磁控溅射制备具有SiOC过渡层结构的类金刚石薄膜及其结构性能的研究

发布时间：2019-01-05 16:54

【摘要】：类金刚石(DLC)薄膜由于其独特的性能作为功能薄膜受到广泛的关注与研究。本文采用射频磁控溅射技术在玻璃上沉积DLC薄膜,旨在提高玻璃抗划伤能力。为了解决DLC薄膜在实际使用中容易脱落这一问题,设计了碳硅氧(SiOC)薄膜作为过渡层,以提高DLC薄膜与玻璃间的结合性能,满足实际使用的需求。为了掌握磁控溅射工艺参数的变化对于DLC、SiOC薄膜性能的影响,为工业化应用及生产提供更好的参考。对溅射功率、工作气压、基底温度及氩气流量等工艺参数进行了研究,为工业化应用及生产提供更好的参考。主要内容如下:1、论述了 DLC及SiOC薄膜的主要结构、性能、制备方法及应用领域,阐明了课题的研究背景及选题依据。2、论述了磁控溅射技术基本原理、实验中所使用的仪器的构造及相应的技术参数指标。确定利用石墨靶及碳硅氧陶瓷靶作为薄膜的制备原料,设计了合理的实验方案和检测表征手段。3、研究了溅射功率、工作气压、基底温度及氩气流量对于DLC及SiOC薄膜结构成分、透过率及光学带隙等性能的影响。掌握了所研究的工艺参数对薄膜的影响规律及分析讨论了原因。4、在玻璃基底上制备了不同的SiOC-DLC复合薄膜,利用UMT模块对其摩擦磨损性能进行了测试。结果表明:具有SiOC过渡层结构的DLC薄膜耐磨性能良好,可以对玻璃起到良好的保护作用。
[Abstract]:Diamond-like carbon (DLC) films have been widely studied as functional thin films due to their unique properties. DLC thin films were deposited on glass by RF magnetron sputtering in order to improve the scratch resistance of glass. In order to solve the problem of easy shedding of DLC thin films in practical use, the carbon-silicon-oxygen (SiOC) thin films are designed as transition layers to improve the binding properties between DLC thin films and glass, and to meet the practical needs. In order to understand the influence of the technological parameters of magnetron sputtering on the properties of DLC,SiOC films, a better reference is provided for industrial application and production. The parameters of sputtering power, working pressure, substrate temperature and argon flow are studied, which provides a better reference for industrial application and production. The main contents are as follows: 1. The main structure, properties, preparation methods and application fields of DLC and SiOC thin films are discussed. The structure of the instrument used in the experiment and the corresponding technical parameters. Graphite target and carbon-silicon oxide ceramic target are used as raw materials for the preparation of thin films. A reasonable experimental scheme and measuring and characterizing method are designed. 3. Sputtering power and working pressure are studied. The effects of substrate temperature and argon flow rate on the structure, transmittance and optical band gap of DLC and SiOC films were investigated. The influence of the process parameters on the film was studied and the reasons were discussed. 4. Different SiOC-DLC composite films were prepared on glass substrates. The friction and wear properties of the films were tested by UMT module. The results show that the DLC thin films with SiOC transition layer have good wear resistance and can protect the glass.
【学位授予单位】：海南大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TB383.2

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