基于全息工艺的特种光栅的制备与应用研究

发布时间：2018-06-30 07:24

  本文选题：全息闪耀光栅 + 傅里叶合成曝光　； 参考：《上海理工大学》2013年博士论文

【摘要】：全息光栅是一种广泛应用于光谱仪器的分光器件,也是光谱仪器的核心器件。光栅分光能力将直接制约着光谱仪器的分辨本领。就目前国内光谱仪器高端市场主要为国外品牌所垄断的现状,积极研发具有自主知识产权的高性能分光器件的经济价值十分突出。本论文依托于国家重大科学仪器开发专项--高性能光谱仪器关键元器件与部件的应用及工程化开发(2011YQ15004004),以傅里叶合成曝光为基础,重点研究特种全息光栅(包括全息中阶梯光栅,亚波长金属线栅)的全息制作工艺,并理论研究了双层金属线栅结构的偏振特性及其潜在的应用。作为高端光谱仪器的核心分光器件,目前中阶梯光栅产品的制作技术仅为国外几家公司所掌握,且均采用机械刻划和镀膜复制的方法制作而成。本文以傅里叶级数为依据,提出了一种任意槽型闪耀光栅的全息制作方法,并以中阶梯光栅为例,设计了全息光路,精确控制了各傅里叶级数的匹配叠加,曝光显影后在光刻胶上实现了近似的中阶梯光栅槽型,为全息闪耀光栅的制作提供了一种新的思路。较传统的机械刻划光栅,全息光栅具有快速、低成本、无鬼线等优点,对制作环境也较为宽松,且光路参数可以自由调整,理论上可以能够制作任意槽型的闪耀光栅。金属线栅偏振器是一种以微纳结构为基础的新型偏振器件,较传统的晶体双折射偏振器件体积更小、性能更优,因此已经广泛使用于光线通信、LCD显示、偏振光成像等领域。然金属线栅的制作通常使用电子束直写和纳米压印技术,工艺复杂成本高。本文结合实验室现有的全息工艺基础和离子束蚀刻条件,设计并制作了一种近红外波段的金属线栅偏振器,测试结果显示该偏振片基本上达到了设计指标,能够使用于近红外波段。利用FDTD算法(时域有限差分法)分析了各种结构参数对金属线栅偏振器性能的影响,为金属线栅偏振器的设计提供理论依据;就目前市场暂无紫外波段的线栅偏振器的现状,根据双层金属线栅的特性,设计了一种可调谐式金属线栅偏振器,运用压电陶瓷的调谐作用,使得特定波长的TM透射增强而TE偏振干涉相消,从而极大地提高双层线栅结构的消光比,因此该器件可使用于紫外波段,有效地将金属线栅偏振器的应用波段扩展至深紫外波段。另外,仿真分析发现,双层金属线栅结构具有丰富的物理现象,除单层金属线栅的偏振特性外,当两层线栅的间距在波长量级以内时,还具有表面波耦合效应,即产生特定波段的透射增强;当线栅的间距远大于入射波长时,双层线栅表现为F-P腔的特性,即满足谐振条件的特定波长干涉相长,从而获得较高的透过率,不满足谐振条件的波长干涉相消,透过率降低。减反射表面一直是应用光学的研究热点,已广泛应用于光纤通信、太阳能电池、光电探测器等光学系统和光学器件。针对激光系统的光学反馈敏感性,设计了一种极低反射率的双层光栅表面,正入射时反射率可以低至10-4,较普通的单层光栅抗反射结构有很大的提高。利用双层金属线栅的F-P腔特性,提出了一种改进型的F-P腔折射率传感器,较常见的F-P腔传感器不同,该器件具有TM偏振和TE偏振的两路信号,可根据两路信号的位相关系判断折射率的增加或者减小,即可以判断折射率的变化趋势,因此该器件可应用于化学可逆反应的实时监测等领域。
[Abstract]:Holographic grating is a kind of optical device which is widely used in spectral instruments. It is also the core component of spectral instruments. The ability of grating light splitting will directly restrict the discernibility of spectral instruments. At present, the high end market of the domestic spectral instruments is mainly monopolized by foreign brands, and is actively developing a high-performance optical splitter with independent intellectual property rights. Based on the application and engineering development of key components and components of high performance spectral instruments (2011YQ15004004), based on Fu Liye synthetic exposure, this paper focuses on the study of special holographic gratings (including holographic gratings in holography, subwavelength wire grid). The polarization characteristics and potential applications of the two-layer metal grid structure are studied in theory. As the core optical component of the high end spectral instrument, the production technology of the ladder grating product is only mastered by several foreign companies at present, and is made by the method of mechanical characterization and plating film replication. This paper is based on Fourier class On the basis of the number, a holographic making method of the flashing gratings with arbitrary grooves is proposed, and the holographic optical path is designed with the medium ladder grating as an example. The matching superposition of the Fourier series is controlled accurately. The approximate middle step grating groove is realized on the photoresist after exposure development, which provides a new thought for the production of the holographic blazed grating. Compared with the traditional mechanical engraved grating, the holographic grating has the advantages of fast, low cost, and no ghost line. It is also easy to make the manufacturing environment, and the parameters of the optical path can be