大泄漏率真空设备抽漏气理论计算
发布时间：2018-11-03 16:07
【摘要】：在真空环境获得试验中,多数研究的都是高抽速低泄漏量的情况,很少有对高泄漏率进行分析研究的,但大泄漏量在工程应用中却是非常重要的部分。本文针对高抽速大泄漏量的问题进行研究,采用静态升压法来解决工程实践中经常存在的泄漏点分散和漏孔形状不规则的问题;考虑到泵组泄漏、气体成分和管道流导等因素对系统有效抽速的影响,对泵组的抽速计算进行了参数修正;通过将大泄漏量带入抽速曲线进行对比计算,得出大泄漏量对于抽气时间的影响;通过具体试验,将试验结果与理论计算结果进行对比分析,验证了模型的正确性和准确性。该理论计算方法为工程实际中存在的大泄漏问题提供了理论支持,为之后的气压控制提供了定量计算依据。
[Abstract]:In the experiment of obtaining vacuum environment, most of the researches are on the case of high pumping speed and low leakage rate, but the large leakage rate is a very important part in engineering application. In this paper, the problem of high pumping speed and large leakage rate is studied, and the static boost method is adopted to solve the problems of dispersion of leakage points and irregular shape of holes in engineering practice. Considering the effects of pump group leakage, gas composition and pipeline flow conductance on the effective pumping speed of the system, the parameters of pump group speed calculation are revised. By comparing and calculating the large leakage volume into the pumping speed curve, the influence of the large leakage rate on the pumping time is obtained, and the correctness and accuracy of the model are verified by comparing the experimental results with the theoretical calculation results. The theoretical calculation method provides a theoretical support for the problem of large leakage in engineering practice and a quantitative calculation basis for the subsequent air pressure control.
【作者单位】： 中北大学机械工程学院;
【分类号】：TB75
，
本文编号：2308270
[Abstract]:In the experiment of obtaining vacuum environment, most of the researches are on the case of high pumping speed and low leakage rate, but the large leakage rate is a very important part in engineering application. In this paper, the problem of high pumping speed and large leakage rate is studied, and the static boost method is adopted to solve the problems of dispersion of leakage points and irregular shape of holes in engineering practice. Considering the effects of pump group leakage, gas composition and pipeline flow conductance on the effective pumping speed of the system, the parameters of pump group speed calculation are revised. By comparing and calculating the large leakage volume into the pumping speed curve, the influence of the large leakage rate on the pumping time is obtained, and the correctness and accuracy of the model are verified by comparing the experimental results with the theoretical calculation results. The theoretical calculation method provides a theoretical support for the problem of large leakage in engineering practice and a quantitative calculation basis for the subsequent air pressure control.
【作者单位】： 中北大学机械工程学院;
【分类号】：TB75
，
本文编号：2308270
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