基于声表面波驱动器的液体单方向驱动

发布时间：2018-06-26 20:33

本文选题：浮动电极型单向换能器(FEUDT) + 单向声表面波　；参考：《微纳电子技术》2017年01期

【摘要】：设计了一种浮动电极型单向换能器(FEUDT)结构,用于激发单向声表面波(SAW),从而实现液体的单向驱动。通过对FEUDT结构模型的阻抗分析与SAW传播分析,获得了SAW驱动器的谐振频率、最佳驱动频率和最优指条宽度。利用剥离工艺,在128°旋转Y切向X方向传播的铌酸锂基板上,制作了周期为80μm、指条对数为40对、指条金属层厚度为1μm、指条宽度为7.3μm的FEUDT型SAW驱动器。搭建了SAW驱动器的驱动系统,实现了液体在器件表面上单向驱动。实验结果表明:FEUDT型SAW驱动器在驱动功率为4 W、驱动频率为48.8 MHz的电信号激励下,液滴在SAW驱动器表面上的驱动速度可达50 mm/s;在驱动功率为6.2 W、驱动频率为48.8 MHz的电信号激励下,液体在微流道中的驱动速度约为20 mm/s。
[Abstract]:A floating electrode type unidirectional transducer (FEUDT) is designed to excite unidirectional surface acoustic wave (saw) to realize the unidirectional driving of liquid. Based on the impedance analysis and saw propagation analysis of the FEUDT structure model, the resonant frequency, the optimal driving frequency and the optimum finger width of saw driver are obtained. A FEUDT type saw driver with a period of 80 渭 m, 40 pairs of finger pairs, 1 渭 m thickness of the strip metal layer and 7.3 渭 m width of the strip was fabricated on a 128 掳rotating Y tangential X direction lithium niobate substrate with a period of 80 渭 m, 40 pairs of finger pairs, 1 渭 m thickness of the strip metal layer and 7.3 渭 m width of the strip. The driving system of saw driver is built to realize the unidirectional drive of liquid on the surface of the device. The experimental results show that the driving speed of the droplet on the surface of saw driver can reach 50 mm / s when the driving power is 4W and the driving frequency is 48.8 MHz, and the driving power is 6.2 W and the driving frequency is 48.8 MHz. The velocity of the liquid in the microchannel is about 20 mm / s.
【作者单位】：上海应用技术大学理学院;日本立命馆大学微系统系;
【基金】：国家自然科学基金资助项目(51405303) 上海应用技术大学协同创新平台项目(3921NH166019);上海应用技术大学毕业设计重点项目(33110T165029)
【分类号】：TB552

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