多层复合透明导电薄膜研究进展

发布时间：2018-04-29 09:49

本文选题：透明导电薄膜 + 介质/金属/介质　；参考：《科学通报》2017年05期

【摘要】：透明导电薄膜(TCF)兼具良好的导电性和透光性,已作为电极被广泛应用于光电器件领域.目前普遍使用的透明电极主要是铟锡氧化物(ITO)和掺铝氧化锌等透明导电氧化物(TCO)薄膜,但由于ITO的生产需要稀缺原材料铟,而其他TCO薄膜的导电性和可见光透明性尚需提高,并且由于氧化物材料固有的脆性,TCO薄膜的柔性较差,不能完全满足当前柔性电子器件的发展需求.因而,对于具有优异性能的无铟、柔性TCF的研究近年来受到研究者的广泛关注.基于介质/金属/介质结构的多层复合TCF同时具有高的电导率、透光性以及良好的机械柔性,可以满足目前柔性电子器件的应用需求,而且其还具有功函数可通过选择介质层材料调节、可利用连续的卷对卷技术室温下在廉价塑料衬底上沉积等独特优势,因而更具实用价值.本文简要综述了近几年基于介质/金属/介质结构的多层复合TCF的研究工作,首先分析了其透光率和面电阻对各层材料种类及厚度的依赖关系,然后介绍了多层复合TCF的结构类型,接着讨论了改善其综合光电性能的技术,最后分析了其在光电器件领域应用时应考虑的其他重要性质.
[Abstract]:Transparent conductive thin films (TCFs) have been widely used as electrodes in the field of optoelectronic devices because of their good conductivity and transmittance. At present, the main transparent electrodes used are indium tin oxide (ITO) and transparent conductive oxide (TCO) films, such as zinc oxide doped aluminum. However, due to the production of ITO, indium is a scarce raw material, while the conductivity and visible transparency of other TCO films need to be improved. Because of the poor flexibility of the brittle TCO thin films, the oxide materials can not fully meet the development needs of the current flexible electronic devices. Therefore, the research of flexible TCF without indium with excellent performance has been paid more and more attention in recent years. Multilayer composite TCF based on dielectric / metal / dielectric structure has high conductivity, light transmittance and good mechanical flexibility, which can meet the application needs of flexible electronic devices. Moreover, it has the unique advantages that the work function can be adjusted by selecting the dielectric layer material, and can be deposited on the cheap plastic substrate at room temperature by continuous winding technology, so it has more practical value. In this paper, the research work of multilayer composite TCF based on dielectric / metal / dielectric structure in recent years is briefly reviewed. Firstly, the dependence of transmittance and surface resistance on the type and thickness of each layer material is analyzed. Then, the structure types of multilayer composite TCF are introduced, and the techniques to improve its integrated photoelectric performance are discussed. Finally, other important properties that should be considered in the application of multilayer composite TCF in optoelectronic devices are analyzed.
【作者单位】：河北大学物理科学与技术学院河北省光电信息材料重点实验室;
【基金】：国家自然科学基金(61504036) 河北省重点基础研究计划(12963930D) 河北省高层次人才项目(B2014003020) 河北大学博士启动基金(2012-235)资助
【分类号】：TB383.2

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