电弧离子镀CrN薄膜的组织结构与性能的研究

发布时间：2018-08-13 09:00

【摘要】：本文采用电弧离子镀技术在M2高速钢和316L不锈钢基体上制备CrN_x薄膜。用X射线衍射仪(XRD)、扫描电镜(SEM)、显微硬度计和摩擦磨损试验机等方法对制备的试样进行分析,研究考察真空室气压及氩气/氮气比例对CrN_x薄膜组织结构、化学成分、显微硬度及耐磨性能的影响。结果表明,在M2高速钢上沉积CrN_x薄膜,氮气气压的大小对薄膜的表面形貌有重大影响:随着氮气气压的升高,薄膜表面的大颗粒数量减少,尺寸减小,薄膜表面更加平整;随着氮气气压的升高,薄膜的相结构由Cr+Cr_2N混合相转变为Cr_2N+CrN混合相,高氮气压下(大于0.5Pa),薄膜的择优取向为Cr_2N(300),实验中没有发现CrN单相结构。在M2高速钢上沉积CrN_x薄膜,随着氮气气压的升高,薄膜的显微硬度大大提高,氮气气压为4.0Pa时,达到实验所测的最大值2237 kg/mm2;随着氮气气压的升高,薄膜的摩擦系数明显减少,氮气气压为4.0Pa时,薄膜的摩擦系数最小。在316L不锈钢上沉积CrN_x薄膜,氮气气压的大小对薄膜的表面形貌有重大影响:随着氮气气压的升高,薄膜表面大颗粒数量减少,尺寸减小,薄膜表面更加平整;随着氮气气压的升高,薄膜的相结构由Cr+Cr_2N混合相转变为Cr_2N+CrN混合相,高氮气压下(大于0.5Pa),薄膜的择优取向为Cr_2N(300),实验中没有发现CrN单相薄膜。在M2高速钢上沉积CrN_x薄膜,氩气/氮气比例大小对薄膜的表面形貌有重大影响:随着氩气/氮气比例的升高,薄膜表面大颗粒数量增多,尺寸变大,薄膜表面变粗糙;氩气/氮气比例大小影响薄膜的相成分:实验过程观察膜层中存在Cr、CrN和Cr_2N三种相,氮气/氩气比例为0到40%时,膜层由Cr_2N+CrN混合相转变为Cr_2N+Cr混合相,此时薄膜的择优取向为Cr_2N(300),实验中没有发现CrN单相薄膜。在M2高速钢上沉积CrN_x薄膜,氩气/氮气比例大小影响薄膜的显微硬度:随着氩气/氮气比例的升高,薄膜的显微硬度先降低后增加再降低,当氩气与氮气比例为25%,达到极小值1776.1kg/mm2,氩气与氮气比例为40%,获得实验所测的最大值2263kg/mm2。在316L不锈钢上沉积CrN_x薄膜,氩气/氮气比例大小对薄膜的表面形貌都有重大影响:随着氩气/氮气比例的升高,薄膜表面大颗粒数量增多,尺寸变大,薄膜表面粗糙;氩气/氮气比例大小影响薄膜的相成分:实验过程观察膜层中存在Cr、CrN和Cr_2N三种相。氮气/氩气比例为0到40%时,膜层由Cr_2N+CrN混合相转变为Cr_2N+Cr混合相,此时薄膜的择优取向为Cr_2N(300)。同样实验中没有发现CrN单相薄膜。
[Abstract]:In this paper, CrN_x thin films were prepared on M2 high speed steel and 316L stainless steel by arc ion plating. The samples were analyzed by (XRD), scanning electron microscope (XRD),) microhardness tester and friction and wear tester. The microstructure and chemical composition of CrN_x films were investigated by vacuum chamber pressure and argon / nitrogen ratio. Effect of microhardness and wear resistance. The results show that the size of nitrogen gas pressure has a great influence on the surface morphology of CrN_x film deposited on M2 high speed steel. With the increase of nitrogen pressure, the number of large particles on the film surface decreases, the size decreases, and the film surface becomes more smooth. With the increase of nitrogen pressure, the phase structure of the film changed from Cr Cr_2N mixed phase to Cr_2N CrN mixed phase. At high nitrogen pressure (> 0.5Pa), the preferred orientation of the film was Cr_2N (300). No single phase structure of CrN was found in the experiment. With the increase of nitrogen pressure, the microhardness of CrN_x film on M2 high speed steel is greatly improved. When the nitrogen pressure is 4.0Pa, the maximum measured value is 2237 kg / m2, and the friction coefficient of the film decreases obviously with the increase of nitrogen pressure. When the nitrogen pressure is 4.0Pa, the friction coefficient of the film is the smallest. CrN_x films were deposited on 316L stainless steel. The surface morphology of the films was greatly affected by the nitrogen pressure. With the increase of nitrogen pressure, the number of large particles on the surface of the films decreased, the size decreased, and the surface of the films became more smooth. With the increase of nitrogen pressure, the phase structure of the film changed from Cr Cr_2N mixed phase to Cr_2N CrN mixed phase. At high nitrogen pressure (> 0.5Pa), the preferred orientation of the film was Cr_2N (300). No single phase CrN thin film was found in the experiment. CrN_x films were deposited on M2 high speed steel. The ratio of argon to nitrogen had a significant effect on the surface morphology of the films. With the increase of argon / nitrogen ratio, the number of large particles on the surface of the films increased, the size of the films became larger, and the surface of the films became rough. The phase composition of the film was influenced by the ratio of argon to nitrogen. During the experiment, there were three phases, Cr-CrN and Cr_2N. When the ratio of nitrogen to argon was 0 to 40, the film changed from Cr_2N CrN mixed phase to Cr_2N Cr mixed phase. The preferred orientation of the films is Cr_2N (300). No CrN single phase films were found in the experiment. CrN_x films were deposited on M2 high speed steel. The ar / nitrogen ratio affected the microhardness of the films. With the increase of argon / nitrogen ratio, the microhardness of the films decreased first and then decreased. When the ratio of argon to nitrogen is 25, the minimum value is 1776.1 kg / m2, and the ratio of argon to nitrogen is 40. The maximum measured value is 2263kg / mm ~ (-2). The surface morphology of CrN_x thin films deposited on 316L stainless steel is greatly influenced by the ratio of argon to nitrogen. With the increase of argon / nitrogen ratio, the number of large particles on the surface of the films increases, the size of the films becomes larger, and the surface of the films is rough. The phase composition of the film was influenced by the ratio of argon to nitrogen. Three phases, CrCrN and Cr_2N, were observed in the film during the experiment. When the ratio of nitrogen to argon is 0 to 40, the film changes from Cr_2N CrN mixed phase to Cr_2N Cr mixed phase, and the preferred orientation of the film is Cr_2N (300). In the same experiment, no CrN single phase film was found.
【学位授予单位】：沈阳理工大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：O484.1

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