基于环境振动的光栅刻划机隔振平台的动力学研究

发布时间：2018-03-10 16:30

本文选题：Udwadia_Kalaba理论　切入点：离散化　出处：《合肥工业大学》2017年硕士论文　论文类型：学位论文

【摘要】：光栅刻划机的结构复杂,对工作环境要求严格,对各种环境振动因素的敏感度较高,很微小的振动也会对加工精度造成巨大的影响,因此隔绝这种有害的振动特别重要;本文研究了在各种环境振动因素下,光栅刻划机的微振动隔振平台的动力学问题,并且构建了隔振平台的固连式结构模型,对光栅刻划机的微振动隔振平台进行了动力学分析。(1)分析影响光栅刻划机隔振平台的环境微振动因素,对微振动的特点进行讨论,提出环境振动因素下隔振平台的模型。(2)介绍了一些环境振动隔振技术,对比了三种主要的隔振技术优缺点,以及各种隔振技术的设备等;根据光栅刻划机的隔振平台结构,将结构进行简化处理,建立了微振动隔振平台被动隔振的离散化模型,在此基础上,对比了两种微振动隔振平台结构,即分散结构和固连结构模型,根据输入的激励得到的响应,确定固连结构可以达到有效的减振。(3)在环境振动和被动隔振技术下,对等效的单质点双层隔振平台模型进行了振动分析,得知微振动隔振平台仅仅采用被动隔振装置,远远达不到设备所需的精度条件,因此提出了采用主被动隔振相互结合的混合隔振机制的固连结构式的微振动隔振平台。(4)基于Udwadia-Kalaba理论对光栅刻划机隔振平台进行动力学研究,在环境振动和混合隔振技术基础上,建立微振动隔振平台离散化模型,其单质点为双层隔振模型,最终提出了一种基于系统约束的U-K理论,建立了微振动隔振平台的数学模型,并通过MATLAB仿真得到其主动隔振的控制力。本文分析了影响微振动平台的环境因素,运用U-K理论对微振动隔振平台的固连结构进行了动力学分析,对光栅刻划机隔振设计具有重要的意义。
[Abstract]:The structure of the grating engraving machine is complex, the working environment is strict, the sensitivity to various environmental vibration factors is relatively high, and the tiny vibration will have a great impact on the machining accuracy, so it is particularly important to isolate this harmful vibration. In this paper, the dynamic problems of the micro vibration isolation platform of the grating engraving machine are studied under various environmental vibration factors, and the fixed structure model of the vibration isolation platform is constructed. The dynamic analysis of the microvibration isolation platform of the grating engraving machine is carried out. (1) the environmental micro-vibration factors affecting the vibration isolation platform of the grating engraving machine are analyzed, and the characteristics of the micro-vibration are discussed. This paper presents the model of vibration isolation platform under the environmental vibration factor. It introduces some environmental vibration isolation technologies, compares the advantages and disadvantages of three main isolation technologies, and the equipments of various isolation technologies, and draws the structure of the vibration isolation platform according to the grating engraving machine. The discrete model of passive vibration isolation of micro-vibration isolation platform is established by simplifying the structure. On the basis of this, two kinds of micro-vibration isolation platform structures, that is, decentralized structure and fixed structure model, are compared. According to the response of the input excitation, it is determined that the fixed structure can achieve effective vibration absorption. Under the environment vibration and passive vibration isolation technology, the vibration analysis of the equivalent single-mass point double-layer vibration isolation platform model is carried out. It is known that the microvibration isolation platform only adopts passive vibration isolator, which is far from reaching the precision condition required by the equipment. Therefore, a fixed structure micro-vibration isolation platform based on the combination of active and passive vibration isolation mechanism is proposed. Based on the Udwadia-Kalaba theory, the dynamic study of the vibration isolation platform of the grating engraving machine is carried out. Based on the environmental vibration and mixed vibration isolation technology, the dynamic analysis of the vibration isolation platform of the grating engraving machine is carried out, which is based on the environmental vibration and the mixed vibration isolation technology. The discrete model of micro-vibration isolation platform is established. The single point is two-layer vibration isolation model. Finally, a U-K theory based on system constraints is proposed, and the mathematical model of micro-vibration isolation platform is established. The control force of active vibration isolation is obtained by MATLAB simulation. The environmental factors affecting the micro-vibration platform are analyzed in this paper, and the dynamic analysis of the fixed structure of the micro-vibration isolation platform is carried out by using U-K theory. It is of great significance to the vibration isolation design of grating engraving machine.
【学位授予单位】：合肥工业大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TB535.1

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