内压缩干式螺杆真空泵关键技术研究

发布时间：2018-05-08 09:46

本文选题：螺杆真空泵 + 转子型线　；参考：《浙江理工大学》2016年博士论文

【摘要】：干式螺杆真空泵是一种真空获得设备。近年来,真空泵的发展愈来愈受到应用场合的限制,传统的真空系统无法满足清洁无油及耐腐蚀的要求,逐渐被无油清洁的真空获得系统所代替,干式螺杆真空泵就属于这类无油、干式运行的真空泵,其中内压缩螺杆真空泵可以大幅降低驱动能源,随着我国对节能环保要求的提升,能够实现干式运行和节能的内压缩干式螺杆真空泵已成为发展趋势。螺杆真空泵属于非接触型干式泵,核心元件是一对带啮合间隙的螺杆转子,成对螺杆性能直接影响整台螺杆真空泵的工作性能和竞争力,目前缺乏螺杆齿形设计方法和可靠的真空泵工作特性计算方法,因此对成对螺杆结构、真空泵的工作特性进行理论和试验研究,为干式螺杆真空泵的研发提供理论基础和设计依据,具有重要的实用价值和理论意义。本论文首先在积极借鉴、吸收相关理论和研究成果的基础上,展开了螺杆真空泵螺杆齿形和工作特性的研究,提出了密封型螺杆转子端面型线设计方法、三段式渐变和自平衡内压缩螺杆转子齿形的设计方法;然后,进行了螺杆真空泵的通道模型研究,遵循质量守恒定律,提出了基于孔径流量系数法的螺杆真空泵的工作特性计算方法,并展开了螺杆真空泵工作特性仿真与试验方法研究;最后,结合螺杆真空泵的仿真与试验结果,设计与开发了少级数内压缩螺杆真空泵。论文主要的研究内容和结果如下:第一章,阐述了论文的研究背景、目的和意义;综述了干式螺杆真空泵螺杆转子齿形、真空泵工作特性国内外研究现状、存在的问题和发展趋势,提出了论文的研究思路和主要研究内容。第二章,分析了现有最常用的四种螺杆端面型线,揭示了其密封特性及优缺点;建立了螺杆转子共轭端面型线的设计方法,可针对任意曲线构成的双螺杆转子型线进行设计,对现有型线不足展开分析与改进;根据螺杆端面型线设计准则,建立了严格密封型螺杆型线,为建立成对螺杆啮合模型以及内压缩螺杆奠定基础。第三章,揭示了现有各类内部压缩螺杆真空泵工作特性;提出了三段式平滑过渡的内压缩螺杆转子设计方法,设计了一种少级数、三段式内部压缩体积渐进式变化的螺杆转子;构建了一种自平衡的内部压缩螺杆转子模型,建立了自平衡螺杆转子优化设计模型;为螺杆真空泵通道类型比较分析和少级数内压缩螺杆真空泵研究奠定基础。第四章,基于基本假设和质量守恒定律,提出了等熵流动的孔径流量系数法计算质量流,建立了螺杆真空泵通道质量流计算模型;构建了螺杆真空泵通道模型,建立了工作型腔室的连接拓扑关系,提出了四种通道间隙最小缝隙面积计算方法;构建了离散化、多级螺杆真空泵密封型漩涡模型,建立了稳定状态下,多级螺杆真空泵工作特性计算模型。第五章,依据螺杆真空泵工作特性计算模型,计算了不同压力下的抽气速率和对应消耗的功率;依据测试标准,制定了螺杆真空泵工作特性测试方案,并根据测试方案测试了真空泵的工作特性;比较发现仿真值与工程值比较吻合,达到预期效果。第六章,针对影响工作特性的因素,设计与开发了三段渐变式和自平衡螺杆内压缩真空泵,分别仿真和测试并绘制了两种螺杆真空泵的抽速、消耗功率与入口压力的曲线。两种泵抽气效率达85%以上,在10000Pa以下工作压力,与等抽速等螺距螺杆真空泵相比能效节省达40%以上,其中三段渐变式螺杆真空泵在全压力范围内,能效节省33%以上。第七章,总结了全文的研究工作,提出了进一步研究工作的内容。
[Abstract]:Dry screw vacuum pump is a kind of vacuum acquisition equipment. In recent years, the development of vacuum pump has been more and more restricted by the application situation. The traditional vacuum system can not meet the requirements of clean and non oil and corrosion resistance. It is gradually replaced by the vacuum obtaining system without oil cleaning. The dry type vacuum pump belongs to this kind of oil free and dry operation vacuum. With the internal compression screw vacuum pump, the internal compression screw vacuum pump can greatly reduce the driving energy. With the promotion of energy saving and environmental protection in China, the dry type internal compression dry screw vacuum pump has become the development trend. The screw vacuum pump belongs to the non-contact dry type pump, the core element is a pair of screw rotors with meshing clearance. The screw performance directly affects the performance and competitiveness of the whole screw vacuum pump. At present, there is a lack of screw tooth shape design method and a reliable calculation method of the working characteristics of vacuum pump. Therefore, the working characteristics of the pair screw structure and vacuum pump are studied theoretically and experimentally, which provide the theoretical basis and design basis for the development of the dry screw vacuum pump. According to it, it has important practical value and theoretical significance. In this paper, the tooth shape and working characteristics of screw vacuum pump are studied on the basis of relevant theories and research achievements, and the design method of the end face line of the sealed screw rotor is put forward, and the three segment type gradient and self balance internal compression of the screw rotor have been put forward. Then, the passage model of the screw vacuum pump is studied and the law of mass conservation is followed. The calculation method of the working characteristics of the screw vacuum pump based on the pore size flow coefficient method is put forward, and the simulation and test method of the working characteristics of the screw vacuum pump are carried out, and the simulation and test results of the screw vacuum pump are designed and the design is designed. The main