基于压电驱动的网孔型超声雾化器研究

发布时间：2018-07-09 12:47

本文选题：MEMS + 压电　；参考：《南京航空航天大学》2017年硕士论文

【摘要】：基于微机电(MEMS)和逆压电效应高频驱动技术发展而来的压电驱动型超声波雾化器是一种高性能超声波雾化装置。目前,超声雾化技术在3D打印、喷墨打印机、医用药剂雾化等方面得到应用,尤其是3D打印技术在航空航天制造领域具有重要应用价值。本文立足于压电驱动的网孔型超声雾化器,结合理论与实验研究,力求完善雾化理论和优化雾化性能,旨在为以后的超声雾化器研究工作提供理论和实践基础。本文主要研究内容概括如下:首先,概述了超声雾化器的分类及国内外研究现状,简单介绍了各种超声雾化器的优缺点及应用前景,说明本文课题研究的目的和意义。其次,分析了雾化理论及原理。根据力学知识和本文所采用雾化器结构的基础上,进行了雾化片金属基板的薄板变形分析、锥孔流阻问题探究、雾化片锥孔变形过程分析;并利用力学知识对锥孔流阻进行了理论推导,证明了锥孔的变形能使液体产生流动,说明利用压电泵原理的可行性;并将一个周期内雾化量来源分为两部分,一部分是金属基板产生的压力雾化,另一部分是锥孔变形产生的喷嘴雾化。再次,进行网孔型超声雾化片振子振动仿真分析。利用有限元软件,进行相关的建模与仿真分析,根据仿真结果,选择雾化器的合理振型与谐振频率。最后,进行相关的实验研究。运用多普勒激光测振系统对雾化器进行扫频、定频实验;进行雾化效果实验,解释说明有限元分析和多普勒扫频、定频实验结果,根据实验的定性分析,确定雾化器参数与输入条件(电压、驱动频率)的关系,提供雾化器工作频率与电压的参考数据;在理论分析与实验结果相结合下,解释说明了雾化片金属基板和锥孔变形对雾化器雾化效果的影响。
[Abstract]:Piezoelectric ultrasonic atomizer based on MEMS and high frequency driving technology of inverse piezoelectric effect is a high performance ultrasonic atomizer. At present, ultrasonic atomization technology has been applied in 3D printing, ink jet printer, medical agent atomization, etc. Especially, 3D printing technology has important application value in aerospace manufacturing field. Based on the piezoelectric actuated meshed ultrasonic atomizer and combining the theoretical and experimental studies, this paper tries to perfect the atomization theory and optimize the atomization performance, in order to provide the theoretical and practical basis for the future research of the ultrasonic atomizer. The main research contents of this paper are summarized as follows: firstly, the classification of ultrasonic nebulizer and the research status at home and abroad are summarized. The advantages, disadvantages and application prospects of various ultrasonic nebulizers are briefly introduced, and the purpose and significance of the research in this paper are explained. Secondly, the theory and principle of atomization are analyzed. Based on the knowledge of mechanics and the structure of atomizer used in this paper, the thin plate deformation analysis of atomized sheet metal substrate, the flow resistance of cone hole and the analysis of deformation process of atomized sheet cone hole are carried out. The flow resistance of conical hole is deduced by using mechanical knowledge, it is proved that the deformation of conical hole can make liquid flow, the feasibility of using the principle of piezoelectric pump is explained, and the source of atomization quantity in a period is divided into two parts. One part is pressure atomization produced by metal substrate, the other part is nozzle atomization caused by conical hole deformation. Thirdly, the vibration simulation analysis of the ultrasonic atomizer is carried out. The finite element software is used for modeling and simulation analysis. According to the simulation results, the reasonable mode and resonant frequency of the atomizer are selected. Finally, the related experimental research is carried out. Doppler laser vibration measurement system is used to sweep and fix frequency of atomizer, and atomization effect experiment is carried out to explain the finite element analysis and Doppler frequency sweep, the results of fixed frequency experiment, according to the qualitative analysis of the experiment, The relationship between the atomizer parameters and the input conditions (voltage, driving frequency) is determined, and the reference data of the atomizer working frequency and voltage are provided. The effect of metal substrate and conical hole deformation on atomizing effect of atomizer is explained.
【学位授予单位】：南京航空航天大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TH137;V260.6

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