耐高温柔性透明电极及其在光电器件中的应用

发布时间：2018-03-08 03:00

本文选题：脉冲激光沉积　切入点：Mica　出处：《深圳大学》2017年硕士论文　论文类型：学位论文

【摘要】：平面显示、薄膜晶体管以及柔性可穿戴电子器件等新型光/电器件的飞速发展,对透明导电材料的光电性能以及疲劳稳定性等提出了越来越高的技术要求。透明导电材料通常包含透明基底和透明导电薄膜两个部分,目前应用最为广泛的透明导电薄膜当属氧化物Sn:In203(ITO)薄膜,但是它的缺点在于In属于稀有金属,价格昂贵,并且对人身安全以及自然环境有一定的负面影响。Al:ZnO(AZO)薄膜是近期研究较多的氧化物透明材料,它具有与ITO相媲美的电学与光学特性,其更突出的优势在于:无毒、成本低、制备方法多且工艺简单。因此AZO薄膜被认为具有取代ITO薄膜的潜力。Oxide/Metal/Oxide(OMO)金属夹层三明治结构在纯氧化物薄膜的基础上,以较小的厚度可以实现更加优越的光电性能。聚合物基底(如PET,PEN等)是目前使用最广泛的柔性透明基底。然而由于不耐高温及尺寸稳定性差等缺点,很难在聚合物基底上沉积高质量的透明氧化物薄膜。着眼于此,本文提出一种新型的柔性透明基底云母(Mica),它同时具有耐高温、低热膨胀系数、表面粗糙度小、透明度高等优点,有希望替代聚合物柔性基底成为新一代柔性透明基底。本文采用脉冲激光沉积法制备出高性能ITO、AZO以及AZO/Au/AZO透明导电薄膜,研究和分析了薄膜厚度、沉积温度、氧分压以及退火温度等工艺因素对薄膜结构、表面形貌及光电性能的影响;比较了Mica和PET基底对透明导电薄膜的光电性能的影响。采用基于Mica的透明导电材料为电极制备和表征了柔性薄膜加热器和柔性钙钛矿太阳能电池这两种光/电器件的使用性能。具体的研究结果如下:(1)实验表明,退火温度对ITO薄膜的微观结构以及光电性能有着很大的影响。经过高温退火处理,薄膜的结晶性增强,表面粗糙度降低。当基底温度为300?C时,可以获得最佳的导电性能,100 nm ITO薄膜方阻低至68?/□;而当衬底温度升至500?C时,可见光的平均透过率最高,可达88.5%。结果显示,由于采用了高温工艺,在Mica上沉积的ITO薄膜光电性能相比于PET基底获得了极大的提高。(2)XRD和RHEED结果表明,AZO可以在Mica上岛状生长,形成外延单晶薄膜。在基底温度为200?C,氧气分压为0.5 Pa的条件下沉积的AZO薄膜具有最低的方块电阻的导电性能最好,100 nm AZO薄膜的方阻为21?/□;但氧气分压对薄膜的透光性影响较小,不同氧压下薄膜在可见光区的平均透射率均大于90%。由于在Mica衬底上制备的是AZO单晶外延薄膜,其导电性以及透光性较之前在Si(001),玻璃以及聚合物衬底上制备的AZO薄膜有较高的提升。(3)Au层厚度对于AZO/Au/AZO多层膜的光电性能具有决定性的影响,Au层最佳厚度为12 nm;顶层AZO膜薄对薄膜整体的表面粗糙度及透过率影响也十分明显;当其厚度分别为50 nm/12 nm/50 nm时,样品的方块电阻可低至1.4?/□,可见光平均透过率达到74.1%,品质因数为3.565×10-2?-1。(4)以Mica基透明导电材料制备的薄膜加热器具有升降温速率快,温度保持较稳定,循环稳定性好等优势,在高温柔性透明加热器领域具有良好的应用前景。初步以ITO/Mica为电极制备的钙钛矿太阳能电池效率可达9.87%,展示了一定的应用潜力。
[Abstract]:Flat display, thin film transistor and the rapid development of flexible wearable electronic devices such as optical / electrical parts, requires more and more high technology of transparent conductive material and optical properties and fatigue stability. Transparent conductive material usually contains two parts of a transparent substrate and a transparent conductive film, the most transparent conductive film is Sn:In203 oxide (ITO) thin film is widely, but its drawback is that the In belongs to the rare metal, expensive, and has a negative impact on the safety of.Al:ZnO and natural environment (AZO) thin film is oxide transparent material has been found, it has electrical and optical properties comparable to the ITO, is the more prominent advantages: low cost, non-toxic, preparation method and simple process. The AZO film is considered to have the potential to replace the ITO film.Oxide/Metal/ Oxide (OMO) metal clip Sandwich structure based on pure oxide films, with smaller thickness can achieve better performance. The photoelectric polymer substrate (e.g. PET, PEN) is currently the most widely used flexible transparent substrate. However, due to the drawbacks of high temperature and poor dimensional stability, hard transparent oxide thin film deposition in high quality polymer on the basement. Based on this, this paper presents a new type of flexible transparent substrate (Mica), mica which has high temperature resistance, low thermal expansion coefficient, low surface roughness, high transparency, to replace the polymer on a flexible substrate