基于数值计算方法的双螺杆真空泵气体输运过程研究

发布时间：2018-03-20 02:36

本文选题：螺杆真空泵　切入点：泄漏　出处：《真空科学与技术学报》2017年04期 　论文类型：期刊论文

【摘要】：基于双螺杆真空泵气体输运的特点,将泵腔内级间的泄漏通道简化为不同类型的真空管路,采用相邻级间的平均压强确定不同压强下级间泄漏气体的流态,计算得到级间泄漏的质量流量。根据质量守恒定律,建立了双螺杆真空泵气体输运过程的数学模型。以渐开线型端面的等螺距螺杆真空泵为研究对象,计算分析了泵从大气压到极限真空的整个抽气过程。对不同入口压强下的级间泄漏量与抽速进行了研究,研究表明:不同的泄漏通道对级间泄漏的影响有所不同。在排气端,齿顶圆与泵腔内壁之间的泄漏通道对级间泄漏的影响较大;在吸气端,两转子齿顶齿根面之间、斜齿面之间以及凹齿面之间这三种泄漏通道对级间泄漏的影响较大。
[Abstract]:Based on the characteristics of gas transport in twin-screw vacuum pump, the leakage channel between stages in the pump cavity is simplified into different types of vacuum pipe, and the flow pattern of leakage gas between different pressures is determined by the average pressure between adjacent stages. According to the law of conservation of mass, the mathematical model of gas transport process of twin-screw vacuum pump is established. The involute screw vacuum pump with equal pitch is taken as the object of study. The whole pumping process from atmospheric pressure to limiting vacuum is calculated and analyzed. The inter-stage leakage and pumping speed at different inlet pressures are studied. The results show that the effects of different leakage channels on the leakage between stages are different. The leakage channel between the top tooth circle and the inner wall of the pump cavity has a great influence on the leakage between stages, and the three leakage channels have a great influence on the leakage between stages at the suction end, between the root surfaces of the two rotors' top teeth, between the oblique tooth surfaces and between the concave tooth surfaces.
【作者单位】：合肥工业大学真空科学技术与装备研究所;淄博市螺杆真空泵工程中心;安徽农业大学理学院;
【基金】：企业技术研发项目(No.102-432836) 中央高校基本科研业务经费项目(No.JZ2015HGBZ0465) 中国博士后科学基金面上项目(No.2016M590041)
【分类号】：TB752

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