基于气浮支承结构的主动减振系统研究

发布时间：2018-03-16 03:08

本文选题：主动气浮减振器　切入点：主被动混合减振系统　出处：《哈尔滨工业大学》2014年硕士论文　论文类型：学位论文

【摘要】：随着精密制造和加工、精密光电装备以及航空航天等相关领域的发展，人们对系统结构的稳定性和测量加工的精度提出更严格和苛刻的要求。而限制结构稳定性和系统精度提高的关键因素就是振动干扰的影响，特别是一些低频微振动的影响。低频微振动的影响已经成为制约很多尖端科技发展的瓶颈。针对这种情况，本课题提出了一种基于气浮支承结构的主动减振系统（本文中简称为主动气浮减振系统）。该系统可以广泛应用于精密加工车床，高精度测量系统和微电子加工设备等对振动敏感的尖端设备和系统。该主动气浮减振系统属于一种主被动混合减振系统。其中被动气浮结构主要由空气弹簧和静压气浮两部分组成，两者相互配合可以实现系统的非接触式支承。这种结构是一种刚度极小的被动减振结构，可以高效地抑制来自于环境的干扰。但这种结构也存在一些问题：系统的减振效果往往受结构制约，且对于负载本身产生的振动干扰抑制能力较弱。针对这种情况，该主动气浮减振系统在被动减振结构抑制环境振动干扰的基础上设计基于音圈电机的主动减振单元，进一步提升系统减振性能。本课题首先系统地介绍了主动气浮减振器的结构组成和功能。利用理论推导的方法，分析主动气浮减振器的结构特点，并建立减振器多自由度的模型。其次，根据主动气浮减振器结构特点和功能要求，为其定位系统和减振系统分别设计合适的控制方法。其中定位系统选用气路单元初步定位和电机定位单元精确定位相配合的控制方法；而减振系统则使用了主动阻尼和负刚度复合型控制方法。再次，在该主动气浮减振系统在光刻机系统中的应用背景下，研究如何联合使用多个减振器实现系统多自由度的减振控制目的，并针对多自由度间耦合情况设计了适用于六自由度减振控制的算法和控制系统。最后，在光刻机系统中搭建实验平台，进行主被动减振系统对比实验和系统多自由度减振性能测试。实验结果表明：系统加入主动之后，减振性能得到明显加强，其中系统时域振动速度幅值和固有频率分别减低了约42%和16%。另一方面，实验证明该主动气浮减振系统能够有效抑制系统多个自由度的振动干扰，特别是高频段（10Hz以上）的振动干扰，其抑制效果甚至可以达到80%以上。
[Abstract]:With the development of precision manufacturing and processing, precision optoelectronic equipment, aerospace and other related fields, The stability of the system structure and the precision of measurement and processing are required more strictly and harshly. The key factor that limits the stability of the structure and the improvement of the precision of the system is the effect of vibration interference. Especially the influence of some low-frequency micro-vibration. The low-frequency micro-vibration has become the bottleneck restricting the development of many cutting-edge science and technology. In this paper, an active vibration absorption system based on air bearing structure is proposed. The system can be widely used in precision machining lathe. High-precision measurement systems and micro-electronic processing equipment and so on sensitive to vibration-sensitive sophisticated equipment and systems. The active air flotation damping system belongs to an active and passive hybrid vibration absorption system, in which the passive air floating structure is mainly composed of two parts: air spring and static pressure air floatation. This kind of structure is a kind of passive vibration absorption structure with minimal stiffness. It can restrain the disturbance from the environment efficiently. But there are some problems in this kind of structure: the damping effect of the system is often restricted by the structure, and the ability to suppress the vibration disturbance caused by the load itself is weak. Based on the passive vibration absorption structure, the active vibration reduction unit based on the voice coil motor is designed to further improve the performance of the system. In this paper, the structure and function of the active air flotation damper are systematically introduced. The structural characteristics of the active air flotation damper are analyzed by using the method of theoretical derivation, and the model of multiple degrees of freedom of the shock absorber is established. According to the structural characteristics and functional requirements of active air flotation shock absorber, Suitable control methods are designed for the positioning system and the damping system respectively, in which the control method of the initial positioning of the gas path unit and the precise positioning of the motor positioning unit is used in the positioning system. The active damping and negative stiffness composite control methods are used in the vibration control system. Thirdly, in the background of the application of the active air flotation vibration control system in the lithography system, This paper studies how to use multiple vibration absorbers to achieve the purpose of vibration control of multi-degree-of-freedom system, and designs an algorithm and control system suitable for six-degree-of-freedom vibration reduction control according to the coupling between multi-degrees of freedom. Finally, the experiment platform is built in the lithography system, and the contrast experiment of the active and passive vibration absorption system and the vibration absorption performance test of the system with multiple degrees of freedom are carried out. The experimental results show that the vibration absorption performance of the system is obviously enhanced after the active addition of the system. The amplitude and natural frequency of the time-domain vibration velocity are reduced by about 42% and 16 respectively. On the other hand, the experimental results show that the active air-floatation damping system can effectively suppress the vibration interference of the system with multiple degrees of freedom. Especially in the high frequency band (above 10 Hz), the suppression effect of vibration interference can even reach more than 80%.
【学位授予单位】：哈尔滨工业大学
【学位级别】：硕士
【学位授予年份】：2014
【分类号】：TH703.3;TB535.1

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