旋片—罗茨复合泵的开发设计及性能研究

发布时间：2018-06-17 06:23

本文选题：复合泵 + 开发设计　；参考：《东北大学》2014年硕士论文

【摘要】：罗茨一旋片泵机组是低、中真空的常用获得设备,也是高真空、超高真空泵的常用前级获得设备。但旋片—罗茨泵真空机组仍有体积大、集成度低、消耗功率高、组装复杂、使用元件多等缺点。本课题来源于浙江飞越机电有限公司的旋片一罗茨复合泵专利的设想,开发设计一种全新的复合泵。本复合泵可替代抽速为150L/s的罗茨—旋片泵机组,与机组相比,复合泵具有体积小,集成度高,消耗功率低,使用元件少等优点。本复合泵工程实用性强,具有明显的市场优势,前景广阔。本文的主要研究工作如下：(1)基于浙江飞越机电有限公司的复合泵专利设想设计了全新的旋片—罗茨复合泵,包括泵的所有零部件的设计和选型,利用Solid Works软件建立了初代样机模型。(2)基于有限元理论,利用ANSYS Workbench12.0软件对复合泵传动部件进行了强度分析。(3)对样机关键结构进行了优化,包括转子、传动部件及流道结构等。(4)对复合泵样机的主要性能参数进行了计算和理论分析并与罗茨—旋片泵机组的相应参数进行了对比分析,复台泵的各项性能优于机组。(5)对复合泵样机的容积效率、最大零流量压缩比等进行了计算和理论分析,确定了旋片—罗茨复合泵的适用范围。主要结论如下：(1)本课题实现了旋片—罗茨复合泵设想从无到有的过程,建立了初代虚拟样机,从强度分析可以确定传动部件所受应力和变形量很小,机械性能较好,对初代机进行的结构优化形式为其它机械真空泵的结构优化设计提供了参考,为该产品的设计开发奠定了良好的基础。(2)由旋片—罗茨复合泵的主要性能参数可以得到：与罗茨—旋片泵机组相比,复合泵性能优于机组并具有明显的市场优势,后者集成度高、占用空间小、使用元件少、消耗功率低,为复合泵的实际生产、应用及推广提供了有力的数据支持。(3)旋片—罗茨复合泵的容积效率随着入口气体压强的降低而升高,适用于低、中真空系统中,或作为前级泵在中、高真空范围内使用。(4)被抽气体的分子量越小、温度越高,旋片—罗茨复合泵的最大零流量压缩比越小,不适用于在被抽气体的分子量很小或温度很高的工况下使用。
[Abstract]:Roots-vane pump unit is a common equipment for obtaining low and medium vacuum, as well as advanced equipment for high vacuum and ultra-high vacuum pump. However, the vacuum unit of rotary vane-Roots pump still has many disadvantages, such as large volume, low integration, high power consumption, complex assembly and many components. This subject comes from Zhejiang overflying Electromechanical Co., Ltd.'s idea of patent of rotary vane-Roots compound pump, developing and designing a new kind of compound pump. The compound pump can replace the Roots / rotary vane pump unit with 150 L / s pumping speed. Compared with the unit, the compound pump has the advantages of small volume, high integration, low power consumption and less components. The complex pump project has strong practicability, obvious market advantages and broad prospects. The main research work of this paper is as follows: (1) based on the patent conception of the composite pump of Zhejiang overflying Electromechanical Co., Ltd., a new rotary vane Roots compound pump is designed, including the design and selection of all parts of the pump. Based on finite element theory, using ANSYS Workbench 12.0 software to analyze the strength of driving parts of composite pump, the key structure of the prototype is optimized, including the rotor, the key structure of the prototype is established by using solid works software, which is based on the finite element theory, and the software ANSYS Workbench 12.0 is used to analyze the strength of the driving parts of the composite pump. The main performance parameters of the composite pump prototype are calculated and theoretically analyzed, and compared with the corresponding parameters of the Roots rotary vane pump unit. The performance of compound pump is better than that of unit. 5) the volume efficiency and the maximum zero flow compression ratio of composite pump prototype are calculated and analyzed theoretically, and the applicable range of rotary vane-Roots compound pump is determined. The main conclusions are as follows: (1) in this paper, the idea of rotary vane-Roots compound pump is realized, and the initial virtual prototype is established. From the strength analysis, it can be concluded that the stress and deformation of the transmission parts are very small, and the mechanical properties are better. The structural optimization form of the original machine provides a reference for the structural optimization design of other mechanical vacuum pumps. It lays a good foundation for the design and development of the product.) from the main performance parameters of the rotary vane-Roots composite pump, the performance of the compound pump is superior to that of the Roots-rotary vane pump and has obvious market advantages. The latter has the advantages of high integration, small space occupation, less components used and low power consumption, which is the practical production of the compound pump. The volumetric efficiency of the rotary plate-Roots composite pump increases with the decrease of the inlet gas pressure and is suitable for use in low, medium vacuum systems or as a front stage pump. The smaller the molecular weight of the extracted gas and the higher the temperature, the smaller the maximum zero flow compression ratio of the rotary vane-Roots composite pump, which is not suitable for use under the condition that the molecular weight of the extracted gas is very small or the temperature is very high.
【学位授予单位】：东北大学
【学位级别】：硕士
【学位授予年份】：2014
【分类号】：TB752

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