积累氦质谱组合检测中防止漏检的方法

发布时间：2018-04-17 23:07

  本文选题：密封性检测 + 积累氦质谱　； 参考：《中国电子科学研究院学报》2016年04期

【摘要】：作者在积累氦质谱组合检测中发现存在粗漏漏检现象,美国宇航局2013年2014年的研究报告揭示,各种组合检测复测中均存在粗漏细漏漏检现象。文章对积累氦质谱组合检测和氩粗漏氦细漏组合检测的粗漏检测,提出了确定最长粗漏检测时间的方法;对这两种组合检测和氦质谱检测的细漏检测,综合给出了定量确定和拓展细漏检测最长候检时间的方法,论证了压氦压力不应小于2倍的大气压力,提出了确定预充氦法和预充氦氩法最小候检时间的方法,提出了确定最长细漏检测时间的方法,从而可减少和防止粗漏和细漏漏检;并通过对美国宇航局报告中实例的分析,验证了以上方法的有效性。同时指出漏孔堵塞是造成漏检的原因之一,但不是形成微型元器件高比率漏检的主要原因。
[Abstract]:The authors found the phenomenon of coarse leak leakage in the combined detection of accumulative helium mass spectrometry. The 2013 NASA research report revealed that there was a phenomenon of coarse leak leakage in the repeated testing of all kinds of combination tests.In this paper, the method of determining the maximum coarse leak detection time is proposed for the combined detection of accumulated helium mass spectrometry and argon coarse leak helium thin leak detection, and the fine leak detection for these two kinds of combined detection and helium mass spectrometry detection is given.The method of quantifying and extending the maximum waiting time for fine leak detection is given, the atmospheric pressure of pressure helium pressure should not be less than 2 times, and the method of determining the minimum waiting time of precharge helium method and precharge helium argon method is put forward.A method to determine the maximum fine leak detection time is proposed, which can reduce and prevent coarse leakage and fine leak detection, and the effectiveness of the above method is verified by the analysis of examples in NASA report.At the same time, it is pointed out that leak blocking is one of the causes of leak detection, but it is not the main cause of high ratio leakage of micro components.
【作者单位】： 北京市科通电子继电器总厂有限公司;
【分类号】：TB774.3
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本文编号：1765694