二氧化钛薄膜的制备及光催化性能的研究
发布时间：2018-09-07 18:09
【摘要】：随着科技的进步和现代工业化的发展,环境污染问题变的日益严峻。在现代化工业发展过程中,生成各种对生态环境,大气有害的各种物质,为了处理这些对环境和人类有害的物质,常用的一些物理化学方法都有各种缺点,例如,周期过长、投资成本过大以及降解不完全彻底。然而在国内外科学家的研究下发现二氧化钛的一些光催化性能,这一科学研究表明利用光催化性能解决生态环境污染问题的创新时代即将到来。光催化技术操作简单、易于控制、分解污染物效率高、设备单一,开拓了有关有机染料、工业废水等难降解的环境污染物的新研究方向。 第一章详细介绍了二氧化钛的物理化学性质,用作光催化的基本原理以及提高二氧化钛光催化性能的途径,并且介绍了Ti02薄膜在生态环境保护方面的应用前景。 第二章介绍了制备Ti02薄膜常用的方法以及各种制备方法的优缺点,重点介绍了本次实验所用的射频磁控溅射法。对薄膜表征方法作以简单介绍,并且详细介绍了磁控溅射仪制备Ti02薄膜的实验原理以及甲基橙的分解原理。 第三章分别介绍了磁控溅射仪制备Ti02薄膜的操作流程,并且详细说明了制备Ti02靶材、Ti02薄膜的实验操作步骤。 第四章本章重点讨论了衬底温度和溅射功率对二氧化钛薄膜晶体结构和光催化性能的影响。利用XRD检测了薄膜样品的晶向变化；通过原子力显微镜检测薄膜表面；并通过粗糙度公式计算薄膜表面颗粒大小的变化趋势；利用紫外光照下分解甲基橙来说明薄膜的光催化性能。 第五章本章重点讨论了不同的退火温度和退火时间对Ti02薄膜的结构和光催化性能的影响作用。对Ti02薄膜光学性能的检测通过紫外可见光谱进行分析；利用间接带隙的外推法计算了薄膜样品的禁带宽度；利用XRD检测了随着退火时间的增加薄膜样品的晶相变化情况；最后对薄膜的表面形貌由原子力显微镜进行检测分析。
[Abstract]:With the progress of science and technology and the development of modern industrialization, the problem of environmental pollution has become increasingly serious. In the process of modern industrial development, a variety of substances harmful to the ecological environment and the atmosphere are produced. In order to deal with these substances harmful to the environment and human beings, some commonly used physical and chemical methods have various shortcomings, for example, the cycle is too long. However, some photocatalytic properties of titanium dioxide have been found by domestic surgeons. This scientific research shows that the new era of using photocatalytic properties to solve the problem of ecological environment pollution is coming. The single equipment opens up new research directions for refractory environmental pollutants such as organic dyes and industrial wastewater.
In the first chapter, the physical and chemical properties of titanium dioxide are introduced in detail. The basic principle of photocatalysis and the ways to improve the photocatalytic performance of titanium dioxide are also introduced. The application prospects of titanium dioxide film in ecological and environmental protection are also introduced.
In the second chapter, the common methods of preparing Ti02 thin films and the advantages and disadvantages of various methods are introduced, especially the RF magnetron sputtering method used in this experiment. The characterization methods of Ti02 thin films are briefly introduced, and the experimental principle of preparing Ti02 thin films by magnetron sputtering and the decomposition principle of methyl orange are introduced in detail.
In the third chapter, the operational procedures of Ti02 thin films prepared by magnetron sputtering are introduced, and the experimental procedures of Ti02 target and Ti02 thin films prepared by magnetron sputtering are described in detail.
In Chapter 4, the effects of substrate temperature and sputtering power on the crystal structure and photocatalytic properties of titanium dioxide thin films are discussed. The crystal orientation of the thin films are measured by XRD, the surface of the thin films is measured by atomic force microscopy, and the variation trend of the surface particle size is calculated by the roughness formula. The photocatalytic properties of the films are explained by decomposition of methyl orange.
In the fifth chapter, the effects of annealing temperature and annealing time on the structure and photocatalytic properties of Ti02 thin films are discussed. The optical properties of Ti02 thin films are analyzed by UV-Vis spectroscopy, the band gap of the films is calculated by the extrapolation method of indirect band gap, and the band gap is detected by XRD. The morphology of the films was analyzed by atomic force microscopy.
【学位授予单位】：西北大学
【学位级别】：硕士
【学位授予年份】：2014
【分类号】：O484.1
本文编号：2229024
[Abstract]:With the progress of science and technology and the development of modern industrialization, the problem of environmental pollution has become increasingly serious. In the process of modern industrial development, a variety of substances harmful to the ecological environment and the atmosphere are produced. In order to deal with these substances harmful to the environment and human beings, some commonly used physical and chemical methods have various shortcomings, for example, the cycle is too long. However, some photocatalytic properties of titanium dioxide have been found by domestic surgeons. This scientific research shows that the new era of using photocatalytic properties to solve the problem of ecological environment pollution is coming. The single equipment opens up new research directions for refractory environmental pollutants such as organic dyes and industrial wastewater.
In the first chapter, the physical and chemical properties of titanium dioxide are introduced in detail. The basic principle of photocatalysis and the ways to improve the photocatalytic performance of titanium dioxide are also introduced. The application prospects of titanium dioxide film in ecological and environmental protection are also introduced.
In the second chapter, the common methods of preparing Ti02 thin films and the advantages and disadvantages of various methods are introduced, especially the RF magnetron sputtering method used in this experiment. The characterization methods of Ti02 thin films are briefly introduced, and the experimental principle of preparing Ti02 thin films by magnetron sputtering and the decomposition principle of methyl orange are introduced in detail.
In the third chapter, the operational procedures of Ti02 thin films prepared by magnetron sputtering are introduced, and the experimental procedures of Ti02 target and Ti02 thin films prepared by magnetron sputtering are described in detail.
In Chapter 4, the effects of substrate temperature and sputtering power on the crystal structure and photocatalytic properties of titanium dioxide thin films are discussed. The crystal orientation of the thin films are measured by XRD, the surface of the thin films is measured by atomic force microscopy, and the variation trend of the surface particle size is calculated by the roughness formula. The photocatalytic properties of the films are explained by decomposition of methyl orange.
In the fifth chapter, the effects of annealing temperature and annealing time on the structure and photocatalytic properties of Ti02 thin films are discussed. The optical properties of Ti02 thin films are analyzed by UV-Vis spectroscopy, the band gap of the films is calculated by the extrapolation method of indirect band gap, and the band gap is detected by XRD. The morphology of the films was analyzed by atomic force microscopy.
【学位授予单位】：西北大学
【学位级别】：硕士
【学位授予年份】：2014
【分类号】：O484.1
【参考文献】
相关期刊论文 前2条
1 边亮;宋绵新;周天亮;赵效勇;戴清清;;Band gap calculation and photo catalytic activity of rare earths doped rutile TiO_2[J];Journal of Rare Earths;2009年03期
2 刘贵昂;杨贵进;郑妃盛;;溅射功率对TiO_2薄膜结构与特性的影响[J];真空科学与技术学报;2007年03期
，本文编号：2229024
本文链接：https://www.wllwen.com/guanlilunwen/gongchengguanli/2229024.html
