can be detected by the composite temperature sensor with quartz tuning fork, the sensitivity is 8.2Hz/ 掳C, the nonlinear error is 0.005, the resolution is 0.003 掳C, and the response time is 1.5 sg. The reproducibility is 0.006 when the confidence probability is 95 and has good stability at the same time. The temperature sensor array is designed and fabricated, the multi-sensor data fusion technology is studied, the signal processing circuit of the array sensor is developed, the application software of host computer based on LabView platform is developed, and the accuracy of temperature measurement is improved.
【学位授予单位】：哈尔滨理工大学
【学位级别】：博士
【学位授予年份】：2015
【分类号】：TP212

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