基于半导体工艺微热再生干燥系统的研究
发布时间：2018-07-25 09:19
【摘要】：压缩气体是仅次于电力的第二大动力能源,又是具有多种用途的工业气源。在工业中有三种方法来处理压缩气体的干燥问题:1、利用压缩气体中水蒸气分压由压缩气体温度的高低决定的特性进行降温脱水干燥;2、采用某些化学物质的潮解特性进行脱水干燥;3、采用吸附剂对压缩气体中的水蒸气具有选择性吸附的特性进行脱水干燥。目前一般使用第三种方法处理压缩气体,但是吸附式干燥器大多采用双塔式结构和定时周期控制法,每塔循环经历吸附-再生的工艺流程,为用户连续提供干燥气体[1],这种传统的生产和控制方法,由于缺乏对生产过程实时有效的监控,无法使吸干机运行在最佳工作状态,同时也不能保证成品气质量稳定,而且还会造成能源的浪费。针对现状分析,本论文研制了一款新型式的微热再生干燥系统控制器,主要解决以下问题:1、微热式再生气体干燥系统如何能确保提供质量稳定气源连续的成品气体给用户的同时,能源还可以得到合理有效利用。2、微热式再生气体干燥系统如何保证在加热再生气体时不会因过热而导致系统在安全方面出现问题。为了解决上述的两问题,在本论文中主要采用了过程自适应优选法来保证成品气的质量和流量,同时减少再生气用量,最大限度节能降耗;采取了加热超温报警和加热气电源自动脱扣保护措施来解决因过热引起的安全问题。该新型专用控制器已经解决了预期要解决的两大技术难点:在线露点测量仪器为自适应优选法提供算法中所需参数,实现了对再生气体生产工艺时间参数的实时调整,达到在保证成品气质量的基础上,减少再生气用量和缩短了再生气的加热时间,最大限度节能降耗;测温传感器或加热执行部件出现故障时,加热器电源空开都会自动脱扣,切断加热器的电源,由微热运行转变为无热运行保证了系统的安全性。微热再生干燥系统专用控制器已经批量应用。
[Abstract]:Compressed gas is the second largest power source after electric power, and it is also a multi-purpose industrial gas source. In industry, there are three ways to deal with the drying problem of compressed gas: 1. Using the characteristic of partial pressure of water vapor in compressed gas, which is determined by the temperature of compressed gas, to carry out cooling, dehydration and drying. The water vapor in compressed gas was desorbed selectively by adsorbent. At present, the third method is generally used to deal with compressed gas, but most of the adsorptive desiccators adopt the two-tower structure and timing cycle control method. Each tower cycle goes through the process of adsorption-regeneration. This traditional production and control method can not make the suction machine run in the best working condition because of the lack of real-time and effective monitoring of the production process, and also can not guarantee the quality of the finished gas. But also will cause the waste of energy. According to the analysis of the present situation, a new type of controller of micro-heat regenerative drying system is developed in this paper. The following problems are mainly solved: 1. How can the micro-heat regenerative gas drying system ensure the supply of continuous finished gas with stable quality gas sources to customers at the same time? Energy can also be used reasonably and efficiently. How to ensure that the heating regenerative gas drying system will not cause safety problems due to overheating of regenerated gas. In order to solve the above two problems, this paper mainly adopts the process adaptive optimization method to ensure the quality and flow rate of the finished gas, at the same time, reduce the amount of re-gas, maximize energy saving and consumption reduction; The overheating alarm and automatic tripping protection measures are adopted to solve the safety problems caused by overheating. The new special controller has solved two technical difficulties which are expected to be solved: On-line Dew Point measuring instrument provides the parameters needed in the adaptive optimization algorithm and realizes the real-time adjustment of the process parameters of regenerated gas production. On the basis of ensuring the quality of finished gas, reducing the amount of regenerated gas and shortening the heating time of regenerated gas, the maximum energy saving and consumption reduction can be achieved. When the temperature sensor or heating executive parts fail, the heater power supply will automatically release. The power supply of the heater is cut off and the safety of the system is ensured. The special controller of micro-heat regenerative drying system has been applied in batch.
【学位授予单位】：北京工业大学
【学位级别】：硕士
【学位授予年份】：2014
【分类号】：TB4
本文编号：2143357
[Abstract]:Compressed gas is the second largest power source after electric power, and it is also a multi-purpose industrial gas source. In industry, there are three ways to deal with the drying problem of compressed gas: 1. Using the characteristic of partial pressure of water vapor in compressed gas, which is determined by the temperature of compressed gas, to carry out cooling, dehydration and drying. The water vapor in compressed gas was desorbed selectively by adsorbent. At present, the third method is generally used to deal with compressed gas, but most of the adsorptive desiccators adopt the two-tower structure and timing cycle control method. Each tower cycle goes through the process of adsorption-regeneration. This traditional production and control method can not make the suction machine run in the best working condition because of the lack of real-time and effective monitoring of the production process, and also can not guarantee the quality of the finished gas. But also will cause the waste of energy. According to the analysis of the present situation, a new type of controller of micro-heat regenerative drying system is developed in this paper. The following problems are mainly solved: 1. How can the micro-heat regenerative gas drying system ensure the supply of continuous finished gas with stable quality gas sources to customers at the same time? Energy can also be used reasonably and efficiently. How to ensure that the heating regenerative gas drying system will not cause safety problems due to overheating of regenerated gas. In order to solve the above two problems, this paper mainly adopts the process adaptive optimization method to ensure the quality and flow rate of the finished gas, at the same time, reduce the amount of re-gas, maximize energy saving and consumption reduction; The overheating alarm and automatic tripping protection measures are adopted to solve the safety problems caused by overheating. The new special controller has solved two technical difficulties which are expected to be solved: On-line Dew Point measuring instrument provides the parameters needed in the adaptive optimization algorithm and realizes the real-time adjustment of the process parameters of regenerated gas production. On the basis of ensuring the quality of finished gas, reducing the amount of regenerated gas and shortening the heating time of regenerated gas, the maximum energy saving and consumption reduction can be achieved. When the temperature sensor or heating executive parts fail, the heater power supply will automatically release. The power supply of the heater is cut off and the safety of the system is ensured. The special controller of micro-heat regenerative drying system has been applied in batch.
【学位授予单位】：北京工业大学
【学位级别】：硕士
【学位授予年份】：2014
【分类号】：TB4
【参考文献】
相关硕士学位论文 前1条
1 钟爱民;质量流量计自动校验控制系统的设计研究[D];上海交通大学;2007年
，本文编号：2143357
本文链接：https://www.wllwen.com/guanlilunwen/gongchengguanli/2143357.html
