基于MEMS技术的视觉假体多通道刺激微电极阵列的研究

发布时间：2018-06-14 00:42

本文选题：视觉假体 + MEMS技术　；参考：《上海交通大学》2012年硕士论文

【摘要】：通过植入式神经微电极对人体的特定部位施加电刺激,能够治疗传统药物或手术无法治愈的神经损伤性疾病,例如帕金森、癫痫、瘫痪、肌张力异常、老年痴呆、大小便失禁、心脏起搏异常、耳聋以及失明等。目前,视觉假体已经成为神经功能修复领域新的研究热点。多通道神经刺激微电极阵列作为视觉假体的一部分,直接与视觉神经组织相接触,是实现视觉功能修复的关键部件。随着微机电系统(Micro-Electro-Mechanical System, MEMS)技术的不断发展,多通道MEMS神经刺激微电极阵列研究受到国内外广泛关注。本文主要研究内容包括:(1)基于MEMS技术,研制可植入到脉络膜上腔的柔性薄膜刺激微电极阵列。微电极直径为350μm,按照6×10排布,4个可选的回收电极排布在刺激电极周围。采用制作工艺简单、性能良好的光敏型聚酰亚胺(PI)作为微电极衬底材料,生物相容性及电化学性能良好的金属铂(Pt)作为电极材料。为了增加电极密度,提高刺激电极空间分辨率,我们采用双层金属制作工艺,并且通过增加钛(Ti)金属层和氧等离子表面轰击来提高衬底与导电层的黏附性。(2)对研制的刺激微电极阵列进行体外与在体评估。利用三电极自动阻抗测试分析平台,对脉络膜上腔柔性微电极阵列进行电化学阻抗测试与分析。通过体外循环伏安法和瞬态电压测试确定了微电极的电荷储存能力和电荷注入能力。兔子在体动物电生理实验表明,不同的刺激电极诱发的视皮层最大响应区域的位置不同。体外与在体实验结果表明该脉络膜上腔微电极阵列能够实现在体可靠工作。
[Abstract]:Electrical stimulation of specific parts of the body by implanting neural microelectrodes can treat neurological disorders that cannot be cured by traditional drugs or surgery, such as Parkinson's, epilepsy, paralysis, muscular dystonia, Alzheimer's disease, incontinence. Abnormal cardiac pacing, deafness and blindness. At present, visual prosthesis has become a new research hotspot in the field of nerve function restoration. As a part of visual prosthesis, multi-channel nerve stimulation microelectrode array is directly in contact with visual nerve tissue and is the key component of visual functional restoration. With the development of MEMS Micro-Electro-Mechanical system (MEMSS) technology, the research of multi-channel MEMS neural stimulation microelectrode array has been paid more and more attention at home and abroad. The main contents of this thesis are as follows: (1) based on MEMS technology, a flexible thin-film stimulated microelectrode array can be implanted into the suprachoroidal cavity. The diameter of the microelectrode is 350 渭 m. The microelectrode is arranged according to 6 脳 10 arrangement and 4 alternative recovery electrodes are arranged around the stimulation electrode. The Guang Min type polyimide (Pi) with simple fabrication process and good biocompatibility and electrochemical performance was used as the substrate material of the microelectrode and the platinum (Pt) with good biocompatibility and electrochemical performance was used as the electrode material. In order to increase the density of the electrode and improve the spatial resolution of the stimulant electrode, we adopt a double-layer metal fabrication process. The adhesion between substrate and conductive layer was improved by adding Ti (Ti) metal layer and oxygen plasma surface bombardment to evaluate the microelectrode array in vitro and in vivo. The electrochemical impedance measurement and analysis of flexible microelectrode arrays in the suprachoroidal cavity were carried out using a three electrode automatic impedance measurement platform. The charge storage capacity and charge injection capacity of the microelectrode were determined by cardiopulmonary bypass voltammetry and transient voltage measurement. The electrophysiological experiments of rabbits in vivo showed that the position of the maximum response region of the visual cortex induced by different stimulation electrodes was different. The results of in vitro and in vivo experiments show that the suprachoroidal microelectrode array can work reliably in vivo.
【学位授予单位】：上海交通大学
【学位级别】：硕士
【学位授予年份】：2012
【分类号】：R318.1

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