基于AAO的标准漏孔制作及其性能研究

发布时间：2018-05-28 19:27

本文选题：标准漏孔 + 阳极多孔氧化铝　；参考：《合肥工业大学》2017年硕士论文

【摘要】：标准漏孔是真空计量技术的标尺,它的性能直接影响着真空测量和真空检漏结果的准确性。目前,常用的通道型标准漏孔存在着形状尺寸不可控、漏率不确定、漏孔中气体多处于复杂过渡流等问题,这些问题的存在导致无法对检漏仪和真空计进行准确的标定和校准。针对传统标准漏孔存在的问题,本文提出了利用阳极多孔氧化铝模板(anodic aluminum oxide,AAO)结合掩模辅助镀膜方法制备新型分子流标准漏孔的方案。AAO是微纳加工中常用的一种纳米级多孔材料,其中单个孔的直径在100nm以下,本文通过掩模辅助镀膜方法对AAO进行了二次镀膜处理,并利用光学显微镜对镀膜结果进行了观察,实验结果表明通过采用不同尺寸的掩模板可以制备出具有不同有效面积即不同通道数目的AAO。然后,我们利用自行设计搭建的差压法漏孔校准装置,以氦气(He)、氮气(N2)、氩气(Ar)为实验气体对镀膜后的AAO封装形成的标准漏孔的漏率和流导进行了测量。实验结果表明:(1)对于不同有效面积封装形成的漏孔,漏孔流导与AAO的有效面积成正比;(2)对于特定漏孔,在大气压下漏孔中气体始终处于完全分子流状态,即漏孔流导与前级压强无关,在大气压下为一常数;漏孔流导与所用实验气体质量方根的倒数成正比。本文所提出的基于AAO的完全分子流标准漏孔具有制作成本低廉、制作方法简单、压强适用范围广(最高压强可达100k Pa)、漏孔流导可控、漏孔对于不同种类气体的流导具有可预测性等优点。
[Abstract]:The standard leak hole is the scale of vacuum metering technology, and its performance directly affects the accuracy of vacuum measurement and vacuum leak detection. At present, there are many problems such as uncontrollable shape and size, uncertain leakage rate and complex transition flow of gas in the common channel type standard hole. These problems make it impossible to calibrate and calibrate the leak detector and vacuum gauge accurately. Aiming at the problems existing in the traditional standard holes, this paper presents a new type of molecular flow standard porous material, which is prepared by anodic aluminum oxide-AAO-anodic aluminum process and mask assisted coating method. AAO is a kind of nanoscale porous material commonly used in micro-nano machining. The diameter of single hole is below 100nm. In this paper, the secondary coating treatment of AAO was carried out by mask assisted coating method, and the results of coating were observed by optical microscope. The experimental results show that AAOs with different effective area or different channel number can be prepared by using different size mask. Then, using the self-designed differential pressure leak calibration device, the leakage rate and flow conductance of the standard leak formed by AAO encapsulation after coating were measured by using helium gas, nitrogen N _ 2N _ 2N _ 2N _ 2 and ar _ (2) as experimental gases. The experimental results show that for the holes encapsulated in different effective areas, the leakage conductance is proportional to the effective area of AAO. For a particular leak, the gas in the hole is always in the state of full molecular flow at atmospheric pressure. The leakage flow conductance is a constant at atmospheric pressure and is proportional to the reciprocal of the mass square root of the experimental gas used. In this paper, the standard hole of full molecular flow based on AAO has the advantages of low cost, simple fabrication method and wide range of pressure application (the maximum pressure can be up to 100kPa, and the flow conductance of the leak hole can be controlled. Leak holes have the advantages of predictability for the flow conductance of different gases.
【学位授予单位】：合肥工业大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TB774

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