as a new generation of flexible transparent substrate. By using pulsed laser deposition a high performance ITO, AZO and AZO/Au/AZO transparent conductive film, research and analysis of film thickness, deposition temperature, oxygen partial pressure and process factors such as annealing temperature on film structure, surface morphology and optical Effect of electrical properties; optical and electrical properties of transparent conductive films Mica and PET substrate were compared. Using transparent conductive materials based on Mica as the electrode preparation and characterization of flexible thin film heater and flexible perovskite type solar cell for the two kinds of optical / electrical parts performance. The results are as follows: (1) experiment that has a great impact on Microstructure of annealing temperature on ITO thin film and photoelectric properties. After annealing treatment, the crystallinity of the films increased, the surface roughness decreases. When the substrate temperature is 300? C, can obtain the optimum conductivity properties of ITO thin films, 100 nm low resistance to 68? / /; when the substrate temperature to 500? C, the average visible light transmittance can reach the highest, 88.5%. results showed that due to the high temperature process, the photoelectric properties of ITO films deposited on Mica substrate compared to PET was greatly improved. (2) XRD And RHEED results showed that AZO can grow on Mica Island, the formation of epitaxial single crystal films. The substrate temperature is 200? C, oxygen partial pressure of the electrical conductivity of AZO thin film deposition conditions of 0.5 Pa has the lowest square resistance of the best resistance 100 nm AZO film is 21? / - but the oxygen; the partial pressure of light affects the film under different oxygen pressure is small, thin film in the visible light transmittance is greater than 90%. because the preparation on the Mica substrate is AZO epitaxial film, the conductivity and light transmittance than before in Si (001), glass and polymer substrates prepared AZO films are higher ascension. (3) has a decisive influence on the thickness of Au layer for AZO/Au/AZO multilayer optical properties, Au layer thickness is 12 nm; the top AZO thin film on the film surface roughness and transmittance of the overall effect is also very obvious; when the thickness is 50 nm/12 nm/50 NM When the sheet resistance of samples can be as low as 1.4? / /, the average visible transmittance reaches 74.1%, the quality factor is 3.565 x 10-2? -1. (4) to Mica based transparent conductive material prepared with thin film heater temperature rate, the temperature is stable, good cycle stability and other advantages, has the application good prospects in high temperature flexible transparent heater field. Preliminary ITO/Mica perovskite solar cell electrode preparation efficiency up to 9.87%, showing potential applications.

【学位授予单位】：深圳大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TB383.2;TM914.4

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