contents and results of this paper are as follows: in Chapter 1, the research background, purpose and significance of the paper are expounded, the research status of the screw rotor tooth shape of the dry screw vacuum pump, the current research status of the vacuum pump working characteristics at home and abroad, the existing problems and the development trend are discussed, and the research ideas of the paper are put forward. And the main research contents. In the second chapter, the most commonly used four kinds of screw end face lines are analyzed, and their sealing characteristics and advantages and disadvantages are revealed. The design method of the conjugate end profile of the screw rotor is established, which can be designed for the double screw rotor profile of any curve. The design criterion of face type line has established a strictly sealed screw type line, which lays the foundation for establishing the pair screw meshing model and internal compression screw. In the third chapter, the working characteristics of the existing internal compression screw vacuum pumps are revealed, and the design method of the internal compression screw rotor with three stages smooth transition is put forward, and a series of few series and three stages are designed. The internal compression volume progressive change screw rotor, a self balanced internal compression screw rotor model is constructed, and the optimal design model of self balancing screw rotor is established. The foundation is laid for the comparison analysis of the channel type of the screw vacuum pump and the research of the small series internal compression screw vacuum pump. The fourth chapter is based on the basic hypothesis and the quality conservation. Law, an isentropic flow coefficient method is proposed to calculate the mass flow, the mass flow calculation model of the screw vacuum pump channel is set up, the model of the screw vacuum pump channel is built, the connection topology of the working chamber is established, and the calculation method of the minimum gap area of the gap between four channels is put forward, and the discrete and multistage screw vacuum pump is constructed. The model of the working characteristics of the multistage screw vacuum pump in the stable state is established. The fifth chapter, according to the calculation model of the working characteristics of the screw vacuum pump, calculates the gas pumping rate and the corresponding consumption power under different pressure. According to the test standard, the testing scheme of the working characteristics of the screw vacuum pump is formulated and the test party is based on the test side. The case tests the working characteristics of the vacuum pump. The comparison shows that the simulation value is in agreement with the engineering value and achieves the expected effect. In the sixth chapter, three sections of the progressive and self balanced internal compression vacuum pumps are designed and developed for the factors affecting the working characteristics. The pumping speed, the power consumption and the input of the two kinds of screw vacuum pumps are simulated and tested respectively. The curve of the pressure of the two kinds of pump is more than 85%, the working pressure below 10000Pa is more than 40% compared with the equal pumping speed and other screw vacuum pumps. Among them, the energy efficiency is saved by more than 33%. In the full pressure range, the energy efficiency is more than 33%. The research work of the full text is summarized, and the further research work is put forward. The content of the work.

【学位授予单位】：浙江理工大学
【学位级别】：博士
【学位授予年份】：2016
【分类号】：TB752

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