基于仿蚊子口器的异平面空心微针研究

发布时间：2018-05-16 02:03

本文选题：深反应离子刻蚀 + 各向异性湿法腐蚀　；参考：《大连理工大学》2012年硕士论文

【摘要】：微针是一种对全世界医疗领域的发展起着举足轻重作用的微型产品,其主要用于给病人注射药物和为生物分析而从病人身上抽取血液两种应用目的。本课题通过对仿生概念的了解,进而以蚊子口器的结构和吸血动作为切入点,利用MEMS工艺制作出了孔径与蚊子口器内径相当的异平面空心微针阵列。采用干法刻蚀和湿法腐蚀相结合的办法制作出一种异平面空心微针阵列。具体来说,干法刻蚀用于刻穿针孔,但由于单面刻蚀时深宽比难以达到35：1,同时会使孔侧壁过于粗糙不利于进样,故采用两步和双向深反应离子刻蚀工艺确保微针孔的完全刻穿和其侧壁的光滑性；采用各向异性湿法腐蚀工艺,腐蚀单晶硅片得到侧壁为{411}晶面的硅微针。最终得到高度为100μm-120μm、针孔直径为10μm-25μm、针孔中心偏离针尖5μm-10μm的空心硅微针尖。对猪皮样品进行了多次进样测试,证明这种空心微针阵列微针具有一定的强度,可以重复使用而不折断。我们采用微机电系统工艺制作的微针在未来的无痛透皮给药系统中具有潜在的应用前景。
[Abstract]:Microneedle is a kind of microproduct which plays an important role in the development of medical field all over the world. It is mainly used for injecting drugs to patients and extracting blood from patients for biological analysis. Through understanding the concept of bionics and taking the structure of mosquito mouthpiece and the blood sucking action as the starting point, the different plane hollow microneedle array with the aperture equivalent to the inner diameter of the mosquito mouthpiece was fabricated by using the MEMS process. A heterogeneous hollow microneedle array was fabricated by dry etching and wet etching. In particular, dry etching is used to cut through a pinhole, but because the aspect ratio is difficult to reach 35: 1 when etching on one side, the sidewall of the hole is too rough to be suitable for sample injection. Therefore, two step and two way deep reactive ion etching process is used to ensure the complete etching of the micropinhole and the smoothness of the side wall of the microneedle, and the anisotropic wet etching process is used to obtain the silicon microneedle with {411} side wall by etching the single crystal silicon wafer. Finally, a hollow silicon microtip with a height of 100 渭 m ~ 120 渭 m, a pinhole diameter of 10 渭 m ~ 25 渭 m and a pinhole center deviation of 5 渭 m ~ 10 渭 m was obtained. The pig skin samples were tested for many times. It was proved that the hollow microneedle array microneedles had a certain strength and could be reused without breaking. The micro-needle made by micro-electromechanical system has potential application prospect in the future painless transdermal drug delivery system.
【学位授予单位】：大连理工大学
【学位级别】：硕士
【学位授予年份】：2012
【分类号】：TH789

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