adjusted freely. In theory, it can be able to make any slot type blazed grating. The metal grating polarizer is a new polarization device based on the micro structure, and it is more traditional. Crystal birefringent polarizer has a smaller size and better performance, so it has been widely used in light communication, LCD display, polarized light imaging and other fields. However, the fabrication of metal grids usually uses electronic beam direct writing and nano imprint technology, with high complex cost. This paper combines the existing holographic technology base and ion beam etching conditions in the laboratory. A metal wire grating polarizer in the near infrared band is designed and fabricated. The test results show that the polarizer basically reaches the design index and can be used in the near infrared band. Using the FDTD algorithm (FD), the influence of various structural parameters on the metal grid polarizer's energy is analyzed, which provides the design of the metal grid polarizer. In theory, a tunable metal grating polarizer is designed according to the characteristics of the two-layer metal grid, which makes the TM transmission of a specific wavelength enhanced and the TE polarization interference cancels, thus greatly improving the extinction of the double grid structure. As a result, the device can be used in the ultraviolet band to effectively extend the application band of the metal grid polarizer to the deep ultraviolet band. In addition, the simulation analysis shows that the double layer metal grid structure has a rich physical phenomenon. Besides the polarization characteristics of the single layer wire grid, the surface of the two layer grid is also with the surface when the distance is within the wavelength order. The wave coupling effect produces transmission enhancement in a particular band. When the spacing of the grid is far greater than the incident wavelength, the double grid shows the characteristic of the F-P cavity, that is, the specific wavelength interferes with the specific wavelength of the resonant condition, thus obtaining higher transmittance. The wavelength interference cancellation is not satisfied and the transmittance is reduced. The surface of the antireflection surface is always the same. It has been widely used in optical systems, such as optical fiber communications, solar cells, photodetectors and other optical systems and optical devices. For the optical feedback sensitivity of the laser system, a very low reflectivity double grating surface is designed. The reflectivity can be as low as 10-4 at positive incidence, which is larger than that of the ordinary single layer grating anti reflective structure. By using the F-P cavity characteristics of a double layer wire grid, an improved F-P cavity refractive index sensor is proposed, which is different from the common F-P cavity sensor. The device has two signals of TM polarization and TE polarization. The refractive index can be judged to be increased or reduced according to the phase relation of the two signals, that is, the trend of the refractive index can be judged. Therefore, the device can be applied to real time monitoring of chemical reversible reactions.
【学位授予单位】：上海理工大学
【学位级别】：博士
【学位授予年份】：2013
【分类号】：TH744.1
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本文编号：2085489