高品质钼靶材低压等离子喷涂成形技术研究

发布时间：2018-04-19 19:13

本文选题：低压等离子喷涂 + 钼靶材　；参考：《粉末冶金技术》2017年04期

【摘要】：采用低压等离子喷涂成形技术制备了片状及回转体钼靶材,研究了钼靶材孔隙率、氧含量、微观结构、显微硬度及拉伸强度等性能,开展了片状钼靶材的磁控溅射镀膜研究。研究结果表明:低压等离子喷涂成形钼靶材为典型的定向凝固柱状晶层片结构,层片界面结合紧密,孔隙率约1.1%、氧质量分数为0.18%,显微硬度为HV0.025 361.8,抗拉强度达到373.2 MPa,各项指标均明显优于大气等离子喷涂成形钼制品。低压等离子喷涂成形片状钼靶材可磁控溅射沉积出平整、致密、连续的钼薄膜,镀膜厚度约700 nm,X射线衍射谱线表明钼薄膜为体心立方结构,沿(110)方向择优生长。磁控溅射离子的均匀轰击导致钼靶材表面快速溅射及均匀减薄,溅射表面及截面较为平整光滑,溅射凹坑均为纳米级。
[Abstract]:Sheet and rotary molybdenum targets were prepared by low pressure plasma spraying. The porosity, oxygen content, microstructure, microhardness and tensile strength of molybdenum targets were studied. The results show that the molybdenum target formed by low pressure plasma spraying is a typical directionally solidified columnar lamellar structure, and the interface of the laminates is close. The porosity is about 1.1%, the oxygen content is 0.18, the microhardness is HV0.025 361.8, the tensile strength is up to 373.2 MPA, and each index is obviously superior to that of the molybdenum products formed by atmospheric plasma spraying. The molybdenum films formed by low pressure plasma spraying can be deposited by magnetron sputtering. The thickness of the films is about 700 nm ~ (-1) X ray diffraction (XRD), which indicates that the molybdenum films are body-centered cubic structure and the preferred growth direction is along the direction of (110). The surface of molybdenum target is rapidly sputtering and thinning due to the uniform bombardment of magnetron sputtering ions. The sputtering surface and section are smooth and smooth. The sputtering pits are nano-sized.
【作者单位】：湖南科技大学高温耐磨材料及制备技术湖南省国防科技重点实验室;湖南科技大学难加工材料高效精密加工技术湖南省重点实验室;湖南省冶金材料研究院先进涂层技术研究所;中南大学粉末冶金国家重点实验室;华南理工大学国家金属材料近净成形工程技术研究中心;广东省材料与加工研究所广东省金属强韧化技术与应用重点实验室;
【基金】：湖南省自然科学湘潭联合基金资助项目(2016JJ5029) 湖南省军民融合产业发展专项资金资助项目(B116J1) 中国博士后科学基金第53批面上资助项目(2013M531804);中国博士后科学基金第7批特别资助项目(2014T70784) 武汉理工大学材料复合新技术国家重点实验室开放基金资助项目(2015-KF-14) 华中科技大学材料成形与模具技术国家重点实验室开放基金资助项目(P2016-20) 中南大学粉末冶金国家重点实验室开放基金资助项目(2014-SKL-13) 华南理工大学国家金属材料近净成形工程技术研究中心开放基金资助项目(2016003) 广东省金属强韧化技术与应用重点实验室开放基金资助项目(GKL201610) 湖南省教育厅科学研究一般项目资助项目(13C314)
【分类号】：TB383.2;TG146.412

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