ZnO:Cd纳米棒薄膜的制备及其光学氢敏性质研究

发布时间：2018-06-02 09:11

  本文选题：ZnO + Cd　； 参考：《功能材料》2017年05期

【摘要】：采用磁控溅射法在透明玻璃基底上制备50nm厚的ZnO种子层,利用水热法在ZnO种子层上生长厚度大约为1 000nm左右的ZnO:Cd纳米棒薄膜,通过SEM,XRD对其形态和晶体结构进行分析。结果表明:该薄膜是由沿C轴方向生长,呈六角纤锌矿结构的ZnO:Cd纳米棒阵列组成,并研究了薄膜型光学气敏传感器对氢气的光学敏感特性,结果表明:当工作温度为室温时,ZnO:Cd纳米棒薄膜器件对浓度为500×10~(-6)的氢气表现出明显的光学敏感特性,且具有良好的可重复性。
[Abstract]:50nm thick ZnO seed layer was prepared on transparent glass substrate by magnetron sputtering. ZnO:Cd nanorod thin films with about 1 000nm thickness were grown on ZnO seed layer by hydrothermal method. The morphology and crystal structure of ZnO:Cd nanorods were analyzed by SEM. The results show that the film is composed of a hexagonal wurtzite ZnO:Cd nanorod array grown along the C-axis. The optical sensitivity of the thin film optical gas sensor to hydrogen is studied. The results show that ZnO: CD nanorod thin film devices exhibit obvious optical sensitivity and good reproducibility to hydrogen with a concentration of 500 脳 10 ~ (-1) ~ (-6) at room temperature.
【作者单位】： 重庆师范大学功能材料重庆市高校重点实验室;
【基金】：重庆师范大学博士启动基金资助项目(10XLB001)
【分类号】：TB383.2
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本文编号：1968225