超声振动辅助激光退火对FTO薄膜光电性能的影响

发布时间：2018-05-18 11:57

本文选题：掺氟二氧化锡(FTO) + 超声振动　；参考：《无机材料学报》2017年10期

【摘要】：在激光退火处理掺氟二氧化锡(FTO)透明导电薄膜过程中引入超声振动,研究了超声振动辅助激光退火对FTO薄膜晶体结构、表面形貌和光电性能的影响。结果表明:与未施加超声振动时相比,该方法可使薄膜上下位移而引起激光聚焦状态发生连续变化,由此保证薄膜处于最佳退火范围内,同时还可使薄膜表面激光熔融区域的颗粒被振动分散,由此抑制颗粒团聚,提高颗粒分布的均匀性和致密度,最终有效地改善薄膜的光电性能。当振动功率为300 W时,薄膜表面结构最为均匀、致密和平整,此时光电性能达到最佳,它在400~800 nm波段的平均透光率为84.7%,方块电阻为9.0?/。
[Abstract]:The effect of ultrasonic vibration on the crystal structure, surface morphology and optoelectronic properties of FTO thin films was studied. The results show that the laser focusing state can be continuously changed by this method compared with those without ultrasonic vibration, which ensures that the film is in the optimal annealing range. At the same time, the particles in the laser melting region on the film surface can be vibrated and dispersed, which can restrain the particle agglomeration, improve the uniformity and density of the particle distribution, and finally improve the photoelectric properties of the film effectively. When the vibration power is 300 W, the surface structure of the thin film is the most uniform, compact and smooth, and the optoelectronic performance is the best. The average transmittance of the film is 84.7 and the square resistance is 9.0% at 800 nm band.
【作者单位】：江苏大学机械工程学院;江苏大学光子制造科学技术中心江苏省重点实验室;江苏大学材料科学与工程学院;
【基金】：国家973计划(2011CB013004) 国家自然科学基金(61405078) 江苏省自然科学基金(BK20140567) 江苏省重点研发计划(BE2015037) 江苏省高校自然科学研究项目(11KJA460003,14KJB430008) 江苏省博士后科研资助计划项目(1402090B,1601008B) 江苏省“六大人才高峰”项目(2013-ZBZZ-025)~~
【分类号】：TB383.2

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