高频角振动校准方法与技术研究

发布时间：2018-03-15 17:59

本文选题：角振动　切入点：激光干涉　出处：《北京理工大学》2014年博士论文　论文类型：学位论文

【摘要】：随着导航与制导技术的快速发展，对高频响惯性器件的动态性能评价及其量值准确提出了更高的要求，由于高频标准角振动激励发生器以及精密动态角度测量仪的技术实现难题，尚未形成国家级角振动计量标准装置，严重限制了惯性器件动态性能评价水平的提升，为提高角振动量值准确性、解决其量值统一和溯源问题、并能提供标准角振动量值复现装置，针对高频角振动校准方法与技术，开展本论文研究。本论文主要创新如下：从振动校准基本理论和方法出发，研究了角振动激励发生器和激光动态测角仪的基本原理，建立系统模型，重点分析了角振动激励发生器波形失真以及激光动态测角方法对校准不确定度的主要影响因素，提出并开展了两项关键技术研究：高频低失真大承载角振动激励发生器技术和高精度衍射光栅激光干涉动态测角技术。针对高频标准角振动激励发生器技术实现难题，根据振动台频响特性分析理论，对比分析了电机驱动方式和多种非电机驱动方式对角振动台实现的优缺点，，重点分析了角振动激励波形失真产生原因。选择杯式电磁驱动结构和框式电磁驱动结构进行了样机设计和实验验证，发明了框式电磁结构与轻质空心杯精密空气静压轴承一体化融合设计的结构，结合对动圈电气参数、磁场、运动部件固有频率的分析以及三角支撑恢复弹簧的设计，完成高频标准角振动台设计。针对高频微幅角振动绝对法测量技术难题，分析了精密激光干涉测量方法，进而提出了一种组合反射镜组的衍射光栅外差差动激光干涉动态角度测量方法、专门光电信号跳变稳定高效判别算法和正交光电信号非线性补偿方法，实现了0.02″的动态角位移量值复现精度。实验表明：采用上述方法和技术构建的高频角振动校准装置实现了在10Hz～550Hz频率范围和0.2rad/s2～1760rad/s2角加速度范围内，角速度波形失真度小于2%的性能指标，角加速度幅值灵敏度校准不确定度小于2%、相位延迟校准不确定度小于2o（k=2）。
[Abstract]:With the rapid development of navigation and guidance technology, a higher requirement is put forward for the dynamic performance evaluation and accurate value of high-frequency inertial devices. Due to the technical problems of high frequency standard angular vibration generator and precision dynamic angle measuring instrument, the national standard device for angle vibration measurement has not been formed, which seriously limits the improvement of dynamic performance evaluation level of inertial devices. In order to improve the accuracy of angular vibration, to solve the problem of unification and traceability of angular vibration, and to provide the standard angular vibration value reproduction device, this paper studies the calibration methods and techniques of high-frequency angular vibration. The main innovations of this thesis are as follows:. Based on the basic theory and method of vibration calibration, the basic principles of angular vibration excitation generator and laser dynamic angulometer are studied, and the system model is established. The main factors affecting the calibration uncertainty of the angular vibration excitation generator and the laser dynamic angle measuring method are analyzed in detail. Two key technologies are proposed and developed: high frequency and low distortion vibration generator with large bearing angle and high precision diffraction grating laser interferometry. According to the theory of frequency response characteristic analysis of vibration table, the advantages and disadvantages of actualization of diagonal vibration table with motor drive mode and non-motor drive mode are compared and analyzed according to the technical problem of high frequency standard angular vibration generator. The causes of distortion of angular vibration excitation waveform are analyzed emphatically. The prototype design and experimental verification of cup type electromagnetic drive structure and frame electromagnetic drive structure are carried out. The structure of the integration design of frame electromagnetic structure and light hollow cup precision air static bearing is invented, which combines the analysis of the electrical parameters of the moving ring, the magnetic field, the natural frequency of the moving parts and the design of the triangle support recovery spring. Complete the design of high frequency standard angle vibration table. Aiming at the technical problem of absolute measurement method of high-frequency micro-amplitude angular vibration, the precision laser interferometry method is analyzed, and a dynamic angle measurement method based on diffractive grating heterodyne laser interferometry is proposed. The special algorithm for judging the stability of photoelectric signal jump and the nonlinear compensation method for orthogonal photoelectric signal have realized the accuracy of 0.02 "dynamic angular displacement value reappearance. The experimental results show that the calibration device of high frequency angular vibration based on the above methods and techniques has achieved the performance index of angular velocity waveform distortion less than 2% in the frequency range of 10 Hz / 550Hz and in the range of 0.2radr / s / s 1760radr / s 2 angular acceleration. The calibration uncertainty of angular acceleration amplitude sensitivity is less than 2 and the uncertainty of phase delay calibration is less than 2og / kg.
【学位授予单位】：北京理工大学
【学位级别】：博士
【学位授予年份】：2014
【分类号】：TB534.2

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