有机薄膜光电特性在线测量方法的研究

发布时间：2019-04-26 16:15

【摘要】：随着有机薄膜电子器件的快速发展,有机半导体薄膜材料特性的研究成为近年来材料和电子研究的热门。研究表明,薄膜的结构以及表面形貌影响薄膜的电学特性。因此,为研究有机薄膜光学特性和电学特性的联系,本文在现有光学测量系统的基础上,对电学测量系统以及样品进行了改进,提出了光电联合测量方案,实现了真空环境下有机薄膜光电特性的在线测量。本文的主要内容如下:1、研究了有机薄膜的光电特性以及其导电机理,分析、对比现有的有机薄膜光电特性的测量方法。根据薄膜表面形貌实时监测和电学特性实时测量的需求,设计了光学测量系统和可控电学测量系统结合的光电联合测量方案。2、研究了有机薄膜电学特性场效应晶体管测量法的原理,设计并制作了电学测量系统,包括离线测量和在线测量。该测量系统可实现测量模式(包括定值、定时和循环等)的实时切换。在原有的光学测量系统光路中加入了校准光路,通过实时校准减小光谱信号的漂移。3、研究了有机薄膜特性测量所需样品的结构特点,设计了具有梳齿状的样品结构。实验表明,该结构满足了测试需求,取得了较好的结果。4、针对本文的测量系统进行性能测试,得出其电压范围为?0.2V~?60V,测量电流精度为100 p A,满足了有机薄膜的测量需求(电压±30 V,电流μA级)。利用该系统进行了离线和在线样品的测试。根据测得的电学信号,得到了样品的特性曲线和载流子迁移率等有机薄膜的电学特性参数。根据测得的光学信号,分不同区域进行分析,得到了有机薄膜的生长信息。同时测试了加电条件下对应光学信号的变化,验证了该测量系统在有机薄膜光电特性测量方面的可行性及实时性。
[Abstract]:With the rapid development of organic thin film electronic devices, the research on the properties of organic semiconductor thin film materials has become a hot topic in recent years. The results show that the structure and surface morphology of the films affect the electrical properties of the films. Therefore, in order to study the relationship between the optical and electrical properties of organic thin films, based on the existing optical measurement system, the electrical measurement system and samples were improved, and the photoelectric joint measurement scheme was proposed. The on-line measurement of optical and electrical properties of organic thin films in vacuum environment is realized. The main contents of this paper are as follows: 1. The photoelectric properties and conductive mechanism of organic thin films are studied, and the measurement methods of optical and electrical properties of organic thin films are analyzed and compared. According to the requirements of real-time monitoring and real-time measurement of electrical properties of thin film surface, a combined photoelectric measurement scheme of optical measurement system and controllable electrical measurement system was designed. The principle of organic thin film electrical characteristic field effect transistor (FET) measurement is studied. The electrical measurement system including off-line measurement and on-line measurement is designed and fabricated. The measurement system can realize real-time switching of measurement modes (including fixed value, timing and loop, etc.). The calibration optical path is added to the optical path of the original optical measurement system, and the drift of the spectral signal is reduced by real-time calibration. 3. The structural characteristics of the sample required for the measurement of the characteristics of the organic film are studied, and the sample structure with comb tooth shape is designed. The experimental results show that the structure meets the test requirements and achieves good results. 4. The performance of the measuring system is tested. The voltage range is-0.2V / 60V, the current precision is 100p A, and the measuring current precision is 100p / A, the current precision is 100p / A and the voltage range is-0.2V / 60V. The measurement requirements of organic thin films are satisfied (voltage 卤30 V, current 渭 A). The off-line and on-line samples were tested by the system. According to the measured electrical signals, the characteristic curves of the samples and the electrical parameters of the organic thin films, such as carrier mobility, have been obtained. According to the measured optical signals, the growth information of organic thin films was obtained by analyzing different regions. At the same time, the change of optical signal under the condition of charging is tested, and the feasibility and real-time performance of the measuring system in the measurement of the photoelectric characteristics of organic film are verified.
【学位授予单位】：天津大学
【学位级别】：硕士
【学位授予年份】：2014
【分类号】：TB383.2

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